21

0.29 J 0.46 J 0.84 J Allowable kinetic energy Female rod end 0.11 J 0.18 J 0.29 J 0.52 J Operate the cylinder within the allowable kinetic energy.

Series IDG

50M IDG30HM, 50HM IDG30LM, 50LM (B) K (D) C L H F 37 J IN OUT M (E) (G) M5 female threads Drain discharge With drain guide With float type auto drain (P) (N) N.C.: Gray N.O.: Black Thread size: 1/4 (without valve mechanism) Applicable tube O.D.: 10 (NPT threads: 3/8 inch) Width across flats 19 With float type auto drain With drain guide Port size A B C D E F G H J K L M N Model P 150 146

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

CV/MVGQ

O.D. of cover : 1.7 mm Socket Coil ML2B Cover Hook For DC C J G5-S 3.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

18.5 12.6 9.2 35 4.5 29h9 29.5h9 14H9 3.8 5 H9 5.3 2.5 4.2 10 3.3 6 3.5 M4 x 0.7 2.2 5.3 M4 x 0.7 4 5.5 38 23 15.5 10.5 40 4.5 33h9 34 h9 17H9 5 6 H9 5.3 2.5 4.2 10 4.2 7.5 4.5 M5 x 0.8 2.5 6 M4 x 0.7 4 5.5 45 30 18.4 12.2 50 5 39h9 40 h9 20H9 6 7 H9 6.5 2.5 4.5 11.5 4.2 7.5 4.5 M5 x 0.8 2.5 6 M5 x 0.8 5 (mm) JJ JK JU P Q S SD SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 1 2 3 7 M3

MHL2

M5 X 0.8 (Finger opening port) Auto switch mounting groove (4 locations) 4-M5 X 0.8 44 (Piston rod and rack screw) 5.5 H M5 X 0.8 18.2 (Finger closing port) 12.4 0.5 9 8 8.4 16.8 15 31 Width across 12.5 A flats 8 (4 locations) (46) 20 15 15 7 Closed 7 7 34 20 10 10 Open G 4-M4 X 0.7 through (Thread for mounting attachment) Model MHL2-10D MHL2-10D1 MHL2-10D2 J 80 108 146 A B C D E F G H 38

240

NS 14 14 24 24 30 30 45 55 60 LT 49 49 59 59 69 69 79 89 99 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 D-X 25 MXH Series Dimensions: 16 LT 16 24 14 LA LB J x M4 x 0.7 Depth 6 2 x 2 x M5 x 0.8 Cylinder port (With plug for port) 3 x M5 x 0.8 through Pilot hole dia 4.3 2 x 3 x 7.5 counterbore depth 4.4 4 x M4 x 0.7 Depth 10 2 x M5 x 0.8

Compact Slide Series MXH

Plug for port (Hexagon socket head set screw) 4 x M5 x 0.8 x 4 l 4 x M5 x 0.8 Depth 11 4 x M5 x 0.8 depth 8 Guide rail width 12 2 x M5 x 0.8 9.5 34 6 24.5 63.5 64.5 34 32 7 34 32 7 6 20 20 11 6 15 NS 15.5 52.5 + Stroke 68 + Stroke 32 4 x M5 x 0.8 depth 8 10 + Stroke 15 20 Stroke (mm) LB LT NS LA J 5 64 20 4 10 10 20 64 4 10 15 25 20 74 4 20 74 25 20 4 25 84 40 4 30 30 40 84 4 30 40

Rotary Table/

34 18.5 12.6 9.2 35 4.5 29h9 29.5h9 14H9 3.8 5.3 2.5 4.2 10 3.3 6 3.5 M4 x 0.7 2.2 5.3 M4 x 0.7 4 34h9 6H9 5.5 38 23 15.5 10.5 40 4.5 33h9 17H9 5 5.3 2.5 4.2 10 4.2 7.5 4.5 M5 x 0.8 2.5 6 M4 x 0.7 4 40h9 7H9 5.5 45 30 18.4 12.2 50 5 39h9 20H9 6 6.5 2.5 4.5 11.5 4.2 7.5 4.5 M5 x 0.8 2.5 6 M5 x 0.8 5 (mm) JJ JK JU P Q S SD SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 1 2 3 7 M3 x 0.5

Rotary Gripper Series MRHQ

x 0.8 Port A M5 x 0.8 Port B 4-M6 x 1 Depth 10 I N J E A D P A A M N 16.5 27 6.5 8 17.5 26 SMC R R 16 8 E O P T P A I R R Y G A R I 36 Side A Side B Scale: 40% 11 Series MRHQ Rotary Gripper 1in = 25.4mm Dimensions (mm) Scale: 50% MRHQ25 A B 58 70 93 4-M5 x 0.8 Depth 8.5 47 66h9 0 0.074 33.3 opened +2.5 0.2 10 0 0.1 12 0 0.06 M5 x 0.8 Finger closing port 19.3 closed 0 0.8 4-M5 x 0.8 (mounting

MXH

6 60 30 108 60 30 6 8-2-17 16 Series MXH Dimensions: MXH20 LT 31 20 J-M5 x 0.8 Depth 9.5 LA LB 14 3-M6 x 1.0 through Bottom hole dia 5.1 6-9.3 counterbore depth 8 Plug for port (Hexagon socket head set screw) 4-M5 x 0.8 x 4l 4-M5 x 0.8 Depth 11 4-M5 x 0.8 depth 8 Guide rail width 12 2-M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

Vacuum Module Series ZX

(or M6) 1 4.7 AMJ 20 5 AMV Pitch = 21 22.5 Vacuum port (V) M5 (or M6) AEP HEP Related Equipment + 79 65.1 10.7 8.5 V V V V Pitch = 21 Vacuum Port (V) M5 (or M6) 4.2 22.5 Vacuum Port (V) M5 (or M6) Vacuum Port (V) M5 (or M6) 897 Series ZX Vacuum port (V) Vacuum port (V) Ejector System Manifold: Type K1 Common EXH port (EXH.)

ZX

Individual air supply port PV Individual air supply port PV Adapter D Adapter D M5 (or M6) Pitch = 21 Individual air supply port (PV port) M5 (or M6) Individual air supply port (PV port) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) (or M6) Vacuum pad connection port (V port) M5 x 0.8 M5 x 0.8 (or M6) Adsorption nozzle piping port 13-2-35 35 Series ZX Vacuum pad connection

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LER MH LEH ML + Stroke MA MC MD Section XX LEY -X5 Section XX details 11LEFS XB 11LEJS XA H9 XA 25A[mm] Size Stroke range [mm] C D EH EV H J K L M O1 R S T U B V LEC 25 15 to 100 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 46.5 1.5 136.5 40 105 to 400 161.5 LEC S 32 20 to 100 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 61 1 156 60 105 to 500 186 LEC SS-T 63 50 to 200 21 40

CV/MVGQ

84 12 1.6 5 72 15 15 9 32 9.5 60 37.5 4.5 16.5 M4 x 0.7 12.5 52.5 MVGQ 28 8 5 M10 x 1 20 33 9 85 18 2.3 6 73 15 23 14 42 9.5 61 45.5 5.5 25 M5 x 0.8 12.5 52.5 CC Single Acting, Spring Extend/Rod Side Flange Style (F) RB CVJ3F T Bore size Stroke 28 [34.5] 48 [49] J M5 x 0.8 M5 x 0.8 Width across flats B1 Manual override D-X Rod End Nut 20H1 B1 Bore size (mm) 10 16 Data 7 3.2 16 [17] S + Stroke

Soft Start-up Valve AV2000/3000/4000/5000 1

M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

Compact Cylinder

4 x N through 2 x M5 x 0.8 (Port size) I D E M Z A + Stroke B + Stroke L W G M K J 25 to 40 Minimum lead wire bending radius 10 Auto switch H thread effective depth C 4 x N through F Q 2 x M5 x 0.8 (Port size) I D E M Z A + Stroke B + Stroke L W E M K J Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 20

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

20 Width across flats 8 Width across flats 3 A 4-M5 x 0.8 depth 7 (Plug: M-5P) 2-M5 x 0.8 Piping port H 17 M6 x 1 10.5 26.7 11 5 5.5 34 35 8.5 4-M6 x 1 +0.030 0 depth 4 4H9 depth 4 4H9 Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 0.50.05 W B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 47 46 13 10.5 depth 2 4H9 J 8 +0.030 0 +0.030 0 depth 2 4H9 16.5 14.5 Section AA 5 Mounting

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum port M5 x 0.8 Piping port 2 x M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA B D Mounting base side +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2 x M2 x 0.4 depth 3 8 5.7 3.5 L 20 20 6 x M4 x 0.7 depth 4.5 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 11-/22-MXP12-15