H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.
H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.
Power wave form of power-saving type (Rated voltage at 24 VDC) Applied voltage 24 V Applicable cable Cord O.D.: 3.5 to 7 (Reference) 0.5 mm2 2-core and 3-core wire equivalent to JIS C 3306. 0 V 10 to 20 ms 2.9 W Ground nut Tightening torque 1.65 to 2.5 Nm Washer Power-saving Tightening screw Tightening torque 0.3 to 0.4 Nm 0.6 W 0 W AC circuit Grommet (Rubber) Housing Lead wire color DIN
H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10.5 M5 x 0.8 M3 x 0.5 10 11.5 M6 x 1.0 M4 x 0.7 16 13.5 M8 x 1.25 M5 x 0.8 20 16.5 M10 x 1.25 M6 x 1.0 25 22.5 M14 x 1.5 M8 x 1.25 30, 40 Clevis pin d Dd9 m m l t L t Applicable bore size (mm) Applicable retaining ring Part no.
s2 VG Dustproof Enclosure 12.6 g (L/M plug connector, Without sub-plate) Weight VP JIS Symbol Normally closed 24 V, 12 V Coil rated voltage DC S070 10% of rated voltage Allowable voltage fluctuation (A) 2 Class B or equivalent Coil insulation type VQ Power consumption (Current) 0.5 W (21 mA) 1 W (42 mA) 1.5 W (63 mA) 1 (P) 3 (R) DC VKF Grommet Plug-in, L plug connector, M plug connector (
s2 VG Dustproof Enclosure 12.6 g (L/M plug connector, Without sub-plate) Weight VP JIS Symbol Normally closed 24 V, 12 V Coil rated voltage DC S070 10% of rated voltage Allowable voltage fluctuation (A) 2 Class B or equivalent Coil insulation type VQ Power consumption (Current) 0.5 W (21 mA) 1 W (42 mA) 1.5 W (63 mA) 1 (P) 3 (R) DC VKF Grommet Plug-in, L plug connector, M plug connector (
s2 VG Dustproof Enclosure 12.6 g (L/M plug connector, Without sub-plate) Weight VP JIS Symbol Normally closed 24 V, 12 V Coil rated voltage DC S070 10% of rated voltage Allowable voltage fluctuation (A) 2 Class B or equivalent Coil insulation type VQ Power consumption (Current) 0.5 W (21 mA) 1 W (42 mA) 1.5 W (63 mA) 1 (P) 3 (R) DC VKF Grommet Plug-in, L plug connector, M plug connector (
RSH80 RSH80 RSH80 200 200 RSH63 RSH63 RSH63 RSH50 RSH50 RSH50 0.9 Operating pressure : P (MPa) 100 100 0.8 0.7 0 0 10 20 30 40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40
ZP3PA-T1JT-7A-X2 ZP3P 20 JT2 SF M ZP3PG20JT2SF-M-7A-X2 21 ZP3P-20JT2SF-WM ZP3P 32 JT2 SF ZP3PG32JT2SF-7A-X2 48 ZP3P-32JT2SF-W ZP3PA-T2JT-7A-X2 ZP3P 32 JT2 SF M ZP3PG32JT2SF-M-7A-X2 48 ZP3P-32JT2SF-WM ZP3P 20 JT5 SF ZP3PG20JT5SF-7A-X2 23 ZP3P-20JT5SF-WG ZP3PA-T1JT-7A-X2 ZP3P 25 JT5 SF ZP3PG25JT5SF-7A-X2 25 ZP3P-25JT5SF-WG ZP3P 32 JT5 SF ZP3PG32JT5SF-7A-X2 54 ZP3PA-T2JT-7A-X2 ZP3P-32JT5SF-WG
V V Seat material t Code Material PCTFE (Standard) Vespel 4) Range options 1) No code VS q q w w Code 1) Only available with AK1402T. Specification Standard Sub-atmospheric No code A 4) Not available with SH material.
(example: If the Pressure switch with output impedance of 1k is connected to the A/D converter to detect the analogue output of 5V, the detected voltage by the A/D converter becomes 5(V) 1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V). Output impedance Output type The operation type of the switch output.
: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25
Positive pressure ISE2 ZSE2 Vacuum Piping specifications Wiring specifications Single mounting R 1/8 Note 2) Grommet type (Lead wire: 0.6 m) 01 Nil Single mounting NPTF 1/8 Note 2) Grommet type (Lead wire: 3 m) T1 L Connector type (Lead wire: 0.6 m) 0X C W/suction filter (Mounting on ZX unit) M5 x 0.8 Connector type (Lead wire: 3 m) W/suction filter (Mounting on ZX unit) M6 x 1 (Option) 0XY
H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10.5 M3 x 0.5 10 M5 x 0.8 11.5 M4 x 0.7 16 M6 x 1.0 13.5 M5 x 0.8 20 M8 x 1.25 16.5 M6 x 1.0 25 M10 x 1.25 22.5 M8 x 1.25 28 M14 x 1.5 Clevis pin part numbers d m m l Dd9 t L t Applicable bore size (mm) Applicable snap ring Part no.
Light load Output type Stroke N NPN Stroke adjusting unit P PNP Nil Motor placement M Motor side E End side T On the top D On the bottom W Double-side Note) Refer to the catalog for Stroke, Auto switch and Number of auto switches.
Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only, Fixed Unit: kPa, MPa), Piping Specification: M5 (Female Thread)
Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread)
Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread)
Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread)
Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -