Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination between -X and -X (S, W, X, Y, Z, T, J, K shaft) 20Shaft type Combination Applicable size Part no.

7

S CAC408 50 50A Flange R 230 VAC G N.O.

CJ2

16 0.18 J 9.4 For construction, refer to page 6-3-6.

Air Cylinder Series CS1

rod boot 4 x FD C C C d d d S + Stroke ZZ + Stroke ZZ1 + l + Stroke Long stroke 4 x J 2 x P Width across flats KA 4 x FD With rod boot S + Stroke ZZ + Stroke ZZ1 + l + Stroke With auto switch: CDS1F 4 x J ~ = 2 x P Width across flats KA 4 x FD With rod boot ~ = ~ = S + Stroke ZZ + Stroke ZZ1 + l + Stroke (mm) Without rod boot With rod boot Type Bore size (mm) Stroke range (mm) A AL B B C

MY1

Shock absorber specifications Piston speed Bore size (mm) 10 16 to 100 RB 0806 RB 1007 RB 1412 RB 2015 RB 0805 Model Without stroke adjusting unit 100 to 500mm/s 100 to 1000mm/s Max. energy absorption J (ftlb) 2.9 (2.1) 5.9 (4.4) 19.6 (14.4) 58.8 (43.4) 100 to 200mm/s 100 to 1000mm/s Note 1) 100 to 1500mm/s Note 2) A unit 1.0 (0.7) Stroke adjusting unit Stroke absorption mm (in) 6 (0.2) 7

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

) V: Speed (mm/s) Stroke (mm) Es: Allowable kinetic energy for intermediate stop using an air pressure circuit (J) Ps: Operating pressure limit for intermediate stop using an external stopper, etc.

RB/RBL/RBQ

J J N m/s2 1.

RB/RBL/RBQ

J J N m/s2 1.

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

CE

MI W S + 0.05 0.02 CEP1 CE1 CE2 ML2B C J G5-S Tolerances can be set with the preset value. OK/NG signal is output by the counter. Labor savings can be realized in parts inspections.

CE

MI W S + 0.05 0.02 CEP1 CE1 CE2 ML2B C J G5-S Tolerances can be set with the preset value. OK/NG signal is output by the counter. Labor savings can be realized in parts inspections.

CE

MI W S + 0.05 0.02 CEP1 CE1 CE2 ML2B C J G5-S Tolerances can be set with the preset value. OK/NG signal is output by the counter. Labor savings can be realized in parts inspections.

Aluminum High Vacuum Angle Valve

The initial exhaust rate is adjusted by turning the adjustment nut counterclockwise. x Opening of the initial exhaust valve (valve S) When the pilot pressure is applied to the pilot port S, the valve S is removed from the valve S seal assembly, and the valve opens the adjusted amount.

Dual Rod Cylinder Series CXSJ/CXS

/s 30 to 300 mm/s 30 to 800 mm/s Rubber bumper 0 to 5 mm compared to the standard stroke M5 x 0.8 Rc 1/8 Slide bearing, Ball bushing bearing (Same dimensions for both) 0.095 J 0.0023 J 0.064 J 0.17 J 0.27 J 0.32 J Made to Order Specifications (For details, refer to pages 1851 to 1954 and 2003.)

IIIIIII

( 2 6 k 9 ) 0 216 in (5 5mm) 0 039 in. (1mm) A B c D E F G H J K 3.92 '99.5',13.05 '77.51 0.96 0.87 (221 0.06 (1.s) o.12 (3) 't.57 (40) 0.96 24.51 1.20 t30.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses MECHANICAL VALVES HOWTO ORDER S NVM430-N01-34 Series NVM NVM430-N01-33 F O F 4 4 1 l b s ( 2 k g ) T T 900 oi (J !

Mechanical Valves Series NVM, NVFM, NVZNI

( 2 6 k 9 ) 0 216 in (5 5mm) 0 039 in. (1mm) A B c D E F G H J K 3.92 '99.5',13.05 '77.51 0.96 0.87 (221 0.06 (1.s) o.12 (3) 't.57 (40) 0.96 24.51 1.20 t30.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses MECHANICAL VALVES HOWTO ORDER S NVM430-N01-34 Series NVM NVM430-N01-33 F O F 4 4 1 l b s ( 2 k g ) T T 900 oi (J !

ML2B

1 Stroke Reading Rodless Cylinder with Brake Series ML2B 25, 32, 40 RE A B REC CX CY Transfer Transfer Transfer Transfer MQQ M RHC MK(2) RS Q G Position feedback RS H A RZQ MI W S Rodless cylinder With brake CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-13-1 2 Stroke Reading Rodless Cylinder with Brake Series ML2B 25, 32, 40 For measuring intermediate stops Incorporating a brake

ML2B

Stroke Reading Rodless Cylinder with Brake Series ML2B 25, 32, 40 RE A B REC CX CY Transfer Transfer Transfer Transfer MQQ M RHC MK(2) RS Q G Position feedback RS H A RZQ MI W S Rodless cylinder With brake CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-13-1 Stroke Reading Rodless Cylinder with Brake Incorporating a brake mechanism and stroke sensor allows positioning with high repeatability

ML2B

Rc 1/4 MM 16 21.5 24.5 LL 28 30.5 37.5 KK 15 16 17.5 NN 22 26 37.5 Applicable cylinder ML2B25 ML2B32 ML2B40 Applicable cylinder ML2B25 ML2B32 ML2B40 RS H A RZQ MI W S Stroke Adjusting Unit CEP1 With shock absorber: CE1 ML2B Bore size S Stroke L CE2 TT h ML2B EB FF EA Stroke adjusting unit C J G5-S CV ED MVGQ CC TA FA (Absorber stroke) RB FB FC J Shock absorber Cushion needle EC DFH -X EY