SMC Corporation of America
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Note 3) This data is considered typical but not guaranteed. 10Leakage test result 100 5 10 Time [min] e e a a l l k k w w 2 a a 1 O-ring seals separate vacuum and atmosphere. Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. o o g g L L e e Static O-ring seals are used for all the seals between vacuum and atmosphere.

IE S XAH7 depth XL (mm) MLGPM, MLGPL common dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL P

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 16 16 16 12 15 15 44 50 56

Confirm that this value is less than 1/20 of the effective torque. 20 x 9.8 x (m1 + m2) x H/1000 20 x 9.8 x (0.07 + 0.05) x 10/1000 = 0.24 Graph 3 K x (a + b + 12h) x (m1 + m2)/(12 x 10) IR = 2 x (20 + 30 + 12 x 10) x (0.07 + 0.05)/(12 x 10) (K = 2: Safety factor) =

2H9 +0.025 0 J 2 P (finger closing port) G I Auto switch mounting groove positions (2 locations) MHS2-16D MHS2-20D MHS2-25D 5 6.5 5 3 24 5 3 24 6 3 5 4.5 24 4 4 4 33 33 33 (mm) I 4 5 5 Model MHS2-16D MHS2-20D MHS2-25D G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H

Air cooling after cooler Auto drain Operation Principles Air inlet Heat exchanger Air outlet Drain separator Drain outlet Capacity regulating valve Condenser Capillary tube Pressure switch Fan motor Evaporation thermometer Compressor 2 Stainless Steel Heat Exchanger Type Air Dryer Series IDUS IDUS3E, 4E, 6E Evaporation thermometer G H Illumination switch J K Draft air outlet A B D E Power

Stop 5 Series REA Sine Rodless Cylinder Dimensions (mm) REA 25, 32, 40 1in = 25.4mm Effective thread depth J L 0 0.1 NN G 4-MM H G B 2Port size I X D NB NB T N K W N S + Stroke F NA F R ZZ + Stroke MM x J B D F G H I K L N NA NB NN Model Port size REA25 REA32 REA40 Rc(PT) 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc(PT) 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15

C H G F E D B A Port size Model J K 959 317 289 363 157 152 910 260 R 3/4 IDU11C/11D 571 580 30 70 1009 337 309 383 207 175 960 280 R 1 IDU15C : Power source 220 to 240VAC 7

Double clevis pin and double knuckle XC27 pin made of stainless steel 70C J Nylon tarpaulin XC29 Double knuckle joint with spring pin 110C K Heat resistant tarpaulin XC30 Front trunnion Max. ambient temperature for rod boot itself. XC35 With coil scraper Mounting Bracket Part No.

K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31 67.5 36 6 18 86 66 53 99 53 44 62 22 1/4 M5 19 20 32 15 11 36.5 81.5 40 8

flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6

flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG-80-2 90 257 117 65 11 114 110 83 104 39 9 13 XL-OMV0003 6.

(at 25C) Input impedance Preset input type Approx. 4.7 k 1 to 5 VDC Output impedance: 1 k or more Output accuracy: 6% F.S. or less Analog output Symbol 4 to 20 mA (Sink type) Output impedance: 250 or less Output accuracy: 6% F.S. or less Note 3) Output signal (Monitor output) NPN open collector output: Max. 30 V, 80 mA Hysteresis: 3% F.S.

20 24 27 27 33 19 20.5 20.5 27 27 27 34.5 34.5 43.5 52 52 60 86 D-X Technical Data 1147 JA Series Foot Type: JAL20 to JAF160 JAL20 to 100 Center of sphere 2 x J R JAL125 to 160 4 x J Center of sphere R (mm) Maximum operating tension and compression force (N) Applicable bore size (mm) Model Pitch Nominal size Center of sphere R Allowable Maximum thread depth P M A Weight (kg) B C D E F K

LTF8F-K Symbol 2H 3H 2V 3V Motor capacity 100W 200W 100W 200W 1) 1) 2) 2) Note 2) Be sure to use a regenerative absorption unit (LC7R-K1A) with this controller (with brake).

. * When the electrical entry is DO or YO, light/surge voltage suppressor cannot be selected. 7 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series Dimensions Grommet: AVm00-m-mGmm-m-A Approx. 300 mm (Lead wire length) A G J E 36.5 Manual override Pressure gauge port size 1/8 C B Pressure gauge (Option) 2(A) 1(P) 37.5 Bracket (Option) T M N P X Built-in silencer (Option) 3(R) Q S L K

Heat generation amount Q : Unknown : 1.0C (1.0 K) : 20C (293.15 K) : 21C (294.15 K) : 7 L/min :Water : Density : 1 x 103 kg/m3 Circulating fluid temperature difference T (= T2 T1) Circulating fluid outlet temperature T1 Circulating fluid inlet temperature T2 Circulating fluid flow rate L Circulating fluid : Specific heat C: 4.2 x 103 J/(kgK) T1: Outlet temperature Q = T x L x x C 60 x 1000

x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x 16 M8 x 1.25 x