3 Position Cylinder Series RZQ

(mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 32 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc 1/8 24.5 14 10 5.5 7 4.5 49.5 14 40 110 92 28 14 M10 x 1.5 26 57 16 52 35 9 69 5 24 18 40 5.5 M6 x 1.0 9 Rc 1/8 14 10 5.5 7 4.5 14 50 118.5 96.5 M8 x 1.25 35 14 M10 x 1.5 30 71 16 64 37 12 86 7 30 22 50 6.6 11 Rc 1/4 17 14 3 8 5.5 19

Stability of suction position,

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

CATALOG VC10

23, 33, 53 All Models except 53 SINGLE AUTOMOTIVE HIGH TEMPERATURE MOLDED COIL MANIFOLD MOUNT All Models except 53 All Models Model 23**, 33, 53, 73 DOUBLE AUTOMOTIVE EUROPEAN KIN STYLE COIL FLANGE MOUNT All Models except 53 Models 23, 33 Models 23**, 73 NPT 1/2 AN CONNECTOR PORT 90 RIGHT All Models BODY OPTIONSsee page 80 All Models except 53 3.75 .34 SPLICE BOX HOUSING 3.22 (95.3) 2.50

Vacuum Unit

No. 11 12 13 14 15 16 17 18 19 20 Exploded View y VVQ1000 51A C8 L Dimension 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 Port size L Dimension 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 C8 8 One-touch fitting N9 5/16" One-touch fitting No. 31 32 33 34 35 36 37 38 39 40 L Dimension 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 33 Exploded

Digital Flow Switch

-D) Connector cover (ZS-33-F) Attached the connector cover -68No.PF-OMP0002-H Revision history A: Modified errors in text.

Process Valve Series VNA

50 33 50 0.7 0.5 1 2 3 4 1.0 0.8 1.4 1.2 1 1 4 1 2.4 2.2 5.2 5.0 32 1 2 1 3.8 3.6 JIS Symbol 7.0 6.8 40 Valve type Operation N.C.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

x n + 63 L2 = 33 x n + 75 L L1 L2 1263 Series VFR3000 Manifold: Plug-in Type VV5FR3-40Station 1Port size G: Grommet U side (A, B port) Manual override (Non-locking) (Pitch) (Pitch) 300 (Lead wire length) D side (PE port) (P , EA, EB port) Stations n: Station 2 129 141 3 162 174 4 195 207 5 228 240 6 261 273 7 294 306 8 327 339 9 360 372 10 393 405 Formula L1 = 33 x n + 63 L2 = 33 x n +

SYJ3000/5000/7000

Applicable solenoid valves: Series SYJ314, SYJ314M, SYJ324, SYJ324M (SYJ300 3 port valve) (SYJ300 3 port valve) Plug (VJ3000-33-1) Plug (VJ3000-33-1) Seal the unused R port at the end the manifold. Seal the unused R port at the end the manifold.

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 22 24 Z ZZ G (NN 1) x H H 13 13 6.5 6.5 A B 3.2 6.5 7 7 15 1 4 3H9 depth 3 +0.025 0 NN x M4 x 0.7 thread depth 8 B A 3H9 depth 3 +0.025 0 HA GA Section AA Section BB (mm) F 25 25 40 50 38 50 N 4 4 4 4 6 6 G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 GA 17 12 33 43 43 83 HA 20 30 20 28 46 56 I 13 8.5 9.5 10.5 24.5 38.5 J 19.5 29 39 56 60

TABLE OF CONTENTS

23, 33, 53 All Models except 53 SINGLE AUTOMOTIVE HIGH TEMPERATURE MOLDED COIL MANIFOLD MOUNT All Models except 53 All Models Model 23**, 33, 53, 73 DOUBLE AUTOMOTIVE EUROPEAN KIN STYLE COIL FLANGE MOUNT All Models except 53 Models 23, 33 Models 23**, 73 NPT 1/2 AN CONNECTOR PORT 90 RIGHT All Models BODY OPTIONSsee page 80 All Models except 53 3.75 .34 SPLICE BOX HOUSING 3.22 (95.3) 2.50

1

across flats B1 Female thread MM Depth A1 NA D MM AL A F H ZZ + Stroke S + Stroke F 1.5 1.5 Effective thread length 2 x FL NA H ZZ + Stroke Female rod end Female Rod End [mm] [mm] Bore size A AL B1 D E F FL H H1 KA MM NA NN Bore size A1 H MM 20 14.5 12 13 8 18 0 0.033 11 8.5 30 5 Width across flats 6 length 3.5 M8 x 1.25 24 M18 x 1.5 20 8 15.5 M4 x 0.7 25 17.5 15 17 10 22 0 0.033 11 8.5 33

CXS

0.2 33 0.2 20 42 8 8 3.4 through 6.5 counterbore with depth 5.5 (Opposite side: Same) 2-M3 x 0.5 through 6.5 2-M4 x 0.7 through M3 x 0.5 x 10l (Hexagon socket head cap screw) M4 x 0.7 x 14.5l (Hexagon head bolt) M4 x 0.7 (Hexagon nut) (16) (8 + Stroke) 2-M3 x 0.5 through 4 33 0.2 6 8-28-24 24 Series CXSJ Dual Rod Cylinder: Compact Type Dimensions: 6, 10 Axial Piping CXSJ6P 9 + Stroke 10

CC

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) No load No load Load ratio Load ratio RS Q G RS H A Bore size (mm) Bore size (mm) Bore size (mm) RZQ CCVL20/21/22/23 CCVL02 CCVS30/31/32/33 Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

KP/KPQ/KPG

steel EPDM EPDM EPDM SUS304 stainless steel 2 Series KP Dimensions Male Connector: KPH Effective area mm Model L M TPH TPS A H (width across flats) Applicable tubing O.D. mm Connection threads R Weight g Applicable tubing KPH04-01 KPH04-02 KPH06-01 KPH06-02 KPH08-01 KPH08-02 KPH10-02 KPH10-03 KPH12-03 KPH12-04 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 25.4 25.4 25.9 26.4 32.3 30.3 37.5 33

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Standard stroke Refer to Standard Stroke on page 8-15-33. For 6, 10 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

LEH_C

/LEHS .20 4.1 . 20 4.2 . 21 4.3 . 22 5.23 5.1 . 23 5.2 . 24 5.3 . 27 . 27 . 29 (1). 31 (2). 32 (3). 33 . 34 5.4 . 36 . 36 . 38 1 - 6.39 7.40 7.1 . 40 7.2 . 41 7.3 . 41 7.4 . 42 7.5 . 44 7.6 . 44 8.45 8.1 . 45 8.2 . 46 8.3 . 50 8.4 . 53 .54 2 - LEH Series / (ISO/IEC)(JIS)1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General

Pressure Relief 3 Port Valve With Locking Holes

53 49 19 52 38 30 49 30 4.5 19 9 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 38 5.5 24 10 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 43 5.5 26 10 VHS50 3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 50 6.5 31 12 Model Optional Specifications With bracket Built-in silencer N Q R S T U V W X Y AA BB VHS20 5.4 8.4 27 40 75.4 31.3 25.3 53.3 30 2.3 3 12 VHS30 6.5 10 36.5 53 90.9 40 33

LJ1H

43 Series LJ1 Top Mount (Using T-slots on the Mounting Frame) LJ1H20 M6 bolt M6 bolt 33 33 2 x T-slot Recommended dimension 8 (Refer to JIS B0952.)

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Dimensions/LTF6PF thread depth 8 4 x M5 x 0.8 50 (2 x n1) x 5.5, Drill through 11.5, counter bore depth 5 30 Sensor cable Sensor cable fixing clip Stroke + 66 (Table movement range) (20.5) 82.5 40 40 19 A 42.5 32.5 A 19 Stroke + 95 22.5 64 82.4 87 Stroke + 169 Upper: Incremental encoder Lower: Absolute encoder 40 10 Dog fitting for switch 30 5 Work piece mounting reference plane 17.5 15 30 33