Model Selection 1

Single unit 1/8 to 3/4 2, 3, 4, 5, 7, 10 0 to 2 (1) 17-2-36 VV2CL2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C.

LEC-T1_C

- (2-3-1) LECPA . 32 (2-3-2) LECPA . 32 (2-3-3) LECPA . 34 5.4 .36 5.4.1 .36 (1) .36 (2) .38 5.4.2 .40 (1) .40 (2) .41 6. .42 6.1 .42 (1) .42 (2) .44 (2-1) LECPLECA .44 (2-2) LECPLECA .45 (2-3) LECPA .46 6.2 .47 (1) .47 (2) .47 (3) .48 (4) .50 (5) .51 (6) .52 (7) .54 (8) .54 6.3 .56 (1) .56 (2) .56 (2-1) .56 (2-2) .56 (3) .57 (3-1) .57 (3-1-a) TB Ver1.**. 57 (3-1-b) TB Ver2.**. 58 (3-2) .59

Secondary Batteries

3 position closed center 3 position exhaust center 3 position pressure center 4 position dual 3 port valve: N.C.

0.

Note 3) For AC specification power consumption, refer to page 3.

SFOD-OMT0010

Setting Data Entry . 48 7.1 Profile parameter . 48 7.2 Basic parameter . 49 7.3 Return to origin parameter . 51 7.4 Step data . 52 (1) ABS . 54 (2) INC . 54 (3) LIN-A / LIN-I. 54 (4) CIR-R / CIR-L . 55 (5) SYN-I . 55 8.

JXCx-OMT0061CN

15.6 LEC T1 3 G 3 3 S J E G No (2) (1) LCD (2) (1) (3) (4) (4) (5) (3) (6) (5) () (6) (7) 3m (8) (7) (8) CN4 69 - 15.7 5 4 3 2 1 LEC-CMJCC-Link MJ S T T 5 4 3 2 1 5 4 3 2 1 1 DA CC-Link A 2 DB CC-Link B 3 DG CC-Link 4 SLD CC-Link T 5 FG 70 - 16

Compact Rotary Actuator Series CRQ2

3 !3 !0 !4 !7 !1 !9 !2 @1 @3 e u o t @2 !8 @0 @0 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 @3 w i !5 y q r q w r y !5 !

SFOD-OMT0009CN

10.5 [5m ] L E C P *B* (a) (b) 2 A B-1 L 1 A A-1 (b) 6 A B-1 B B-2 1 1.5m 5 A A-1 B A-2 3 3 3m B B-2 COM-A/COM B-3 4 B A-2 COM-B/A-3 5 5m (c) COM-A/COM B-3 Shield COM-B/ A-3 Vcc B-4 12 GND A-4 13 Vcc B-4 A B-5 7 GND A-4 A A-5 6 A B-5 B B-6 9 A A-5 S B A-6 8 (d) B B-6 3 B A-6 (a) + B-1 4 A-1 5 + B-3 1 2 A-3 (a) (8) (14.2) B1 A1 (b) 2 1 (17.7) (14) (18) (10.2) 6

30

13.7 M5 x 0.8 1/8 1/4 4 12.6 9.1 14.4 4 3 A L2 14.7 M5 x 0.8 1/8 1/4 3/8 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2 35.4 H 6 13.6 11.4 15.9 10.9 37.6 38.6 40.7 42.3 43.3 50.2 49.1 52 52.3 53.2 56.1 64.1 66.6 Connection thread 18.6 (R) 8 16.1 20.5 13.7 19.1 Applicable tube L1 M 10 17 33.5 16.6 21 D 22.6 12 18.6 47.7 18.7 23.6 A L2 71 100 26.3 27.3 H 16 20.8 24.6 Connection thread (with sealant

JXCx-OMY0006

S Standard cable Orange 9 B A-6 Black 8 3 Actuator side Controller side (14.2) (2) 2 1 (8) (1) B1 A1 (14) (18) (17.7) 6 5 (3) 2 1 A6 B6 15 16 L (11) (30.7) 14.2 Actuator cable [8 to 20m] (1) (2) LE-CPSignal name Terminal number Cable color Terminal number A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 8 8m * B A-2 Yellow 5 COM-A/COM B-3 Green 3 A 10m * COM-B/ A-3 Blue 4 (3) B 15m

Soft Start-up Valve

flats 30 33 AV4000-04-5 to 6G(Z)-A 1/2 1/2 1/2 AV5000-06,10-1 to 4G(Z)-A 3/4,1 3/4,1 3/4 128 59 53 37 37 53 Width across flats 36 52 AV5000-06,10-5 to 6G(Z)-A 3/4,1 3/4,1 3/4 Optional specifications With bracket With built-in silencer Model K L M N P Q R S T U V W X Y AV2000-02-1 to 4G(Z)-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV2000-02-5 to 6G(Z)

JXCx-OMY0008

Alarm was generated in order of (1) -> (5) 6030h (1) 0-7 Alarm 1 6030h (2) 0-7 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 6030h Alarm 2 0 (1) (2) (3) (4) (3) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. 6030h Refer to 15.2.

Rotary Table/Rack & Pinion Style Series MSQ

of bottom positioning pin hole Position of bottom positioning pin hole Symmetric type For 180 For 90 Positioning pin hole Positioning pin hole 3 Counter-clockwise 3 B port 3 22.5 3 22.5 84 96 e ng e ng ra 3 ra on on ti A port ta 3 ti 90 4 ro ta 7 ro m 1 A port A port u Clockwise m e e m g s u 3 i ni n w im k C ra c l o Mi 6 8 3 ax n o 1 ti M ta ro e m g u m n ni Mi e ra C 180 s l i o

ZX

Electrical entry Nil L Grommet (0.6 m) (5) Digital vacuum switch unit Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector L L plug connector Voltage 21 C 0X ZSE3 D 1 3 100 VAC 50/60 Hz 110 VAC 50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC Applicable to plug connector. (Connector assembly with rectifier is attached.)

Membrane Air Dryer

Note 3) Includes 1 L/min [ANR] of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator (except IDG1, 3, 5).

JXCx-OMT0005CN

1. 2. 3. 4. 4 - JXCD1/ 1. / [][] 1 1.5 *3) *3)1 1 5 - 2 2.1.

3 Port Air Operated Valve

(1/8) 12(PA) port 12.6 13.5 83 23 VZA 91 VTA VGA 74.5 73.5 VPA VPA 28.5 X VPA3 M5 x 0.8 (Breathing hole) 13.5 28.5 57 1/4, 3/8 1(P) port For vacuum/VPA544V-102 03 A B 1/4, 3/8 2(A) port 13.5 28.5 51 2 x 5.2 (For mounting) 47 23 1/4, 3/8 3(R) port 17.6 NO 2A 42 52 NC 12 3R 1P NC 1/8 12(PA) port 13.5 12.6 91 23 74.5 73.5 28.5 X M5 x 0.8 (Breathing hole) 13.5 28.5 57 1/4, 3/8 1(P) port 1567

Fieldbus system PROFINET compatible SI Unit

Patch cable MDI Pin Pin MDI-X RJ45 M12 RJ45 M12 TD+ Transmit data+ 1 1 1 1 RD+ Receive data+ RD+ Receive data+ 3 2 3 2 TD+ Transmit data+ TDTransmit data2 3 2 3 RDReceive dataRDReceive data6 4 6 4 TDTransmit dataCrossover cable MDI Pin Pin MDI RJ45 M12 RJ45 M12 TD+ Transmit data+ 1 1 1 1 TD+ Transmit data+ RD+ Receive data+ 3 2 3 2 RD+ Receive data+ TDTransmit data2 3 2 3 TDTransmit dataRDReceive

EXxx-OMW0014CN

-SPN3A, . 3-113-12 MDI/MDI-X (FSU) . 3-11 2 MDI MDI-X RJ45 M12 RJ45 M12 TD++ 1 1 1 1 RD++ RD++ 3 2 3 2 TD++ TD-2 3 2 3 RD-+ RD-6 4 6 4 TD-MDI MDI RJ45 M12 RJ45 M12 TD++ 1 1 1 1 TD++ RD++ 3 2 3 2 RD++ TD-2 3 2 3 TD-RD-6 4 6 4 RD-+ MDI-X MDI-X RJ45 M12 RJ45 M12 RD++ 1 1 1 1 RD++ TD++ 3 2 3 2 TD++ RD-2 3 2 3 RD-TD6 4 6 4 TD. 3-11 20 No.EX-OMW0014CN-A 1 IO OFF EX245-SPN2A/SPN3A (FSU

2/3 Port Valve for Various

VXA31/32 LVA &'((, &'((&.& LVH /" 0& " 1 2 # % 2 3 '.(2 /" 0& " 1 2 # % 2 3 '.(+2 % " 0 " 4 " 52 LVD LVQ LQ LVN TI/ TIL PA PAX PB 17-3-1 2/3 Port Valve For Fluid Control Solenoid Valve/Air Operated Valve For Water, Air, Oil, Gas, Vacuum and Steam Series VX21/22/23 ! " #$ %&'()* Series VXD21/22/23 .