MLGP

Selecting Conditions/Table 1 Vertical Upward facing Downward facing Horizontal l = Eccentric distance l = Distance between the plate and load center of gravity m Mounting orientation m m l = Eccentric distance Maximum load speed V Graph (Slide bearing type) Graph (Ball bushing type) 50 to 200mm/s 201 to 400mm/s 50 to 200mm/s 201 to 400mm/s 50 to 200mm/s 201 to 400mm/s 1 , 2 3 , 4 1 3, 1 4

MLGP

Selecting Conditions/Table 1 Vertical Upward facing Downward facing Horizontal l = Eccentric distance l = Distance between the plate and load center of gravity m Mounting orientation m m l = Eccentric distance Maximum load speed V Graph (Slide bearing type) Graph (Ball bushing type) 50 to 200mm/s 201 to 400mm/s 50 to 200mm/s 201 to 400mm/s 50 to 200mm/s 201 to 400mm/s 1 , 2 3 , 4 1 3, 1 4

XM, XY

Note 1) 14 45 80 160 200 5 1.3 x 10-10 {1 x 10-10} at ambient temperature, excluding gas permeation (Standard material: FKM) Internal Leakage (Pam 3/s) 1.3 x 10-11 {1 x 10-11} at ambient temperature, excluding gas permeation (Standard material: FKM) External Operating time (s) 0.1 0.21 0.24 0.26 0.28 0.05 KF (NW), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Without adjuster type is not available for the 11-MXP6 series. 11-MXP How to Order MXPJ6 Clean series 11 Vacuum suction type 11 MXPJ6 10 22 MXPJ6 10 11-MXPJ6 Copper, fluorine and silicone-free + Low particle generation Stroke 5 10 5 mm 10 mm 22 Vacuum suction type With auto switch type is not available for the 11-MXPJ6 series.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

2-M3 x 0.5 (Plug: M-3P) 6 (fitting seat surface dimension) 170.05 M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port 2-M3 x 0.5 A 5 5.5 A 3.2 J 2.4 Z Section AA 3.5 Depth 2 2.5 +0.030 0 7 +0.030 0 Depth 2 2.5 Q QL 11-/22-MXPJ6-10 4M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51 30 35 53 42 47 37 11 10 59 11-/22-MXPJ6-10

One-touch Fittings Series KQ2

S 3 0 7 0 L 2 Q K 7 1 5 . 8 4 9 4 9 6 8 / 1 S 1 0 9 0 L 2 Q K 2 1 2 . 5 1 2 1 5 . 3 2 5 . 3 4 7 4 5 . 8 1 6 0 3 6 1 / 5 4 / 1 S 2 0 9 0 L 2 Q K 4 1 5 . 9 4 1 5 7 4 8 / 3 S 3 0 9 0 L 2 Q K 7 1 5 . 1 5 3 5 4 7 4 / 1 S 2 0 1 1 L 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 6 5 9 5 1 2 7 9 6 8 / 3 8 / 3 S 3 0 1 1 L 2 Q K 8 5 1 6 6 7 2 / 1 S 4 0 1 1 L 2 Q K 2 2 5 . 4 6 5 . 5 6 7 4 1 R(PT) 4 / 1 S 2 0 3 1 L 2

Micro Mechanical Valve Series VM1000

mm P.T. 7 N F.O.F. 2 x 4.2 mounting hole 3 x 1 4 2 x 1 8 (SUP CYL port) (EXH port) 2332 Series VFM300 5 Port Mechanical Valve Rubber Seal Series VFM300 Straight plunger VFM350-02-05 Panel mounting hole M18 x 1 Min. 3 Max. 11 Hexagon nut thick 11, acoss flats 27 M5 x 0.8 (Pilot exhaust port) Symbol (C1) 2 (C2) 4 12 14 3 (E1) 1 (S) 5 (E2) 0.5 MPa supply 3.5 mm T.T. 2.0 mm O.T. 1.5 mm 20

Compact Cylinder with Lock Series CLQ

to 50 80 116.5 53.5 11 11 99 116 134 43 20 53.5 77 53.5 116.5 75, 100 53 125 10 to 50 100 135 63 11 11 117 136 154 50 22 53.5 94 L1 Rod end nut 63 135 75, 100 Rear flange type: CLQG/CDLQG FV M Rear flange type (mm) 4-FD Without auto switch With auto switch Bore size (mm) FZ FX A + Stroke L FT B + Stroke G Stroke range FD FT FV FX FZ G L L1 M A A B B 36 91 10 to 50 63 101 46 9 9 80 92 108

CQS

Nil S n 2 pcs. 1 pc. n pcs.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS15-10 S SS ZZ Z 10 77.5 96.5 25 20 87.5 106.5 25 30 97.5 116.5 35 40 107.5 126.5 35 21-/2210-/11-/12CXS15-20 CXS15-30 CXS15-40 CXS15-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 117.5 136.5 45 21-/2210-/11-/12856 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS20, CXSL20 10-/11221221ZZ S 12 12 SS 25 Z 2 x 5.5 through 6 30 1 M8 x 1.25 x 6 L (Hexagon socket set screw

NCA1

CJ1 2 to 20 in/s (50 to 500 mm/s) 2 to 20 in/s (50 to 500 mm/s) Piston speed (50 to 500 mm/s) CJP Cushion Air cushion standard Basic style, Foot style, Rod side flange style, Head side flange style, Clevis style, Side tapped style, Center trunnion style, Head side trunnion style, Side lug style, Rod side trunnion style Basic style, Foot style, Clevis style, Rod side flange style, Head side

NCA1

CJ1 2 to 20 in/s (50 to 500 mm/s) 2 to 20 in/s (50 to 500 mm/s) Piston speed (50 to 500 mm/s) CJP Cushion Air cushion standard Basic style, Foot style, Rod side flange style, Head side flange style, Clevis style, Side tapped style, Center trunnion style, Head side trunnion style, Side lug style, Rod side trunnion style Basic style, Foot style, Clevis style, Rod side flange style, Head side

REC

Motion on RECL32-300 ML1C REA REC Pressure fluctuation Load fluctuation Speed fluctuation RHC 0.5 0.5 0.3 0.5 Pressure (MPa) Pressure (MPa) Pressure (MPa) Reducing actuation cycle time 10 10 30 10 Load (kg) Load (kg) Load (kg) MTS 100 300 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 CC Max. 500mm/s of high speed transfer is possible.

RB/RBL/RBQ

Cap MI W S Cap bracket CEP1 CE1 CE2 ML2B C J G5-S (mm) CV Model Basic type With cap With cap Basic type dimensions h Hexagon nut D M14 x 1.5 M14 x 1.5 M20 x 1.5 M27 x 1.5 E1 5 5 6 8 E2 K 11 12 15 25 L LL S E3 LL Z B C H 3.5 3.5 4 5 MM F MVGQ RBC1411 RBC1412 RBC2015 RBC2725 RB1411 RB1412 RB2015 RB2725 12.2 12.2 18.2 25.2 12 12 18 25 12 12 18 25 58.8 58.8 62.2 86 78.3 79.3 88.2 124 67.3 67.3

IDUS/IDFS

AM Misc. 14-18-11 12 Series IDUS/IDFS Specific Product Precautions 2 Be sure to read before handling. Protection Circuit Time Delay for Restarting Caution Caution When the air dryer is operated under the following conditions, the protection circuit is activated, the light goes off and operation stops. Allow at least three minutes before restarting the dryer.

Series GS40 Digital Pressure Sensor 1

SET 20 VY1 + G P.SET PPA AL 14-11-19

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

1 q t i Series PF2D For Deionized Water and Chemicals Digital Flow Switch Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuits and wiring examples 60 70 176 z to , are terminal numbers.

Series GS40 Digital Pressure Sensor 1

SET 20 VY1 + G P.SET PPA AL 14-11-19

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

2-M5 x 0.8, depth 8 Z 3 V K 6.5 MX Max. 15 11 M MTS Stroke: S MY MXP16-20B CY Width across flats 12 A MG M8 x 1 H Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 24.3 17.1 14.4 40.8 MA 10.5 11 CX 11 8.5 D27.3 -X 34 20Data A 19 6.5 Operating port 2-M5 x 0.8 (Plug

IDX-OM-W011

M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-1 14-4 . 14-2 14-5 . 14-3 15 15-1 . 15-1 3 IDX-OM-W011 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W011 i i-2 5 i 2 1 IDF Series i-2 i-2 IDX-OM-W011 i