Technical Data   CRVPro4 CRVpro8 CRVpro16 Free Air Displacement @ 60 Hz, cfm (L/min) 2.8 (78) 5.6 (158) 12.8 (363) Ultimate Pressure, torr 1.5x10?³ 1.5x10?³ 2x10?

FQ1

Takes only 60 seconds for element replacement. Element replacement in only 60 seconds Replacement in less than two minutes is possible including removal of liquid. Removing liquid . 45 seconds Removing the case Replacing the element . 51 seconds Installing the case Air vent G1/4 Cover (SUS304) S.O.E. (Single Open Element) can be installed.

30

18.2 18 22.5 22.8 18.9 17.6 25.9 19.8 18.5 28.1 23 12 4 3.9 7.9 7.8 9.1 14.7 13 13.5 24 18.6 20 22 39.2 26 20.2 35.3 43.6 40.3 M5 x 0.8 M5 x 0.8 1/8 4 12.6 Applicable tube D M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/8 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2 12 6 13.6 20.6 M A 14 L 24.7 22.9 23.1 25.6 27.5 Connection thread 14 8 16.1 23.3 17 (R) H 17.2 17 10 17 39 24 22 D Applicable tube 46 30.6 19 12 18.6 60

IZx-OMT0049

Alarms for IZT41 and IZT42 . 60 4-5-3. Details of the alarms . 61 5. Performance . 63 5-1. Installation distance and Discharge time (Discharge time of 1000V100V) . 63 5-2. Potential amplitude . 65 5-3. Static neutralization range . 66 5-4. Flow Pressure characteristics . 69 6. Dimensions . 70 7. Specifications . 79 8. Troubleshooting . 81 9.

Digital Pressure Switch

2 Setting of OUT2 36 F 3 Digital filter setting 38 F 4 Auto-preset function 39 F 5 FUNC terminal setting 41 F 6 Fine adjustment of display value 43 F10 Sub display setting 44 F11 Display resolution setting 50 F80 Power saving mode 51 F81 Security code 52 F82 Input of line name 54 F90 Setting of all functions 55 F96 Input signal check 57 F97 Selection of copy function 58 F98 Output check 60

Digital Pressure Switch

filter setting 36 F 4 Auto-preset function 37 F 5 FUNC terminal setting 39 F 6 Fine adjustment of display value 41 F10 Sub display setting 42 F11 Display resolution setting 48 F80 Power saving mode 49 F81 Security code 50 F82 Input of line name 52 F90 Setting of all functions 53 F96 Input signal check 55 F97 Selection of copy function 56 F98 Output check 58 F99 Reset to default settings 60

LZ-OM003xx

(Operation 60%, Holding 40%) Approx.4,000hrs. (Operation 60%, Holding 40%) Inspection every 6 m onths or the not use for 1m onth or longer. Cable No dam age, cracked or incorrect wiring Appearance No gouge or nick found on the body. Travel km 1,700 L[]Z[]3H 1,200 No debris, dust or water adhered.

LZ-OM004xx

(Operation 60%, Holding 40%) Approx.4,000hrs. (Operation 60%, Holding 40%) motor does not start or operation stops suddenly. Travel km L[]Z[]5L 280 L[]Z[]3M 640 L[]Z[]5M 850 L[]Z[]3 200 1,700 L[]Z[]3H 1,200 Note. Refer to the shorter data shown above. Energizing tim e Reference of travel depending lead Horizontal direction Reference for energizing tim e Model no.

Servo Motor Controller (24 VDC)

Also, this controller should be installed with 50mm 60 - or larger spaces between each side of it and the other structures or components. It may cause a malfunction of the controller and its peripheral devices and a fire. 4.

AIR FILTER

HOW TO ORDER AF 30 03 BD 1N A 1 3 4 5 2 1 Symbol Description Body size 10 20 30 40 50 60 Meter thread (M5) Rc N NPT F G Thread type Nil 2 M5 M5 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 Port size 3 Nil Without mounting option B With bracket a Mounting Option 4 Nil Without auto drain C With float type auto drain (N.C.)

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

power supply (+) Lock release (+) [I/O cable] LEC CK4 Cable length (L) [m] 1 3 5 1.5 3 5 Controller side PLC side (16) (10) (11) (30) (60) (L) Conductor size: AWG26 Dot mark Insulation color Terminal no.

Clean Air Module

LVB3-8-3 Threaded type NPT 1/4 LVB3-8-4 End plate assembly 7 With 12 One-touch fitting LVB4-8-1 With One-touch fitting Rc 3/8 LVB4-8-2 Threaded type NPT 3/8 LVB4-8-3 Each module has 2 connecting brackets. 337 LLB Series Flow Rate Characteristics LLB3-1-P1R1VSF: Standard (100 L/min) 100 120 0.3 MPa 90 Set pressure 0.4 MPa 100 Flow rate {L/min (ANR)} Flow rate {L/min (ANR)} 80 70 80 60

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

One-touch fitting 6 x 4 tube Pilot port size LQ1 Threaded M5 x 0.8 LVN Fluid temperature (C) 0 to 100 Ambient temperature (C) 0 to 60 TL/TIL Mass (kg) 0.09 0.15 0.36 0.17 LQ3 Construction Standard type N.C. type N.O. type Double acting type PB PB PB q q q PA PA PA e e e A B A B A B A B A B r w With flow rate adjustment t PB PA Description Material Parts list No.

Fluoropolymer Piping Equipment

Note) Metric size 6, 8, 10 10, 12 Inch size 1/8", 3/16", 1/4" 1/4", 3/8" 3/8", 1/2" LVC Orifice diameter 4.4 8 10 0.4 1.2 1.8 Flow rate characteristics Av x Kv LVA 0.5 1.4 2.2 Cv Withstand pressure (MPa) 1 LVH Operating pressure (MPa) 0 to 0.5 Fluid temperature (C) 5 to 90 LVD Ambient temperature (C) 0 to 60 Weight (kg) LVQ 0.055 0.115 0.185 Note) For details of the applicable tubing sizes

212

[0.25] Outlet pressure psi [MPa] Outlet pressure psi [MPa] Outlet pressure psi [MPa] 29 [0.20] 29 [0.20] 29 [0.20] 22 [0.15] 22 [0.15] 22 [0.15] 15 [0.10] 15 [0.10] 15 [0.10] 7.3 [0.05] 7.3 [0.05] 7.3 [0.05] 0.00 0 1.3 [5] 2.6 [10] 4.0 [15] 5.3 [20] 7.9 [30] 9.2 [35] 11 [40] 12 [45] 6.6 [25] 0.00 0 1.3 [5] 2.6 [10] 4.0 [15] 5.3 [20] 7.9 [30] 9.2 [35] 11 [40] 12 [45] 13 [50] 15 [55] 16 [60

Booster Relay Series IL100

IL211 14.5 Panel fitting dimension 58 45 Panel 35 Max. 4 2 x 6.6 2 52 10 137 62 31 21 5 SIG OUT IN1 OUT1 SIG 2 IN2 OUT2 OUT 5 x Rc1/4 60 IL220 14.5 Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 58

Lock-Up Valve IL201/211/220 Series

IL211 Panel fitting dimension 14.5 IP 58 45 Panel 35 Max. 4 IW 2 x 6.6 2 52 10 1301 AW 137 62 31 21 5 IL1 SIG OUT IN1 OUT1 SIG 2 IL2 IL2 IN2 OUT2 IT OUT 5 x Rc1/4 CP 60 IS IL220 VFN 14.5 INT Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 173

Ionizer Nozzle type IZN10 Series IZS

IZN10-ES2 IZN10-ES3 IZN10-ES4 Number of spacers Shield sheet/IZN10-A004 37 40 4 This is an individual shield sheet for the manifold mounting parts set/IZN10-ES. 54 60 6 71 75 8 Ionizer (Order it separately.)

Compact Cylinder

mm] Rod size [mm] Operating direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 Refer to page 8 for cylinders with auto switches. 12 6 OUT 113 23 34 45 57 68 79 IN 85 17 25 34 42 51 59 Auto switch proper mounting position (detection at stroke end) and mounting height Minimum stroke for auto switch mounting Operating range Auto switch mounting 16 6 OUT 201 40 60

48

70 16 (12 x 2) 6 OUT 226 45 68 90 113 136 158 IN 170 34 51 68 85 102 119 20 (16 x 2) 8 OUT 402 80 121 161 201 241 281 IN 302 60 90 121 151 181 211 25 (20 x 2) 10 OUT 628 126 188 251 314 377 440 IN 471 94 141 188 236 283 330 32 (25 x 2) 12 OUT 982 196 295 393 491 589 687 IN 756 151 227 302 378 453 529 40 (32 x 2) 16 OUT 1608 322 483 643 804 965 1126 IN 1206 241 362 483 603 724 844 50 (40