CV/MVGQ

(Not mountable after the time of shipment) Auto Switch Mounting Height D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G59F D-F5 D-J5 D-F5W D-J59W D-F59F D-F5NTL Auto switch model D-Z7/Z80 D-Y59 D-Y7P D-Y7W D-A3C D-G39C D-K39C D-A44 D-A44C D-A3 D-G39 D-K39 D-Y69 D-Y7PV D-Y7WV D-A5 D-A6 D-A59W Bore size (mm) Hs Hs Ht Hs Ht Hs Ht Hs Hs Ht Hs Hw Hs Hw Hs 40 38 40 31 38.5 31 30.5 30 72.5 73

CV/MVGQ

(Not mountable after the time of shipment) Auto Switch Mounting Height D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G59F D-F5 D-J5 D-F5W D-J59W D-F59F D-F5NTL Auto switch model D-Z7/Z80 D-Y59 D-Y7P D-Y7W D-A3C D-G39C D-K39C D-A44 D-A44C D-A3 D-G39 D-K39 D-Y69 D-Y7PV D-Y7WV D-A5 D-A6 D-A59W Bore size (mm) Hs Hs Ht Hs Ht Hs Hs Hs Ht Ht Hs Hw Hs Hw Hs 40 38 40 31 38.5 31 30.5 72.5 73 30

High Vacuum Angle Valve

D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Table of Contents

Note 50 63 32 40 Bore size (mm) Action Double acting Reed switch D-A7/A8 D-A73C/A80C D-A7H/A80H D-A79W Solid state switch D-F7/J79 D-F7V D-J79C D-F7W/J79W D-F7WV D-F7BAL/F78AVL D-F79F Fluid Air 0.1 to 0.6 MPa Operating pressure Switch mounting screw (M3 x 0.5 x 10l) Switch spacer Switch mounting nut. 5 to 60C Ambient and fluid temperature 32, 40 50, 63 BQ-2 Lubrication Not required 3 to

MY1

Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y59A, D-Y69A D-Y59A D-Y69A D-Y7P D-Y7PV D-Y59B D-Y69B Auto switch model no.

1

Auto Switch Mounting Position Auto Switch Mounting Height D-A7H/J79W D-A80H/F7BAL D-F7/F7F D-F79/F7NTL D-F7W D-A72/A7H/A80H D-A73C/A80C D-F7/F7V/F7W D-F7WV/F7BAL D-J7 D-A73C D-A80C D-F7WV D-F7V D-J79C D-A7/A8 D-A79W D-A73 D-A80 D-A79W D-F7F D-F7NTL Bore size (mm) Bore size (mm) A B A B A B A B A B Hs Hs Hs Hs Hs Hs 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 40.5 39.5 40 39 37.5 36.5

CA2

D-F5 D-J5 D-F59F D-F5W D-J59W D-F5BAL D-A5/A6 D-A3/ A3C D-A44/ A44C D-G39/ G39C D-K39/ K39C Auto switch model D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-A3C D-G39C D-K39C D-A44C D-B5 D-B64 D-F5NTL D-B59W D-A59W Bore size (mm) B A B A B A B A B A B A A B Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw 40 0 2 9.5 11.5 3.5 0 0 0 0.5 1.5 38 40 31 73 69 81 69 72.5 31 80.5 38.5 4.5 6.5 4 2 50 0 2 9.5 11.5 3.5

Aluminum High Vacuum Angle Valve

5 to 60C Heater With 100C heater With 120C heater D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

MY1

54 20 14 7.5 20 7.5 MY1C20 23 100 4.5 12.5 12.5 46 12 M6 x 1 4.8 100 50 58 M5 x 0.8 25 17 (mm) NE NW PA PB PG Q PP QW QQ RR SS TT UU W WW MY1C16 MY1C20 NE NW PA PB PG Q PP QW QQ RR SS TT UU W WW Model NH VV VV XX Z XX Z NH 27.7 10 30 160 28 56 40 40 3.5 153 7.5 48 9 11 2.5 15 14 68 13 33.7 12.5 32 200 34 60 50 40 4.5 191 11.5 45 10 14.5 5 18 12 72 14 Y 2-d R S D WX Bottom ported (Applicable

Air Slide Table

10, 20 ST 10 to 30 ST 40 to 75 0.002 0.050 0.002 ST 10 to 75 0.000 0.000 0.000 0 20 40 60 0 20 40 60 0 20 40 60 Load [N] Load [N] Load [N] (Plate size: t = 12) Lr = 160 mm MXQ20(A)-Z, MXQ16B-Z MXQ20(A)-Z, MXQ16B-Z MXQ20(A)-Z, MXQ16B-Z 0.018 0.025 0.600 ST 125, 150 0.016 ST 150 0.500 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 10 to 40 0.020 ST 75, 100 0.014

LJ1H

section detail 100 201 60 50 Z section 43 Stroke + 125 (table movement range) 192 3.3 30 90 A section 83 5.8 1.7 4.8 80 Stroke + 360 A section detail (Switch groove) 11.5 40 (T-slot pitch) 36 45 3-5H10 depth 5 9.4 18 4.5 10 Stroke + 145 80 40 30 T-slot dimensions The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment

15

D-M9PA(V) D-M9BA(V) 7 13 38 63 D-M9NA(V) 8 14 41 68 Auto switch model 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-M9A Indicator light Slotted set screw (flat point) Mounting screw M2.5 x 4 L Stainless steel 2 24 2.8 500(1000)(3000)(5000) 0.2 3 4 6 Most sensitive position 2.6 D-M9NAV/D-M9PAV D-M9BAV 500(1000)(3000)(5000) Mounting screw M2.5 x 4 L Stainless steel

10

D-Y69l D-Y7P D-Y7PV D-Y7H D-Y7lW D-Y7lWV D-Z7l D-Z8l D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-F5l D-J59 D-F59F D-F5NT D-A5l D-A6l D-A59W D-G39 D-K39 D-A3l D-A44 CJ1 D-A9l D-A9lV D-P3DWA D-P4DW CJP CJ2 Bore size A B A B A B A B A B A B A B A B A B A B 32 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50

CXS

CXS -R 10 15 ZZ SS Z (Z) Manual lever insertion 1.7 Dual-Double-Rod Type CXSW K KK Hexagon (O) (Z) (mm) O K Width across flats 12 Model CXS10-R 6.5 8.5 Width across flats 13 CXS15-R (mm) Symbol ZZ Z SS KK 50 Stroke 10 20 50 40 30 10 20 30 40 50 10 50 40 30 20 10 20 30 40 Model 19.5 80 90 100 115 125 30 97 107 117 132 142 24.5 40 50 CXS10-R 20.5 90 100 110 120 130 35 109 119 129 139 149 45

ISO Cylinder

D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV 32 11.5 35.5 60.5 85.5 110.5 40 16.5 40.5 65.5 90.5 115.5 140.5 D-A9l D-A9lV 32 7.5 31.5 56.5 81.5 106.5 40 12.5 36.5 61.5 86.5 111.5 136.5 D-C7l/C80 D-C73C/C80C 32 8 32 57 82 107 40 13 37 62 87 112 137 D-A73 D-A80 32 8.5 32.5 57.5 82.5 107.5 40 13.5 37.5 62.5 87.5 112.5 137.5 D-A72/A7lH/A80H D-A73C/A80C D-F7l/F7lW D-J79/J79W D-F7lWV D-J79C D-F7BAL

Solid State Auto Switches

Applicable Cylinders Weight (g) Cylinder series Bore size (mm) D-G5NB Auto switch model CDM2-Z, CDM2, CDBM2, CDVM3, CDVM5, CDLM2, CDLG1, MLGC CDG1-Z, CDG1 CDA2-Z, CDA2, CDBA2, CDV3, CDVS1, CDL1 MGC, MGG 20, 25, 32, 40 3 m (L) 79 Lead wire length 20, 25, 32, 40, 50, 63, 80, 100 5 m (Z) 125 40, 50, 63, 80, 100 20, 25, 32, 40, 50 Operating Range Bore size (mm) 20 Cylinder series 35 25 40 32

CRB2/CRBU2/CRB1

A parallel keyway is used instead of single flat for size 40. Single flat Single flat D D D D D D D D C Single flat Single flat (mm) Size 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 C D Notes) Only side ports are available except for basic type. Dimensions and tolerance of the shaft and single flat (a parallel keyway for size 40) are the same as the standard.

Table of Contents

A parallel key is used instead of single flat for size 40. Single flat Single flat D D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except for basic type. Note 2) Dimensions and tolerance of the shaft and single flat (a parallel keyway for size 40) are the same as the standard.

MB

2 (n4) 2 105 + 55 n = 4, 8, 12, 16 100 + 55 140 + 55 n (Same side) D-F5NTL n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1 100 140 105 120 125 130 2 (Different sides or Same side) 1 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7 W 95 100 105 80 85 90 (n4) 2 (n4) 2 (n4) 2 (n4) 2 100 + 40 (n4) 2 (n4) 2 85 + 40 90 + 40 n = 4, 8, 12, 16 80 + 40 105 + 40 95 + 40 n n = 4, 8

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

A parallel key is used instead of single flat for size 40. Single flat Single flat D D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except for basic type. Note 2) Dimensions and tolerance of the shaft and single flat (a parallel keyway for size 40) are the same as the standard.