Pilot Operated

Operating Fluid and Ambient Temperature Tightness of Valve (Leakage Rate) Leakage rate (Air) Operating fluid temperature (C) Solenoid valve option Ambient temperature (C) Seal material Power source 1 4 to 1 32A to 50A Nil, G NBR, FKM 2 cm3/min or less 10 cm3/min or less 10 to 60 10 to 40 10 Note) to 60 10 to 60 AC DC Note) Dew point temperature: 10C or less 7 Pilot Operated 2 Port Solenoid

CQS

10 12 16 20 5 6.5 8 10 14 15 18 20 7 10 12 14 4 4 5 5 5 5 8 10 * Refer to P.2.3-18 for detail of the rod end nut and mounting brackets.

JXCx-OMT0002

JXC-OMT0002-C

Fieldbus system Analog unit

10 F9E8 8618 -31208 -10 -5 -20 F 8000 -32767 -10.5 -5.25 -21 Data format Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Sign MSB AD value LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Sign MSB AD value LSB -23No.EX-OMN0038-C Dimensions -24No.EX-OMN0038-C Analog output unit Model Indication and How to Order EX600-AY Analog output Connector and number of output channels Symbol

Cylinder with Lock

RR B C CZ CX h + l S + Stroke Z + Stroke ZZ + Stroke Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) Stroke range (mm) 40 50 63 80 100 A AL B B1 BN BP BQ C CDH10 CX D E F GA GB GC GD GL GL1 GR H1 J K CZ H +0.058 0 +0.3 +0.1 Up to 500 30 27 60 22 96 1/8 1/8 44 10 29.5 16 32 10 85 15 50 16 12 12 10 8 M8 x 1.25 6 51 15 +0.070 0 +0.3 +0.1 Up to 600 35 32 70 27 108 1/4 1/8 52 12 38 20 40 10

energy saving effect

Cooling Capacity HRSH100-A-20/40HRSH100-W-20/4014 16 Ambient temperature 32C Facility water temperature 32C 14 12 Cooling capacity [kW] Cooling capacity [kW] 10.5 10 11.5 12 10 Ambient temperature 43C 8 8 Facility water temperature 40C 6 6 Ambient temperature 45C 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH150

MQQ

Dd9 L d l m t 0.030 0.040 0.040 0.076 0.040 0.076 0.040 0.076 IY-J015 IY-G02 IY-G03 IY-G04 10 5 Type C 5 for axis 16.6 4.8 12.2 1.5 0.7 16 8 21 7.6 16.2 1.5 0.9 Type C 8 for axis 20 10 25.6 9.6 20.2 1.55 1.15 Type C 10 for axis 10 25, 28 41.6 9.6 36.2 1.55 1.15 Type C 10 for axis 10-5-16 16 Low Friction Cylinder: Anti-lateral Load Type Metal Seal Series MQM 6, 10, 16, 20, 25 How to Order

MQQ

Dd9 L d l m t 0.030 0.040 0.040 0.076 0.040 0.076 0.040 0.076 IY-J015 IY-G02 IY-G03 IY-G04 10 5 16.6 4.8 12.2 1.5 0.7 Type C 5 for axis 16 8 Type C 8 for axis 21 7.6 16.2 1.5 0.9 20 10 25.6 9.6 20.2 1.55 1.15 Type C 10 for axis 10 25, 28 41.6 9.6 36.2 1.55 1.15 Type C 10 for axis 10-5-16 16 Low Friction Cylinder: Anti-lateral Load Type Metal Seal Series MQM 6, 10, 16, 20, 25 How to Order

Dual Rod Cylinder Series CXSJ/CXS

A C Auto Switch Proper Mounting Position D-M9, D-M9W D-M9AVL D-A93 D-A90, D-A96 D-M9V, D-M9WV Bore size (mm) A B C D A B C D A B C D A B C D CXSJ15 to 32 B D 6 10 15 20 25 32 15.5 13.5 5.5 15.5 11 8 19.5 0.5 9.5 9.5 19.5 0.5 11.5 7.5 25.5 23.5 3 25.5 21 5.5 29.5 3 19.5 7 29.5 3 21.5 5 31.5 6 29.5 4 31.5 6 27 1.5 35.5 10 25.5 0 35.5 10 27.5 2 39 9 37 7 39 9 34.5 4.5 43 13 33 3 43 13 35

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Compound No. 1349-80 Symbol Nil N1 Leakage Pa m3/s or less Note 1) Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10

IDU/IDF

(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95

A_HEC-OM-I009

Therefore, if the target temp. is 23.0 C and 1.5 C is set in this item, the warning [WRN] arises when temp. lowers 21.5 C. 8. High Temp. Cutoff H i g h T e m p . Setting range : 11.0 to 70.0 C Min. increment : 0.1 C Indicated content : High temp. cutoff by internal temp. C u t o f f M O D E < 7 0 . 0 C sensor (Ex. : 70.0 C).

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Mounting bolt M3 x 45L M3 x 55L M3 x 60L M5 x 55L M5 x 60L M5 x 65L M5 x 60L M5 x 65L M5 x 70L Mounting bolt M5 x 75L M5 x 80L M5 x 85L M6 x 75L M6 x 80L M6 x 85L RSQB12-10 Note) RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20 RSQB40-20 -25 -30 RSQB50-20 -25 -30 7 9 Mounting bolt C D 9 Note) When using the through-hole mounting for a size 12 cylinder, be sure to use the flat washer which

NCA1

Auto switch capable Bore size Standard Stroke 1.50 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20 2, 2.50 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 3.25, 4 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 How To Order NC D A1 B 150 0400 A XC8 Adjustable Stroke Auto Switch Mounting Bore Stroke Adjustment Range A: 0~1 B: 0~2 Dimensions (in) Bore (in) MM KK A AA B C D DD E EA EE G K

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

B F H1 C M N BN AL B K A S + Stroke M H ZZ + Stroke With rod boot l 10.2 h + l ZZ + l + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C D E F GA GB GC GD GL GR H1 J Without rod boot With rod boot 40 Up to 500 20 to 500 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 50 Up to 600 20 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

2 (Different surfaces) 10 n 10 + 30 (n 2) 2 (Same surface) 50 D-A9l 1, 2 (Different surfaces) 10 n 10 + 40 (n 2) 2 (Same surface) 40 D-A9lV 1, 2 (Different surfaces) 10 n 10 + 30 (n 2) * n = 3, 4, 5 * The D-M9lV/M9lWV/M9lAV/A9lV are mountable on 32 to 63.

CJ5-S

Applicable bore size (mm) CX Applicable snap ring Applicable snap ring A1 NDH10 MM NX R1 U1 Dd9 t d L m Dd9 t d L m l l + 0.048 0 0.030 0.060 0.030 0.060 I-J010SUS 10 CD-J010 10 CD-J010 10 3.3 3.3 3.3 Type C 3.2 Type C 3.2 8 21 M4 x 0.7 3.1 8 9 3 15.2 12.2 1.2 0.3 3 15.2 12.2 1.2 0.3 CY 0.030 0.060 0.030 0.060 + 0.048 0 I-J016SUS CD-Z015SUS IY-J015SUS 16 16 16 5 5 5 Type C 5 Type C 5 8 25

CJ5-S

Applicable bore size (mm) CX Applicable snap ring Applicable snap ring A1 NDH10 MM NX R1 U1 Dd9 t d L m Dd9 t d L m l l + 0.048 0 0.030 0.060 0.030 0.060 I-J010SUS 10 CD-J010 10 CD-J010 10 3.3 3.3 3.3 Type C 3.2 Type C 3.2 8 21 M4 x 0.7 3.1 8 9 3 15.2 12.2 1.2 0.3 3 15.2 12.2 1.2 0.3 CY 0.030 0.060 0.030 0.060 + 0.048 0 I-J016SUS CD-Z015SUS IY-J015SUS 16 16 16 5 5 5 Type C 5 Type C 5 8 25

CRBU

18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except basic type.

HRL

2 to 45 Circulating fluid CH1: Tap water*1, Deionized water*9/CH2: Tap water*1, Deionized water Set temperature range C CH1: 5 to 35/CH2: 10 to 40 Cooling capacity*2 kW 9 1*8 19 1*8 26 1*8 Heating capacity*3 kW 1.5 1 4.0 1 6.0 1 Temperature stability*4 C CH1: 0.1/CH2: 0.5 Rated flow (Outlet pressure) L/min 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa