SMC Corporation of America
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CN1P.17 4.2 CN2CN3: LE-CP-LE-CP---S CN3 CN2 4.3 CN4I/O PLC I/O CN4 PLC *6.4 I/O P.23 *6.3 P.21 16 No.JXC-OMU0004-A 5.

External connection .21 5. 1 CN4: Power supply connector .21 5. 2 CN3: Bus connector .21 5. 3 CN1: CONT connector.21 5. 4 CN2: PC/TB connector.22 6. CN4: Power supply connector .23 6.1 Power supply connector.23 1 - 6.2 Power line.23 6. 3 Wiring of the shutdown circuit.24 Shutdown circuit Example.26 7 CN3: Bus conecter.27 8.

External connection .21 5. 1 CN4: Power supply connector .21 5. 2 CN3: Bus connector .21 5. 3 CN1: CONT connector.21 5. 4 CN2: PC/TB connector.22 6. CN4: Power supply connector .23 6.1 Power supply connector.23 1 - 6.2 Power line.23 6.3 Wiring of the shutdown circuit.24 Shutdown circuit Example.26 7. CN3: Bus conecter.27 8.

External connection .21 5. 1 CN4: Power supply connector .21 5. 2 CN3: Bus connector .21 5. 3 CN1: CONT connector.21 5. 4 CN2: PC/TB connector.22 6. CN4: Power supply connector .23 1 - 6.1 Power supply connector.23 6.2 Power line.23 6. 3 Wiring of the shutdown circuit.24 Shutdown circuit Example.26 7.

ZB-OM00201-B Revision history A P.19 Recommended tube fittings P.21 Piping to the Manifold Base B P.21 Change of description about tightening of fitting.

Check for fluid leak from circulating fluid piping in your system. 20 Internal Pump Time Out WRN Continued 21 Controller Error FLT Stop An error was detected in the control system. Contact the system supplier for request of inspection and repair.

AW20-B 11 AW20-B 0.80.1Nm AW30-B 17 AW30-B 2.350.3Nm AW40-B 21 AW40-B 3.50.3Nm Disassembly Remove the bowl assembly, housing, and element. Hexagon Remove a housing from a body by turning 4 mounting screws to the left with a hexagon wrench key. wrench key Nominal5 Remove the valve guide.

L Manifold individual supply specification Note 20, 21, 22) Adjust the supply pressure individually for manifold in order to adjust the vacuum pressure reached by each ejector. When selecting D (with common release pressure supply (PD) port) for manifold option, supplying a pressure which is different from for common PV to common PD is requested.

MHF 4 x M5 x 0.8 thread depth 6 M5 x 0.8 (Finger closing port) (Thread for mounting attachment) MHL Auto Switch Mounting Groove Dimensions MHR 30.3 45 16 MHK 4.5 4.5 MHS 23 10 M5 x 0.8 (Finger opening port) MHC 5 MHT MHW2-25D1 6.45 5.5 Right angle finger type MHY MHW MHW -X MRHQ MA D37 18 12 6 15 16 4 x M5 x 0.8 through (Thread for mounting attachment) 30 21 45 715 MHW2 Series Dimensions

MIW8-8D MIS12-30D MIS25-30D 6 4 3.5 1.5 16.5 27 4.5 20.5 41 8.5 7.5 38 21 MIS8-10D MIW20-20D MIS25-50D 6 4 4 2 16.5 37 4.5 20.5 31 8.5 8.5 41 29 MIS8-20D MIS20-10D MIW32-32D 6 4 4 2 18.5 31 6.5 20.5 51 8.5 8.5 39 29 MIW12-12D MIS20-20D MIS32-30D 3.5 1.5 4 2 18.5 29 6.5 20.5 61 8.5 8.5 59 29 MIS12-10D MIS20-30D MIS32-50D 3.5 1.5 4 2 18.5 39 6.5 7.5 33 21 MIS12-20D

Refer to page 21 for detailed specifications. Auto switch type Part no.

Bore (mm) QW RW S T W X Y Z CY1 32 60 33 140 19 157 33 10.5 7.5 40 84 35 180 21 187 39.5 11 8 MY1 Long stroke Slide bearing Standard stroke Long stroke Ball bushing bearing Standard stroke Long stroke (mm) SCXT Tube bore size A, #1(#1+#3) SCXT Tube bore size B, #1(#1+#3) X Y Z Bore (mm) Stroke range (mm) 32 125, 150, 175, 200, 250, 300 45.5 12.5 12.5 SCXT Tube bore size A, #2(#2+#3) SCXT

South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C A 45 M5 x 0.8 Finger opening port M5 x 0.8 Finger closing port 13 6-M4 x 0.7 thread depth 8 M5 x 0.8 Finger closing port M5 x 0.8 Finger opening port (A, B, C common view) 25 25 3-4 depth 8 +0.02 0 (A, B, C common view) 42 14h9 0 0.043 1.5 9 28.5 18 55.5 (60) 10 21

Piston assembly Valve Valve spring No. 4 5 6 1348104A 1348105 1348109 SUP OUT 2 ARX Series Specialty Regulators Regulator for 290 psi (2 MPa) ARX20, 21 Dimensions Panel cutout dimensions 1.02 (26) R .1 (2.5) SUP OUT SMC K C O P A A L U S H .5 (12) 1.61, 2.13 [41 (K40)], [49 (K50)] 2.13 (54) .98 (25) 1.6 (max. thickness 4.5) 1.73 (44) .21 (5.4) 3.13 (79.5) (when regulating pressure = 3.23

www.stevenengineering.com I FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT CONSULT SMC CUSTOMER SERVICE 5.34 AIR PREPARATION: ACCESSORIES SILENCERS SERIES (N)AN SERIES (N)AN SILENCER M3, M5, 18 SINTERED BRONZE Suitable for miniature valves and pilot air exhaust ports 13 21 dB noise reduction H O W T O O R D E R SERIES NAN SILENCER T E C H N I C A L SPECIFICATIONS NAN120-M3 (M3) NAN120-M5 (

MK Standard part number MB1 XC6 Stroke ML + Adjustment 4 MH + Stroke + Adjustment Stainless steel piston rod and rod end nut ZZ + 2 strokes + Adjustment (A: 25, B: 50) Specifications Bore size (mm) 32 40 50 63 80 100 MA 21 27 32 32 36 46 MK 10 12 15 15 20 20 MI 24 32 38 38 45 55 MH 44 48 53 53 72 75 ML 18 20 21 21 32 32 MM 10 14 18 18 22 26 ZZ 175 183 205 205 258 261 Double acting single

Refer to p.0-20 and 0-21 concerning Safety Instructions and common precautions on the products mentioned in this catalog, and p.1.0-2 to 1.0-4 concerning common precautions for respective series. Caution The angle adjustment bolt is adjusted to a random position within the adjustable rotating range.

3 port base mounted: VK334 M3 x 26 Round head combination screw M3 x 26 Round head combination screw Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Manifold gasket Manifold gasket Applicable base Applicable base VV3K3-20 21 VV5K3-20 21 VK300-45-1 Sub-plate VV3K3

20 16 (15) 19 (16) 22 (18) 3.6 4.0 5.2 3.6 4.0 5.2 4.0 4.7 5.3 3.9 4.5 5.1 0.22 0.15 0.13 0.22 0.15 0.13 0.28 0.27 0.19 0.28 0.24 0.15 15 17 21 15 17 21 16 18 22 16 18 21 2.5 Single VP4150 2 position 3 position 3.3 3.0 VP4250 Double 3.8 3.6 Closed center VP4350 4.4 3.6 VP4450 Exhaust center 4.4 ( ): Denotes the normal position.

588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B SMC A PA A B B A (A, B port) 4n-1/4, 3/8 PA A L side R side L side R side (2n-1/8) 38 D side D side 68.5 68.5 3 120.5 (Single) 16 120.5 (Single) 145 (Double) 44 145 (Double) 155 (3 position) 55 155 (3 position) 77.5 Bottom ported drawing 165.5 153.5 121 PA 14 PB 12 5 1 R 3 65 54 4-1/8 P 39 (Pilot pressure EXH port) 21