temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG100Compressed air0.3 to 1.0 5 to 50 5 to 50 20119010001900.72525251 L/min [ANR] {In

temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60Compressed air0.3 to 1.0 5 to 50 5 to 50 207256001250.72525251 L/min [ANR] {In case

air pressure (MPa)Inlet air temperature (oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75HCompressed air0.3 to 1.0 5 to 50 5 to 50 15830750800.72525251

Valve Replacement Parts: Pilot Valve

JSY3000 SY30V-25AS JSY5000 SY50V-25A Nil Standard a-side pilot valve T With power saving circuit (Made to Order) Plug-in Pilot cover x 1 + B tight at head screw x 1 Rated voltage Pilot cover w 5 24 VDC 1 Socket q Caution w 1. The coil specication and voltage (including light/ surge voltage suppressor) cannot be changed by changing the pilot valve assembly. 2.

Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchangevalue (Pulse width: 50 ms) Note 1)Note 2) Display unitsAccumulated flow range Note 3)Linearity Note 4)Repeatability Note 4)Temperature characteristicsCurrent consumption (No load)WeightOutput Note 5)specificationsResistanceIndicator lightStatus LED?

Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchangevalue (Pulse width: 50 ms) Note 1)Note 2) Display unitsAccumulated flow range Note 3)Linearity Note 4)Repeatability Note 4)Temperature characteristicsCurrent consumption (No load)WeightOutput Note 5)specificationsResistanceIndicator lightStatus LED?

Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchangevalue (Pulse width: 50 ms) Note 1)Note 2) Display unitsAccumulated flow range Note 3)Linearity Note 4)Repeatability Note 4)Temperature characteristicsCurrent consumption (No load)WeightOutput Note 5)specificationsResistanceIndicator lightStatus LED?

Note 1)Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchangevalue (Pulse width: 50 ms) Note 1)Note 2) Display unitsAccumulated flow range Note 3)Linearity Note 4)Repeatability Note 4)Temperature characteristicsCurrent consumption (No load)WeightOutput Note 5)specificationsResistanceIndicator lightStatus LED?

air pressure (MPa)Inlet air temperature (oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60SACompressed air0.3 to 1.0 5 to 50 5 to 50 607550250.72525251

air pressure (MPa)Inlet air temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG30ACompressed air0.3 to 1.0 5 to 50 5 to 50 20360300600.72525251

air pressure (MPa)Inlet air temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG10Compressed air0.3 to 0.85 5 to 55 5 to 55 20125100250.72525251

temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60Compressed air0.3 to 1.0 5 to 50 5 to 50 207256001250.72525251 L/min [ANR] {In case

temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case

temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case

temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG100Compressed air0.3 to 1.0 5 to 50 5 to 50 20119010001900.72525251 L/min [ANR] {In

temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60Compressed air0.3 to 1.0 5 to 50 5 to 50 207256001250.72525251 L/min [ANR] {In case

temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60Compressed air0.3 to 1.0 5 to 50 5 to 50 207256001250.72525251 L/min [ANR] {In case

temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case

AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AS-FG AS-FG AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

AS

Note) AS-FP Metric size Inch size Meter-out Meter-in 0 1 01 02 23 2 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 03 05 07 09 11 13 AS-FM 04 06 08 10 12 AS-D AS-T With One-touch fitting ASP Thread type M3 Port size Note) For applicable tubing O.D. selection, refer to the Model on page 484. Use 1/8" tube.