High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG

LJ1H

of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Standard Motor/Horizontal Mount Specification Series LJ1H10 Dimensions/LJ1H101PB Scale:

KK/KK13

Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no.

AC Servo Motor Driver (Pulse input type/Positioning type)

(RES) A.10 Undervoltage A.12 Memory error 1 (RAM) A.13 Clock error A.15 Memory error 2 (EEP-ROM) A.16 Encoder initial communication error1 A.17 Board error A.19 Memory error 3 (Flash-ROM) A.1A Motor combination error A.1C Software combination error A.1E Encoder initial communication error 2 A.1F Encoder initial communication error 3 A.20 Encoder normal communication error 1 A.21 Encoder normal

Dual Speed Controller with One-touch Fitting Series ASD

2 !4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

t r r , " . . a : r i . . . , r i a , r . .

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

Electric Actuator

A-A B @1 Cable is included @2 @5 !

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

7

2 !0 !2 VXD VXD !1 t !1 t VXZ o y o y IN(P1) !3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

Power Valve: Economy Valve Series VEX5

Port 3 (R) 1/4 (P1) Refer to page 2449. 2 x port size Port 2 (A),1 (P) 2 x d Mounting hole A (Air operated) For bracket mounting Max. O Min.

One-touch Fittings

Q1 O 2 x Applicable tubing L1 M A L2 L3 D H Connection thread Release button dimensions X Branch Male Elbow: KQ2LU-G (Sealant) Connection thread R Model H (Width across flats) Effective area [mm2] Min. port size Release button dimensions L1 L2 L3 A*2 M P O N Q1 Q2 Applicable tubing O.D.

CRBU

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

E-P HYREG

VBA VBAT Cylinder Thrust Control Tension control balancer 2(A) 3(R) AP100 Air Flow Control of Nozzle Note) Example Auto balancer 1(P) Air blowing Air cooling 2(A) 3(R) 1(P) Automatic adjustments Pressure Control of Tank 3(R) 3(R) Flow Control of Various Fluids 2(A) 2(A) 1(P) 1(P) For remote control of another air operated valve Nozzle 3(R) 2(A) Note) Use for the sonic flow. 3(R) 1(P) 2(A)

VHK

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.

VHK

valve 3 port valve 12 12F 6 06F M5 x 0.8 M5 8 08F R 01S 02S 03S 04S 1 8 R 1 4 R 3 8 R 1 2 10 10F 12 12F M5 x 0.8 M5 R 01S 02S 03S 04S 1 8 R 1 4 R 3 8 R 1 2 Standard Type 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): One-touch fitting 1(P): One-touch fitting 2(A): Male thread 1(P): Male thread 2(A): Male thread 2(A) 2(A) 2(A) 2(A) Applicable tubing O.D.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

6 r e w !4 o !5 u !0 #4 #3 $7 #7 @4 q i @8 $6 @7 $2 @0 $8 #8 $5 $0 #0 #1 @6 @2 $4 #9 @9 $6 @1 $2 @5 !3 $3 !9 $1 #5 #2 !2 #6 A @3 A Section A-A !7 !8 t !7 Enlarged drawing of shim part !6 y !

Title not found

t r r , " . . a : r i . . . , r i a , r . .

Compact

ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping 200 08; 12mm lead 10.05 I M <-iD;;,;; uo100 08

ZP

J Hexagon width across flats 10 Hexagon width across flats 2 F E ZM Hexagon width across flats 12 D C Applicable tubing O.D.Q ZH Y 2 R H A B Hexagon width across flats 12 Hexagon width across flats 3 ZU F E D C ZL 3 2 ZY Dimensions: 10 mm Stroke A B (mm) J H F D C E A B I Model ZQ ZPR10F10-0-A10 10 12 10 12.5 23.4 39.5 50.5 84.5 With a stroke of 10 mm ZPR13F10-0-A10 13 15 23 ZF 10.5 13 23.9