Vacuum Regulator

P601010-11 q w Included Parts No. 1 2 Plug nut O-ring Description w q Gauge Nut Assembly Used to connect the pressure gauge and pressure switch. e P601010-18 q w Included Parts No.

High-precision Digital Pressure Switch ( compatible)

(Example: When the value can be displayed down to 0.1 MPa for the product for 0 to 50 MPa, the resolution is 1/500) Display resolving power Displayed pressure value can be adjusted within the range of 5%R.D. (5% of displayed value).

Digital Pressure Switch ( compatible)

Display/Set pressure range 10.0 to -105.0 kPa -105.0 to 105.0 kPa -0.105 to 1.050 MPa Display/Min. setting unit 0.1 kPa 0.001 MPa Proof pressure 500 kPa 1.5 MPa Power supply Used as switch output device 12 to 24 VDC (10%), ripple max. 10% voltage Power supply spec.

Process Valve

(mm) Model Rc Flange Note) Air operated External pilot solenoid Measured by air Measured by water Kv 6.1 10.4 9.8 15.6 9.8 15.6 16.4 24.2 16.4 24.2 25.1 37.2 25.1 37.2 Effective area (mm2) 130 220 210 320 210 320 330 500 330 500 520 770 520 770 Conversion Cv 7.0 12 11 18 11 18 19 28 19 28 29 43 29 43 VNB44-25A VNB4-25A VNB54-32A VNB5-32A VNB54-32F VNB5-32F VNB64-40A VNB6-40A VNB64-40F VNB6

SI unit ( device)

No.EX-OMY0021 PRODUCT NAME SI unit ( device) MODEL / Series / Product Number EX430-SIL1 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product elements 9 Summary of product function 10 Installation and Wiring 11 Installation 11 Wiring 12 LED Indication, Settings and Status Monitoring 13 LED indication 13 Switch setting (Data transmission rate setting

CEx-OMB0060

A-phase pulse A-phase pulse B-phase pulse B-phase pulse Count 11 12 11 10 10 Multiplier Multiplier 1 Multiplier Multiplier Multiplier 1 : Use quadrature input signals for a bi-directional count.

ITV0000

(For details, refer to "Specific Product Precautions 1" on Page 11.)

MRQ

11 12 2 wire 3 wire 56 Solid state switch D-F7 4 wire 56 14 Write "L" at the end of the part number for 3 meters of lead wire.

VNB

7 12 11 18 11 18 19 28 19 28 29 43 29 43 130 220 210 320 210 320 330 500 330 500 520 770 520 770 1.4 1.5 VX 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 4 1 2.5 2.6 VX3 5.7 5.8 32 JIS Symbol VXA Valve type Type N.C.

Angle Seat Valve

Body material/Port size/Orifice diameter Symbol Body material Port size Orifice diameter A Bronze (CAC) 3/8 11 B 1/2 14 C 3/4 18 D Stainless steel 316L equivalent Pressure type Nil Standard H High pressure 3/8 11 E 1/2 14 F 3/4 18 Other Special Options Special Entry for Pilot Port/ Insulating Adapter Type VXB215 XCA Enter standard product number.

Modular Type Regulators Series AR

70 66 90 3.2 13 66 65.8 11 70 90 3.2 Note 1) The total length of B dimension is the length when the filter regulator knob is unlocked.

Modular Type Lubricators Series AL

If unit is to be used in a washdown application, avoid directing fluid into the exhaust port. 10 Accessories Spacer Dimensions mm Epoxy Coated Aluminum, Stainless Screws, NBR Seals Model A Y20-T4 Y30-T4 Y40-T4 10 11 14 F.R.L. center Interface With T Bracket Interface with T-type bracket T-type bracket Epoxy Coated Aluminum, Stainless Screws, NBR Seals G F.R.L.

Angle Seat Valve /

Fluid Nil No L Yes Thread type*1 5 Steam Nil Rc A G B NPT Body material/Port size/Orifice diameter Symbol Body material Port size Orifice diameter A Bronze (CAC) *1 The thread type for the main piping and pilot piping is the same. 3/8 11 B 1/2 14 C 3/4 18 D Stainless steel 316L equivalent Pressure type 3/8 11 E 1/2 14 F 3/4 18 Nil Standard H High pressure Other Special Options Special Entry

MGQ

For details, refer to page 8-30-32. 8-20-11

HEC-OM-U015

E PE Item Spec. 500 500 Facility water temp. 35deg.C RS-232C RS-485 Model No.

Low Differential Pressure Sensor

to 500 kPa 50 to 500 kPa A sensor may be unconnected or mis-wired.

VXF

Flow rate Q (Nl) Flow rate Q (Nl) Tube 2,000 Tube 2,000 mm 500 mm 6 x 8 pcs. 6 x 8 pcs. 500 mm 500 mm mm 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs. Time T1, T2 (ms) Without tube (VXF2150) Without tube Without tube (VXF2150) PM: Raised up to 0.48 MPa PM: Raised up to 0.48 MPa PA=0.5 MPa 6 x 6 pcs. PA=0.5 MPa A=0.5 MPa 6 x 6 pcs.

0.4

Flow rate Power consumption Operating frequency 100 Hz 500 Hz 1000 Hz 80 W 1200 Hz Low flow type 50 L/min 40 W 1000 Hz 10 W 550 Hz 4 W 350 Hz 80 W 650 Hz Medium flow type 100 L/min 40 W 550 Hz 10 W 300 Hz 4 W 200 Hz 80 W 600 Hz High flow type 150 L/min 40 W 500 Hz 10 W 250 Hz 4 W 150 Hz VCH VDW SX10 SX10 Select a model according to applications and purposes.

ZSE30A(F)/ISE30A

Available response time settings 20 ms, 100 ms, 500 ms, 1000 ms, 2000 ms This function averages pressure values measured during the response time set by the user and then compares the average pressure value with the pressure set point value to output the result on the switch.

SI unit for EtherNet/IP TM

Review the setting of PLC. -26No.EX-OMK0004-B Specifications Specifications General specification Item Specification Operating ambient temp. 5 to 45 oC Operating ambient humidity 35 to 85%RH (No dew condensation) Storage ambient temp. -20 to +60 oC Withstand voltage 500 VAC for 1 min.