Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: F (G), Port Size: 03 (3/8), Output Specification/Temperature Sensor: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature:

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: P (Pressure Sensor / 0 to -101 kPa / Analogue Output 1 to 5 V), Connector: L1 [L-type Plug Connector - w/o Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: P (Pressure Sensor / 0 to -101 kPa / Analogue Output 1 to 5 V), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: P (Pressure Sensor / 0 to -101 kPa / Analogue Output 1 to 5 V), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: P (Pressure Sensor / 0 to -101 kPa / Analogue Output 1 to 5 V), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 08 [ø8 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: T (Pressure Sensor / -100 to 100 kPa / Analogue Output 1 to 5 V), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 08 [ø8 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]

. / None), Rated Voltage: 5 (24 VDC), Vacuum Sensor: P (Pressure Sensor / 0 to -101 kPa / Analogue Output 1 to 5 V), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 09 [ø5/16 One-touch Fitting (Inch)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: P (Pressure Sensor / 0 to -101 kPa / Analogue Output 1 to 5 V), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: P (Pressure Sensor / 0 to -101 kPa / Analogue Output 1 to 5 V), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: T (Pressure Sensor / -100 to 100 kPa / Analogue Output 1 to 5 V), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: T (Pressure Sensor / -100 to 100 kPa / Analogue Output 1 to 5 V), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: T (Pressure Sensor / -100 to 100 kPa / Analogue Output 1 to 5 V), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 08 [ø8 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: T (Pressure Sensor / -100 to 100 kPa / Analogue Output 1 to 5 V), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]

Compact Slide ø 6, ø 10, ø 16, ø 20 MXH Series

M9NAV1 5 V, 12 V Reed auto switch Solid state auto switch IC circuit 12 V 5 V, 12 V Diagnostic indication (2-color indicator) IC circuit Relay, PLC Yes 24 V Grommet 12 V 5 V, 12 V Water resistant (2-color indicator) IC circuit M9PAV1 M9BAV1 12 V 3-wire (NPN equivalent) 5 V A96V A96 IC circuit Yes 24 V Grommet A93V2 A90V IC circuit A93 A90 100 V 100 V or less Relay, PLC 2-wire 12 V

EXxx-OMP0004CN

Ver.1.00 130 1/2 W SI CC-Link SI 17 ON CC-Link Ver.1.00 130 -12No.EX-OMP0004CN-I PWR INM12 5 B codeSPEEDCON 1 SV24 V +24V 2 SV0 V 0 V 3 SI24 V +24 V 4 SI0 V 0 V 5 M12 SPEEDCON SPEEDCON SPEEDCON 1/2 SPEEDCON M12 -13No.EX-OMP0004CN-I SV SI DC24 V /28 SV DC24V SI DC24V A.

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: U10/32 (10-32UNF), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 07 (ø1/4)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: U10/32 (10-32UNF), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 07 (ø1/4)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: U10/32 (10-32UNF), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 07 (ø1/4)