IDX-OM-U010

Coefficient factors Inlet air temperature (oC) 35 40 45 50 55 60 65 70 75 80 1.58 1.46 1.09 1.00 0.79 0.64 0.55 0.51 0.49 0.47 Inlet air pressure (MPa) 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 to 1.6 0.67 0.79 0.88 0.91 1.00 1.02 1.04 1.09 Ambient temperature (oC) 20 25 30 35 40 45 1.19 1.13 1.06 1.00 0.90 0.77 Calculation example: The air flow capacity when the dew point of IDFC60 is set to 10 oC

IDX-OM-W095

0.9m 3/min 1.6m 3/min 2.2m 3/min 3.1m 3/min 0.7MPa 50 oC 35 oC () 230V (50Hz) 10% (3) (4) 1.0kW 1.6kW 2.4kW 2.8kW (4) 5.5A 8.0A 13.0A 14.0A 30mA (5) 10A 15A 20A 30A R410A (HFC) GWP:2088 (6) 39010g 53010g 63010g 78010g 0.1MPa 12mm R1 R1 1/2 R2 49kg 68kg 95kg 110kg 1 2 1 2[3275%] 3 4 5R 30mA 6IPCC4 AR4 R410A GWP2090 7L V1.6MPa IDFC60/70/80/90 Series 7-1 IDX-OM-W095 oC 35 40 45 50 55

IDX-OM-V020

Coefficient factors Inlet air temperature (oC) 5 to 25 30 35 40 45 50 55 60 65 1.42 1.15 1.00 0.71 0.62 0.50 0.40 0.33 0.21 Inlet air pressure (MPa) 0.3 0.4 0.5 0.6 0.7 to 1.6 0.71 0.75 0.82 0.89 1.00 Ambient temperature (oC) 2 to 25 30 35 40 45 1.0 0.85 0.80 0.73 0.62 Calculation example: The air flow capacity when the dew point of IDFA60 is set to 10 oC under the following conditions <

PSxx-OMR0001CN

44No.PS-OMR0001CN-J 4 (1)(100 kPa200 kPa) (2) () (1) (2) 1 () (3) -45No.PS-OMR0001CN-J 4 2 [F 0] [F] 2 2 [][] 2 F 0(Unit) [ PA] kPa 47 ISA3-F[ 20] ISA3-G[ 50] ISA3-H[ 50] F 1(oUt1) OUT1 48 ISA3-F[ 3] ISA3-G[ 20] ISA3-H[ 20] [ SoG] ON OFF F 2(oUt2) () [ ---] 50 F 6( FSt) [ 0.0] 0.0 51 F10( SUb) [ LEvEL] 52 F80( dSP) OFF [ on] () 53 F81( Pin) [ oFF] 54 F90( ALL) [ oFF] 55

Digital Gap Checker

Hysteresis Display colour [ SoG] Green when ON, Orange when OFF out2: [ Ewin] Output mode OUT port side pressure detection Window comparator mode Reversed output 2ot: [ 2_P] Normal output F 2 (oUt2) OUT2 setting Page 52 EPL: [ 25] kPa Pressure setting EPH: [ 50] kPa Hysteresis EH: [ 5] kPa Response time rES: [ 1000] F 6 ( FSt) Display value compensation [ 0.0] Compensated value: 0.0 Page 55

PSxx-OMT0001CN

(1) OUT1 (2) OUT1 1 () (3) OUT2 (4) [F 2](52 ) OUT [EPH] OUT [EPL] (5) -47No.PS-OMT0001CN-E 4 2 [F 0] [F] 2 [Function ][]] F 0(Unit) [ PA] kPa 49 ISA3-F[ 20] ISA3-G[ 50] ISA3-H[ 50] F 1(oUt1) OUT1 50 ISA3-F[ 3] ISA3-G[ 20] ISA3-H[ 20] [ SoG] ON OFF out2[ Ewin] OUT 2ot[ 2_P] F 2(oUt2) OUT2 52 EPL[ 25] kPa EPH[ 50] kPa EH [ 5] kPa rES[ 1000] F 6( FSt) [ 0.0] 0.0 55

Fluid: air/inert gas, Operating pressure range: 0.15 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal 36.0 (2.0); 2 position rubber seal 39.6 (2.2) 3 position metal seal 19.8 - 36.0 (1.1 - 2.0); 3 position rubber seal 21.6 - 39.6 (1.2 - 2.2), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W: metal seal 12 or less to 55 or less; rubber seal 15 or

Fluid: air/inert gas, Operating pressure range: 0.15 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal 36.0 (2.0); 2 position rubber seal 39.6 (2.2) 3 position metal seal 19.8 - 36.0 (1.1 - 2.0); 3 position rubber seal 21.6 - 39.6 (1.2 - 2.2), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W: metal seal 12 or less to 55 or less; rubber seal 15 or

Fluid: air and inert gas, Operating pressure: 0.1MPa to 1.0MPa, Effective area (Cv): 1.7 to 3.6, Coil rated voltage: 100, 200 VAC 50/60Hz; 24VDC, Response time: 55 or less ms, Ambient/fluid temp: -10 to 60 C, VALVE DBL NON PLUG-IN BASE MT, VALVE, VFS4000 SOL VALVE 4/5 PORT, 2F, VFS4000, 1.98416 lb

10% or less) (With power supply polarity protection)55 mA or less (Not including the current consumption of the sensor)Same as [Power supply voltage]Max. 110 mA (However, the total current for the 4 inputs is 440 mA maximum or less.)1 to 5 VDC (Input impedance: Approx. 800K )No. of inputsInput protectionSwitch output(Real-time switch output, Accumulated switch output)Switch output(Real-time

monitor separation, which allows remote monitors' centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication also on the sensor., Fast response: either 50 ms, 0.5s, 1, or 2s can be chosen., Easy connection and removal of wiring., 2-Color Digital Flow Switch for Air, DIGITAL FLOW SWITCH, F29, 55

Compact and light weight., Digital 2 color indication., Elbow piping can be used., Integrated flow adjustment valve., Several combinations are possible., Different mounting methods are possible., 2-Color Digital Flow Switch for Air, DIGITAL FLOW SWITCH, F29, 55 lb

Compact and light weight., Digital 2 color indication., Elbow piping can be used., Integrated flow adjustment valve., Several combinations are possible., Different mounting methods are possible., 2-Color Digital Flow Switch for Air, DIGITAL FLOW SWITCH, F29, 55 lb

Compact and light weight., Digital 2 color indication., Elbow piping can be used., Integrated flow adjustment valve., Several combinations are possible., Different mounting methods are possible., 2-Color Digital Flow Switch for Air, DIGITAL FLOW SWITCH, F29, 55 lb

Compact and light weight., Digital 2 color indication., Elbow piping can be used., Integrated flow adjustment valve., Several combinations are possible., Different mounting methods are possible., 2-Color Digital Flow Switch for Air, DIGITAL FLOW SWITCH, F29, 55 lb

Compact and light weight., Digital 2 color indication., Elbow piping can be used., Integrated flow adjustment valve., Several combinations are possible., Different mounting methods are possible., 2-Color Digital Flow Switch for Air, DIGITAL FLOW SWITCH, F29, 55 lb

Fluid: air/inert gas, Operating pressure range: 0.15 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal 36.0 (2.0); 2 position rubber seal 39.6 (2.2) 3 position metal seal 19.8 - 36.0 (1.1 - 2.0); 3 position rubber seal 21.6 - 39.6 (1.2 - 2.2), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W: metal seal 12 or less to 55 or less; rubber seal 15 or

Standard parallel type air gripper, Bore sizes from 10mm to 40mm, Double acting and Single acting available, Auto switch capable, Improved rigidity of guide rail, Gripper, MHZ, Parallel Style Air Gripper, GRIPPER, C58, 55 lb

Standard parallel type air gripper, Bore sizes from 10mm to 40mm, Double acting and Single acting available, Auto switch capable, Improved rigidity of guide rail, Gripper, MHZ, Parallel Style Air Gripper, GRIPPER, C58, 55 lb

Compact and light weight., Digital 2 color indication., Elbow piping can be used., Integrated flow adjustment valve., Several combinations are possible., Different mounting methods are possible., 2-Color Digital Flow Switch for Air, DIGITAL FLOW SWITCH, F29, 55 lb