AXTS-OMY0007

Configuration symbol P 6 5. Piping method P 7,8 6. Frequency adjustment P 9,10 7. Mounting P 11 8. Environment P 11 9. Lubricant oil P 11 10. Air source P 11 -2 - Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

MX-OMP0051

6 6 5 MXQ25(A) 9 9 9 5.5 2 45 3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5 5.5 MXQ20(A) 5.5 5 MXQ25(A) 10 8.5 ON 14 2-9 3mm 3mm 2-10 5~6mm 0.05~0.15Nm 90 ( ) 15 D-M9M9W A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 0 0.6 3.6 5.6 5.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 5.1 5.1 5.1 11.1 28.1 5.1 MXQ12(

CE

6-1 11 11 DC12V DC24V DC12V24V CEU5 CEU5 MODE 2 90 CEU5 4 10,11 SMC 13 CEU5 13 23m 23m () CEU5 11 AC 10 70500mm/s 12 6-2 5,6, 12 5 5,12 10 ?

11-cq2-e

6. CQ2B25-T-PS CQ2B40-T-PS CQ2B32-T-PS CQ2B50-T-PS Seal kit includes !4, !5, !6. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately.

Series CQ2

Consult SMC if switches are used where there are temperature cycles other than normal temperature changes, as there may be adverse effects inside the switches. 6. Do not use in an environment where there is excessive impact shock.

IR1000/2000/3000

Standard part number X1 Clean room specifications Specifications Non-grease specifications Cleanliness Bleed port Class 10 With M5 fitting (applicable tube O.D. 6) Manifold Specifications (except type IR2120 and series IR3000) 6 IR1000/2000: M5 fitting (applicable tube O.D. 6) IR3000: Rc(PT) 1/2 female thread EXH port Grease Teflon grease 2 to 8 station manifold type regulators.

MLGC

6 !7 !8 !

TA301

Function plate (DXT060-32-4A) 6 Valve Functions Available by Changing of Piping Port 3 port N.C. 3 port N.O. 2 port N.C. 2 port N.O.

Cylinder with Lock Series CLS

Also when switches are shipped separately, BBA1 is included with them. 35 + 30 (n 2) 110 + 30 (n 2) n = 2, 4, 6, 8 ... Different side "n" pcs. 100 + 10 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 ... Same side 15 110 1pc. 35 110 Different side 2pcs. 55 110 Same side D-A44 35 + 30 (n 2) 110 + 30 (n 2) n = 2,4,6,8...

Rodless Cylinder for Vacuum Series CYV ø15, ø32

4 #6 !5 !1 !9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

Dual-Rod Cylinder Series CXS

CXSJ 6, 10 Standard Type Series CXS 6, 10, 15, 20, 25, 32 New New With Air Cushion Series CXS 20, 25, 32 W With End Lock Series CXS 6, 10, 15, 20, 25, 32 Dual-Double-Rod Type Series CXSW 6, 10, 15, 20, 25, 32 Auto Switches Made to Order

Low Friction Cylinders Metal Seal Type

standard only) 10 16 20 25 MQML Standard type 6: 0.02 to 0.7 0.5 to 1000 10 to 25: 0.005 to 0.7 5 to 3000 MQMLH 0.01 to 0.7 High speed/frequency Features 1 Application Examples (Metal Seal Type) /10, 16, 20, 25, 30, 40 /6, 10, 1 6, 20, 25 For pressure controling with fine pressure variations Applicable models: MQQT/MQML Scrubber resistance enables to cover the range of a driving were not

One-touch installation and removal Series DM

(d) 1.6 3 1.6 3 DM6-04N DM6-06N DM6-04NU DM6-06NU DM12-04N DM12-06N DM12-04NU DM12-06NU 5 29 6 31 71

Magnetic Rodless Cylinder Series CY1

10 15 20 25 32 40 50 63 CY1B Basic type Non-integrated guide 6 10 15 20 25 32 40 50 63 Basic type Direct mount CY1R Magnetic rodless cylinder 6 10 15 20 25 32 40 Slide bearing type CY1S 6 10 15 20 25 32 40 Ball bushing type CY1L Integrated guide 10 15 20 High precision guide type CY1H 25 (1 shaft) 25 (2 shafts) 32 Bilateral piping Centralized piping The piping type for CY1R6 is bilateral

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 SGDE servo pack R U V 2 1MC M T 3 W 1CN 4 150 1 2 3 4 5 6 PULS PULS SIGN SIGN CLR CLR Be sure to ground.

Sine Rodless Cylinder Series REA

SN-032B SN-040B Applicable bore size (mm) 25, 32 40 8 M26 x 1.5 32 37 11 M32 x 2.0 41 47.3 H B 6

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

N.C. 3 2 1 11 11 IN port 3 x M6 x 1,1/4-28UNF OUT port (LVM13R,14R) 6 Plug (2) 5 11 6 2 (COM) port (LVM115) Plug (LVM16R) 10 1 (N.C) port 3 (N.O) port 13 For LVM115 2 x M3 Thread length 5 The broken lines indicate the bracket type. For direct mounting 6

Series LQ3 High Purity Fluororesin Fitting

6 6 Tubing Size (Inch) 1/8 x 0.086 1/4 x 5/32 1/4 x 5/32 3/8 x 1/4 3/8 x 1/4 3/8 x 1/4 1/2 x 3/8 1/2 x 3/8 1/2 x 3/8 3/4 x 5/8 3/4 x 5/8 3/4 x 5/8 1 x 7/8 1 x 7/8 1 x 7/8 Thread Size A A B A B C A B C A B C A B C 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" Tubing Connection E 1A LQ3 Size Combination Class Fitting Style Symbol E T P U Combination 1 2 3 4 5 6 Tube

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

ZFB 6

ZK2-C

ON ON A (/) 1 OFF OFF DC(+)DC(-) 2 ON DC(+)DC(-) NPN PNP () 3 OFF ( ) () DC(+) DC(-) () 4 () 5 -47NO.ZK2-OM00801-B No. 80 mA (Er1,2) () ( (Er1,2) ) (Er0,4,6,7,8,9) DC24 DC24 V10% (Er0 4 6 7 8 V10% 9) 6 "HHH" (HHH) "LLL" (Er3) (LLL) (Er3) 3.5 F.S. DC24 V10% DC24 V10% DC(+) DC(-) 7 -48NO.ZK2-OM00801-B No.