MGC

9 9 108 92 150 134 13 15 94 38 60 125 95 70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 50 75 150 115 82.5 45 194 42 M10 200 95 12 11 135 115 210 190 19 23 142 Bore size (mm) W WH W V U T S Z R Y Q X O P 20 25 32 40 50 30 23 36 40 86 12 26 140 12 80 21 30 M6 x 1 M5 x 0.8 30 25 44 47 98 13 31 153 12 80 21 37 M6 x 1 M5 x 0.8 25 28.5 50 53 112 16 38 161 12 82 21 37 M6 x 1 Rc 1/8 20 33

VCA

219 244 255 240 251 284 295 2 103 114 139 150 117 128 161 172 L1 Side ported L2 VV2CA3 L1 Front ported L2 L1 Side ported L2 VV2CA4 L1 Front ported L2 (mm) Dimensions Electrical entry Grommet: G Conduit: C DIN connector: D Conduit terminal: T A B C E F G H J1 J2 J3 K L M N Model Q 30 32 R 36 41 S 50 52 T 32 38 U 54 57 V 66 69 W 30 36 X 71 74 Y 101 104 Z 65.5 71 55 62 26 31 17 19 19.5 21 33

Digital Flow Switch (Remote type sensor unit)

mm 4 39 mm -26No.PF-OMG0006-F PF2D520S-131S Tubing size A Tubing size B 4 33 mm 4 23 mm 5 39 mm 5 28 mm -27No.PF-OMG0006-F PF2D540S-191S Tubing size A Tubing size B 5 39 mm 5 39 mm 6 49.5 mm 6 49 mm -28No.PF-OMG0006-F Revision history A: Full scale revision due to the change of the format and addition of items.

3 Port Solenoid Valve Series VQ100 1

Blanking plate with 2 screws and gasket L dimension 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. 40 510.5 L dimension 4-12-16

Plug-in/Plug Lead: Single Unit

75 29 Effective area at supply side (mm2) S at P1 = 0.7 MPa/P2 = 0.5 MPa 0.5 P B 64 33 28 0.4 A EA 36 75 78 Effective area at exhaust side (mm2) S at P2 = 0.5 MPa 0.3 B EB 68 38 69 0.2 Note 1) Set the pressure within the operating pressure range of the solenoid valve.

3 Position Cylinder Series RZQ

(mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 32 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc 1/8 24.5 14 10 5.5 7 4.5 49.5 14 40 110 92 28 14 M10 x 1.5 26 57 16 52 35 9 69 5 24 18 40 5.5 M6 x 1.0 9 Rc 1/8 14 10 5.5 7 4.5 14 50 118.5 96.5 M8 x 1.25 35 14 M10 x 1.5 30 71 16 64 37 12 86 7 30 22 50 6.6 11 Rc 1/4 17 14 3 8 5.5 19

Stability of suction position,

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

CATALOG VC10

23, 33, 53 All Models except 53 SINGLE AUTOMOTIVE HIGH TEMPERATURE MOLDED COIL MANIFOLD MOUNT All Models except 53 All Models Model 23**, 33, 53, 73 DOUBLE AUTOMOTIVE EUROPEAN KIN STYLE COIL FLANGE MOUNT All Models except 53 Models 23, 33 Models 23**, 73 NPT 1/2 AN CONNECTOR PORT 90 RIGHT All Models BODY OPTIONSsee page 80 All Models except 53 3.75 .34 SPLICE BOX HOUSING 3.22 (95.3) 2.50

Vacuum Unit

No. 11 12 13 14 15 16 17 18 19 20 Exploded View y VVQ1000 51A C8 L Dimension 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 Port size L Dimension 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 C8 8 One-touch fitting N9 5/16" One-touch fitting No. 31 32 33 34 35 36 37 38 39 40 L Dimension 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 33 Exploded

Digital Flow Switch

-D) Connector cover (ZS-33-F) Attached the connector cover -68No.PF-OMP0002-H Revision history A: Modified errors in text.

Process Valve Series VNA

50 33 50 0.7 0.5 1 2 3 4 1.0 0.8 1.4 1.2 1 1 4 1 2.4 2.2 5.2 5.0 32 1 2 1 3.8 3.6 JIS Symbol 7.0 6.8 40 Valve type Operation N.C.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

x n + 63 L2 = 33 x n + 75 L L1 L2 1263 Series VFR3000 Manifold: Plug-in Type VV5FR3-40Station 1Port size G: Grommet U side (A, B port) Manual override (Non-locking) (Pitch) (Pitch) 300 (Lead wire length) D side (PE port) (P , EA, EB port) Stations n: Station 2 129 141 3 162 174 4 195 207 5 228 240 6 261 273 7 294 306 8 327 339 9 360 372 10 393 405 Formula L1 = 33 x n + 63 L2 = 33 x n +

SYJ3000/5000/7000

Applicable solenoid valves: Series SYJ314, SYJ314M, SYJ324, SYJ324M (SYJ300 3 port valve) (SYJ300 3 port valve) Plug (VJ3000-33-1) Plug (VJ3000-33-1) Seal the unused R port at the end the manifold. Seal the unused R port at the end the manifold.

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 22 24 Z ZZ G (NN 1) x H H 13 13 6.5 6.5 A B 3.2 6.5 7 7 15 1 4 3H9 depth 3 +0.025 0 NN x M4 x 0.7 thread depth 8 B A 3H9 depth 3 +0.025 0 HA GA Section AA Section BB (mm) F 25 25 40 50 38 50 N 4 4 4 4 6 6 G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 GA 17 12 33 43 43 83 HA 20 30 20 28 46 56 I 13 8.5 9.5 10.5 24.5 38.5 J 19.5 29 39 56 60

TABLE OF CONTENTS

23, 33, 53 All Models except 53 SINGLE AUTOMOTIVE HIGH TEMPERATURE MOLDED COIL MANIFOLD MOUNT All Models except 53 All Models Model 23**, 33, 53, 73 DOUBLE AUTOMOTIVE EUROPEAN KIN STYLE COIL FLANGE MOUNT All Models except 53 Models 23, 33 Models 23**, 73 NPT 1/2 AN CONNECTOR PORT 90 RIGHT All Models BODY OPTIONSsee page 80 All Models except 53 3.75 .34 SPLICE BOX HOUSING 3.22 (95.3) 2.50

1

across flats B1 Female thread MM Depth A1 NA D MM AL A F H ZZ + Stroke S + Stroke F 1.5 1.5 Effective thread length 2 x FL NA H ZZ + Stroke Female rod end Female Rod End [mm] [mm] Bore size A AL B1 D E F FL H H1 KA MM NA NN Bore size A1 H MM 20 14.5 12 13 8 18 0 0.033 11 8.5 30 5 Width across flats 6 length 3.5 M8 x 1.25 24 M18 x 1.5 20 8 15.5 M4 x 0.7 25 17.5 15 17 10 22 0 0.033 11 8.5 33

CXS

0.2 33 0.2 20 42 8 8 3.4 through 6.5 counterbore with depth 5.5 (Opposite side: Same) 2-M3 x 0.5 through 6.5 2-M4 x 0.7 through M3 x 0.5 x 10l (Hexagon socket head cap screw) M4 x 0.7 x 14.5l (Hexagon head bolt) M4 x 0.7 (Hexagon nut) (16) (8 + Stroke) 2-M3 x 0.5 through 4 33 0.2 6 8-28-24 24 Series CXSJ Dual Rod Cylinder: Compact Type Dimensions: 6, 10 Axial Piping CXSJ6P 9 + Stroke 10

CC

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) No load No load Load ratio Load ratio RS Q G RS H A Bore size (mm) Bore size (mm) Bore size (mm) RZQ CCVL20/21/22/23 CCVL02 CCVS30/31/32/33 Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

KP/KPQ/KPG

steel EPDM EPDM EPDM SUS304 stainless steel 2 Series KP Dimensions Male Connector: KPH Effective area mm Model L M TPH TPS A H (width across flats) Applicable tubing O.D. mm Connection threads R Weight g Applicable tubing KPH04-01 KPH04-02 KPH06-01 KPH06-02 KPH08-01 KPH08-02 KPH10-02 KPH10-03 KPH12-03 KPH12-04 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 25.4 25.4 25.9 26.4 32.3 30.3 37.5 33