JCRB-OM00003

Table 1 Model Solenoid valve (CV) Speed Controller Tubing CRB10 CRB15 0.05 AS-M5 4/ 2.5 6/ 4 AS-M3(Type270) CRB20 CRB30 CRB40 0.1 to 0.2 AS-M5 4/ 2.5 6/ 4 Note) The speed controllers must be used in a meter-out control. (Do not use a speed controller for slow speed.) 9 4.

LEC-OM005xx

Normal mode Parameter . 74 (4-1) Parameter group selecting screen . 74 (4-2) Parameter group . 74 (4-3) Parameter setting . 75 (4-3-1) Parameter setting screens and how to set the parameter 75 (5) Normal mode Test . 76 (5-1) Test selection screen . 76 (5-2) Test items . 76 (5-3) Test details . 76 (5-3-1) JOG/MOVE . 76 (5-3-2) Return to origin . 78 (5-3-3) Test drive . 80 (5-3-4) Force output

MLGP

4 5 4 4 Since this is a guideline including hysteresis, not meant to be guaranteed.

0.01

Rc 1/4, G 1/4 NPT 1/4 Rc 1/4, G 1/4 NPT 1/4 Female thread Rc 1/4, G 1/4, NPT 1/4 Resin Case material Resin Aluminum Stainless steel Air (Nitrogen) Fluid 0.01 m (filtration efficiency: 99.99%) Note) Nominal filtration rating Initial pressure drop 0.03 MPa (at inlet pressure 0.7 MPa, maximum flow) Maximum operating pressure (at 20C) 1.0 MPa (in case of nitrogen: 0.99 MPa) 5 to 45C Operating

CLQ

1/4 Rear cylinder port Rc 1/4 Front cylinder port 10.5 13 Approx. 41 47 M10 x 1.5 effective thread depth 15 86 20 19 50 64 22 11 1.6 Minimum lead wire bending radius 10 Dust cover (manual unlocking unit) 6.6 Auto switch D-A7, A8 4-13 Counter bore depth 9.5 Rc 1/8 unlocking port (unlocks when pressurized) 17 50 64 4-11 Flat washer 4 pcs.

VCA

/2 (15A) 4 3/4 (20A) Table (2) Bracket Assembly Part No.

Digital Flow Switch

Accuracy [%F.S.] 50% 50% 50% 40% 40% 40% With 1 1/4" connected With 1 1/2" connected 30% 30% 30% With 3/4" connected Elbow piping (2") Elbow piping (1 1/2") 20% 20% 20% Elbow piping (1") 10% 10% 10% 3% 3% 3% 8 7 6 5 4 3 2 1 0 0% 0% 0% 8 7 6 5 4 3 2 1 0 8 7 6 5 4 3 2 1 0 Straight section [d] Straight section [d] Straight section [d] Straight When piping with diameter smaller than the straight

KA

(mm) A Weight (g) L D M Model Soft nylon Urethane KAH23-M5 17 8.5 14 13 2.1 M5 x 0.8 M6 x 1 7 17.5 12.5 8.5 3.4 2.9 4 Applicable tubing 1 8 KAH23-M6 KAH23-U01 8 10 3.2 KAH04-M5 17 M5 x 0.8 M6 x 1 9.5 14 13 2 4 4 8 KAH04-M6 17.5 4 1 8 KAH04-U01 13.5 18.5 5 14 10 10 16 5.6 5.6 K 1 4 KAH04-U02 16.5 10.5 10 KAH06-M5 18.5 M5 x 0.8 M6 x 1 15 14 4 4 11.5 3 10 KAH06-M6 19 Connection

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

-60GD B1 2 2n1-M5 x 0.8 [4(A), 2(B) port] [With external pilot] 13.3 (Pitch) P = 10.5 13.3 24 24 16.2 16.2 17 36.7 34 34 B 2 B 2 B 2 B 2 B 2 2 B 2 2 B 2 B B R B 2 PE R 3 3 R 3 R 3 1 P 1 P P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 4-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n-One-touch fitting [4(A), 2(B) port

Speed Controller with

Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Inch size 1/8" 5/32" 1/4" 5/32" 1/4" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Flow Direction Symbol on Body C values: Sonic conductance dm3/(sbar) Free flow 0.3 0.4 0.6 0.4 0.6 1.0 1.2 1.1 1.6 2.2 2.6 2.4 3.5 Symbol Controlled flow 0.3 0.4 0.6 1.0 1.2 1.3 1.9 2.7 3.3 2.8 4.1 pressure ratio Free flow 0.3 0.2 0.3 0.1 0.2 0.2 0.3 0.2 b values: Critical

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled

MLGP

4 5 4 4 Since this is a guideline including hysteresis, not meant to be guaranteed.

SI unit for DeviceNet ®

Specific service Service code Service name 4Bh Allocate_Master/Slave_Connection_set 4Ch Release_Group_2_Identifier_Set 4. Assembly Object (Class ID: 04h) 4-1. Class attribute ID Access rule Description Value 4-2. Class common service Service code Service name 4-3.

Electric Actuator / Low profile slider type

Procedure before operation/simple setting to use straight away . 4 1.1 Preparation . 4 1.2 Controller setting software. 5 1.3 Teaching box . 7 2. Specification . 9 2.1 Low profile slider type LEM Series . 9 2.2 How to Order . 12 2.3 Construction . 14 3.

Process Pump

3/8 1/2 150 330 800 800 1/4 3/8 1/8 1/4 Port size Rc 3/4 Ambient and fluid temperature 5 to 60C (No freezing) Pressure gauge port size Rc 1/8 1/8 1/4 1/4 AW: 5 m, AFM: 0.3 m (Filtration efficiency 99.9%) Nominal filtration rating Downstream oil mist concentration Bowl material Max. 1.0 mg/Nm3 (Approx. 0.8 ppm) Note 2) Note 1) Conditions: Upstream pressure 0.7 MPa, set pressure 0.5 MPa.

ASR

4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

Thermo-con

RS-232C RS-485 5 4 1 1 BUS+ Unused 2 BUS RD 3 Unused SD 4 Unused Unused 5 SG SG 6-9 Unused Unused 9 8 7 6 3. External sensor connector (EXT.SENSOR) D-sub 15 pin (socket) Holding screw: M2.6 3 4 Pin No.

Vacuum Gripper

(FKM (Silicone ZP 08 U ZPT08U-A6 4 4 4 4 ZP08U ZP 08 B ZPT08B-A6 4 4 4 4 ZP08B ZPT1-A6 ZP 10 UT ZPT10UT-A6 4 4 4 4 ZP10UT ZP 13 UT ZPT13UT-A6 4 4 4 4 ZP13UT ZP 16 UT ZPT16UT-A6 4 4 4 4 ZP16UT ZP 10 U ZPG10U-7A-X2 7 7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10

IDX-OM-W020

. i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-5 i-2-8 . i-6 i-2-9 . i-6 i-3 . i-7 i-4 / . i-8 1 1-1 . 1-1 2-1 . 2-1 2-2 . 2-2 2-2-1 . 2-2 2-2-2 . 2-3 2-2-3 . 2-3 2-2-4 . 2-3 2-2-5 . 2-4 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 5 . 5-1 IDFB Series 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-5 6-5 . 6