Ozone Resistant

(02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000 2000 4000 5000 1000 2000 3000

MGG

50 to 1000mm/s Base cylinder Rubber bumper Cushion Guides Built-in shock absorber (2 pcs.)

Cylinder with Lock

Movement distance of load Maximum speed: V [mm/s] Find the bore size.

Air Fittings Fitting Series For Special Environment

. 1 ) 5 . 5 3 ( 6 1 . 1 ) 5 . 9 2 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 4 / 1 S 5 3 1 1 H R K 1 1 / 6 1 ) 6 4 . 7 1 ( 0 8 . 0 ) 3 . 0 2 ( 5 . 2 3 8 / 3 S 6 3 1 1 H R K 2 2 . 1 ) 1 3 ( 6 9 . 0 ) 5 . 4 2 ( 5 . 0 3 8 / 3 2 / 1 S 7 3 1 1 H R K 7/8 ) 3 2 . 2 2 ( 4 1 . 1 ) 9 2 ( 3 8 . 0 ) 1 2 ( 5 . 7 4 5 3 . 0 ) 9 ( 4 4 . 1 ) 5 . 6 3 ( 0 2 . 1 ) 5 . 0 3 ( 4 9 . 0 ) 4 2 ( 4 / 1 S 5 3 3 1 H R K 7/8 )

Rotary Table/

(a) (b) Actuator effective torque S . Ta (S is 10 times or more) Allowable moment (Nm) Allowable thrust load (N) Allowable radial load (N) Accelerating torque calculation (a) (b) Size .

Thermo-chiller

(Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v Reference item 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s *1 In the case of [Mcm], it will be 0.003 to 0.01.

2/3 Port Valve

(No need to add options "S" and "L".)

Compact Type

20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 4 Series CXSJ Horizontal Mounting V = up to 400 mm/s V= = up to 800 mm/s V = up to 400 mm/s V= = up to 800 mm/s Graph up to 30 mm stroke 6 Graph up to 10 mm stroke 5 0.2 0.2 0.1 0.1 Weight m (kg) Weight m (kg) 0.05 0.05 0.04 0.04 0.03 0.03 0.02 0.02 CXSJM6 CXSJL6 CXSJM6 CXSJL6 20 40 0.01 20 40 0.01 60 0 60 0

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Cylinder

Tel :03-3502-2740 Fax:03-5251-7240 August 1996, 14(RP)

Poweraire.com - Instant Fittings Catalog TUBE x THREAD FITTINGS

1/4 NPT1/8 PH1/4-N01 $1.80 O.D.Tube Thread ITEM NO: PRICE 1/4 NPT1/4 PH1/4-N02 $2.04 (inch ) (UNF&NPT) USD/PCS 1/4 NPT3/8 PH1/4-N03 $2.25 1/8 10-32UNF PH1/8-U10 $1.50 5/16 NPT1/8 PH5/16-N01 $1.77 1/8 NPT1/8 PH1/8-N01 $1.50 5/16 NPT1/4 PH5/16-N02 $2.04 1/8 NPT1/4 PH1/8-N02 $1.50 5/16 NPT3/8 PH5/16-N03 $2.25 5/32 10-32UNF PH5/32-U10 $1.50 3/8 NPT1/8 PH3/8-N01 $2.04 5/32 NPT1/8 PH5/32-N01 $1.50

CRQ2

auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without Without

CY1F

/s Piston speed mm/s Piston speed mm/s 4 Series CY1F Vertical Actuation qVertical operation In vertical operation, observe the maximum load mass and the maximum operating pressure shown in the table below to prevent a drop due to slipping off of magnet couplings.

HRX-OM-X084

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

DOC1020530

After 1.6 s Blinking After 0.2 s When an alarm or warning also occurs during the test operation, the decimal point on the first digit will blink as follows. After 0.8 s After 0.8 s Blinking Blinking After 0.2 s (4) Start operation with the PC. -21- 5.2 JOG Mode JOG operation can be executed without host command.

Clean Regulator/Fluororesin Type

SRF 1 07 11 0 S S 1 With nut Body size 1 3 5 Fitting type Pilot port thread type Made to Order (Refer to page 887 for details.)

Series 10-, 21- AF-A Air Filter

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

HAA

HAl Accessories (Options) HAA7 AT Auto drain Applicable Model HAA7 HAA15 HAA22 HAA37 HAA7-F AD402-03 HAA7-S HAA15-F AD402-03 HAA15-S HAA22-F AD402-03 HAA22-S HAA37-F AD402-04 IDl Dust protecting filter Mounting bench HAA37-S AMG How to Select (Flow Capacity l/min (ANR)) Operation Principle AFF Model HAA7 HAA15 HAA22 HAA37 AMl 50C 70C 100C 1000 1500 700 2200 4000 1500 3300 6000 2200 5700 13000

3 Port Air Operated Valve Series SYJA300 1

(Example) SS3YJA7-41-03-01. 1 set SYJA714 . 2 sets SYJ700-10-2A . 1 set (Example) SS3YJA5-40-03-01. 1 set SYJA514 . 2 sets SYJ500-10-3A . 1 set The asterisk denotes the symbol for assembly.

S070

Stations 02 03 2 stations 3 stations Station 3 2 1 D side U side 20 20 stations Note) Maximum of 20 stations Electrical entry Grommet/Plug lead C How to Order Valves S070 A 5 B G Electrical entry Body type Body type Base mounted with clips G C Grommet Plug lead with light/surge voltage suppressor Symbol A Coil voltage Power consumption Pressure specification Flow rate 5 6 V S R 24