Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: B (Panel Mount Adapter)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: D (Panel Mount Adapter + Front Protection Cover)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

M5 x 0.8 1(P) port M5 x 0.8 3(R) port R 3 P 1 10.7 9 M5 X 0.8 external pilot port 32 (Only external pilot type (R)) For the One-touch fittings for P/R port and silencer model no., refer to page 4-14-3.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10 16 4.3 2-3.2 Mounting holes Manual override 24.5 7.8(C3, C4, C6) (M5: 5.7) Cover dia 1.6 Cross section 0.34mm2 (Lead wire) 34 35 300 (53) 27.5 16.3 18 1.2 13.8 13.6 7 (7.8) (24.5) 2-3.4 Mounting holes 41 Foot bracket M5 X 0.8 P port M5 X 0.8 R port R 3 P 1 10.7 9 M5 X 0.8 External pilot port 32 (Only external pilot style (R)) L plug connector (L): VQZ115-lLl-C3, C4, C6, M5-PR M plug connector

MY1

Applicable cylinder Port variations MY1B10 MY1H10 L R L L R R R Note 1) Note 1) R R R L L R L L L L R Slide table operating direction Note 1) These ports are not applicable to MY1H10.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

Vacuum System Peripherals:

Series M3, M5, R 1/8 A hose nipple that provides large holding force for tubing.

7.4

31.2 31.2 7 11.5 10 M5 x 0.8 2(B) port With plug connector/light 5.7 S07 5(R)-mM(O)-M5 2 A B C 8.4 18.6 19.5 M5 x 0.8 4(A) port M3 x 0.5 External pilot port (External pilot type only) 748 Base Mounted Single Unit S0700 Series Plug Lead Type Dimensions 3-Position Closed Center Grommet: S0735(R)-mG-M5 M5 x 0.8 1(P) port 21.2 SJ 11.4 5.2 7.7 M5 x 0.8 3(R) port SY 3 1 SY S0700 S0700 S0700 Manual

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Dimensions A B VQD A VQZ1000 VQZ2000 VQZ3000 67 81 93 35 43 52 VZS VFS Individual EXH spacer VVQZ1000-R-5-M5 VVQZ2000-R-5-01 VVQZ3000-R-5-02 VS M5: VQZ1000 Rc(PT)1/8: VQZ2000 Rc(PT)1/4: VQZ3000 VS7 B Used to form a separate exhaust port for an interior manifold station or stations.

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -