Series CJ5-S ø10, ø16 Stainless Steel Cylinder

CJ5 L 16 S R 60 CDJ5 L 16 S R 60 H7BAL With auto switch With auto switch (Built-in magnet) Made to Order Refer to page 835 for details. Stainless steel cylinder Number of auto switches Seal material NBR seals (Nitrile rubber) FKM seals (Fluororubber) R V 2 pcs. 1 pc. n pcs.

FEP Tubing (Fluoropolymer)

Min. bending radius (mm) Note 3) 25 20 10 35 25 55 35 85 60 95 220 At a temperature of 20C, bend the tubing into a U shape. Fix one end and gradually move the other end closer. Measure 2R at the point where the outside diameter's rate of change is 5%.

In-line Air Filter

5 (Filtration efficiency 95%) 0.1 (Vacuum pressure 20 kPa) Operating and ambient temperature range C Filtration m 0.0 0 10 20 30 40 50 60 Operating temperature [C] Element replacement differential pressure MPa Filtration area mm2 1260 750 Applicable tubing material Weight g Internal capacity cm3 Nylon, Soft nylon, Polyurethane 25.0 7.0 79.7 23.6 27.3 20.0 6.0 68.4 10.5 4.5 53.9 19.0 23.0

Air Slide Table/Long Stroke Type Series MXY

80 100 Load N 0 20 40 60 80 100 Load N 0 50 100 150 200 250 222 Series MXY Air Slide Table Long Stroke Type Construction @3 y w q r u #0 MXH MXU !

Series 55-PA3000/5000

Automatically operated type Air operated type Series 55-PA3000/5000 Automatically operated type (internal switching type) Air operated type (external switching type) For 55-PA30: II 2 GD c T6 Ta 0 C to +60 C For 55-PA33: II 2 GD c T5 Ta 0 C to +60 C For 55-PA5: II 2 GD c T6 Ta 0 C to +60 C For 55-PA53: II 2 GD c T6 Ta 0 C to +60 C For more details, other specifications, dimensions, see the

P

X2709 2 B 02 30 R B AW Body size Flow direction Nil Flow direction: Left to right R Flow direction: Right to left 30 Body size 30 40 Body size 40 60 Body size 60 Bowl Port size 2 Metal bowl Symbol Port size Body size 30 40 60 02 Rc1/4 V V 03 Rc3/8 V V 04 Rc1/2 V 06 Rc3/4 V V 10 Rc1 V Mounting option1 Nil Without mounting option B2 With bracket H3 With set nut (for panel mount) Waterproof

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

Standard Stroke Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 80, 100, 125, 150 20 to 63 Theoretical Output OUT IN 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 80, 100, 125 80, 100 Unit: N Manufacture of Intermediate Stroke Bore size (mm) Operating direction Operating pressure (MPa) 0.3 0.5 0.7 Dealing with the stroke by the 1 mm interval by using an exclusive

FHM

20 10 0 1 5 10 50 100 100 90 80 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using

Material: Super PFA High Purity Fluoropolymer Tubing TL/TIL Series

Fluoropolymer Fittings LQ series 0.5 0.19 0.09 0.04 2.0 400 290 0.7 0.26 0.12 0.05 2.8 220 160 1.0 0.43 0.20 0.08 4.6 95 60 1.0 0.62 0.28 0.12 6.7 60 30 1.0 0.73 0.34 0.14 7.9 35 20 20C 100C 200C 260C 1.0 0.62 0.28 0.12 6.7 25 20 1.0 0.92 0.42 0.17 9.9 10 6 1.0 0.59 0.27 0.11 6.4 20 12 0.6 0.24 0.11 0.05 2.6 220 160 0.7 0.27 0.12 0.05 2.9 130 110 0.9 0.33 0.15 0.06 3.6 100 65 1.0 0.43 0.20

Heatless Air Dryer ID Series

Adsorbent for low dew point Symbol Port size Symbol Size Applicable standard size Power supply voltage 20 30 40 60 Thread type Symbol Description 1 4 1 2 3 4 02 04 06 Symbol Nil Type Rc Single phase 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase 110 VAC (50 Hz) Single phase 200 VAC (50 Hz) 200 to 220 VAC (60 Hz) Single phase 220 VAC (50 Hz) 0 F G N NPT 1 5 6 134

CJ2Y Series ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 10 15, 30, 45, 60, 75, 100, 125, 150 400 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 400 Symbol Specications -XAl Change of rod end shape -XC3 Special port location -XC9 Adjustable stroke cylinder/Adjustable retraction type Note 1) Manufacture of intermediate strokes at 1 mm intervals is possible.

Membrane Air Dryer/Single Unit Type Series IDG < A IDG < A Series Reduced purge

RoHS Membrane Air Dryer/Single Unit Type Series IDG60 75 100 Option Standard dew point temperature and air flow rate Contents Symbol Symbol Flow rate by size Outlet air flow rate (L/min [ANR]) Standard dew point (oC) 30 20 None (Standard) Nil P R 50 500 60

PVC Quick Drain Valve LVW Series

PVC Quick Drain Valve LVW Series How to Order 60 25A LVW Series O-ring material Material Symbol Body class Orifice size Symbol 60 80 Nil N FKM 6 25 EPDM 8 40 65 90 9 80 Pilot port thread type Thread type Symbol Port size Nil N Rc1/8 Body class Symbol Applicable PVC piping external diameter NPT1/8 Symbol 25A 32A 40A 50A 65A 80A 6 32 PA 38 8 48 60 B A 9 75 89 PB Standard Specifications Model

Coolant Valve Series SGC Made to Made to order specifications Order How to Order (For details, refer to page 389)

Hz 200 VAC 50/60 Hz 110 VAC [115 VAC] 50/60 Hz 220 VAC [230 VAC] 550/60 Hz 24 VDC 12 VDC Note) Refer to the back of page 394 when using with energization for long periods of time.

Coolant Valve Series SGH

VAC] 50/60 Hz 220 VAC [230 VAC] 50/60 Hz 24 VDC 12 VDC Note 1) Refer to the below table (1) for combinations with light/surge voltage suppressors.

3 Port 3 Position Valve Body Ported VEX3 Series

Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC * DC specification of type D and DO is only available with 12 and 24 VDC. 32 02 1/4 03 3/8 04 1/2 Foot bracket ( VEX312 and VEX332 only) F N* Pilot exhaust (PE) silencer Electrical entry Grommet L plug connector M plug connector DIN terminal G: Lead wire length 300 mm L: With lead

VQ4000

Electrical entry G Lead wire length 0.6 m Coil voltage 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC Grommet Body 5: Plug lead sub-plate H Lead wire length 1.5 m Function Nil Note 1) Standard (0.95 W) Y Note 2) Low wattage type (0.4 W) R Note 3) External pilot Seal 0 Metal seal 1 Rubber seal Sub-plate Note 1) When the unit is energized

3 Port Solenoid Valve Series VQZ100/200/300 Single Unit [Option]

Coil voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC Electrical entry MO: M-type plug connector without connector M: M-type plug connector with lead wire L: L-type plug connector with lead wire G: Grommet (DC specification) LO: L-type plug connector without connector With light/ surge voltage suppressor With

5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

Coil voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC Note) For applicable one-touch fitting and silencer models for this valve series, refer to page 978. Caution Use standard (DC) specification for continuous duty. 913

Compact Vacuum Ejector Series ZA How to Order Ejector Unit ZA1 1 07 K1 P1 5 L 0 1 Nozzle nominal size Vacuum (V) port 05 ø0.5 Part no. Symbol Applicable tubing O.D. 07 ø0.7 KJS23-M5 ø3.2 (Straight) 1 Solenoid valve combination (Refer to Table (1).) KJS04-

Symbol 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC With pressure sensor (0 to 101 kPa, accuracy 2% F.S.) With pressure sensor (0 to 101 kPa, accuracy 1% F.S.) With pressure sensor (100 to 100 kPa, accuracy 2% F.S.) With pressure sensor (100 to 100 kPa, accuracy 1% F.S.)