CRA1 CRJ U 05 90 E M9B S With external stopper CRQ2 Number of auto switches MSQ Nil S 2 pcs. 1 pc.
RS M W V T2 Applicable mounting bracket Bore size (mm) Weight (g) Joint 2D through 2O counter bore T1 B E J Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 25 50, 63 YU-05 YA-05 YB-05 40 Material: Precision die-casting material equivalent to stainless steel 304 80 YU-08 YA-08 YB-08 90 100 YU-10 YA-10 YB-10 160 Bore size (mm) O M J E D B Part no.
q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
|vF3l3O (B) (A) ' 0 1 c 2 Clo6td C.l49r rd d#{Ft ffi# E I S E 2 {R2XPXB1) Low power consumption -1.8WDc (F2)(P)(F1l NVF3S3O Exh.Bt C.ii.. i{VF3,(3O (B) (A) c1 c2 ryffTfl-TTrl,* Er\llt'lll/'Es) EI SE2 Pr.aqa ConL. NVF353O f l Operating prs6sur range 2 pGiEon singb 20 -129 PSI S(1.5 -gkgF) 2 pssition double-15-128 P$l (1 -gkgflcm'?)
Body Body e Acrylic Piston Indicator window e Polyacetal Plug Piston A r Polyacetal Spring r Polyethelene Spring t Stainless steel NBR Packing t Stainless steel NBR O ring Dimensions Dimensions Panel mounted hole 3.5-64
Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 230/50/60/1 Flow Rate: 43 LPM , 43 LPM, Max Pressure: 2.9 PSIG / 80 in H20 / 200 mbar , 2.9 PSIG / 80 in H20 / 200 mbar, Max Vacuum: 5.9 in HgV / -200 mbar , 5.9 in HgV / -200 mbar, Voltage (60 Hz): 230, Voltage (50 Hz): 230, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 8.15
Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 230/50/60/1 Flow Rate: 43 LPM , 43 LPM, Max Pressure: 2.9 PSIG / 80 in H20 / 200 mbar , 2.9 PSIG / 80 in H20 / 200 mbar, Max Vacuum: 5.9 in HgV / -200 mbar , 5.9 in HgV / -200 mbar, Voltage (60 Hz): 230, Voltage (50 Hz): 230, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 8.15
How to Order 1F 06 T 200 AS Flow Direction Symbols on Body Indication symbol Symbol Body size Tamper proof Note) Speed controller requires a special tool for flow adjustment. Order separately with part number, AS-T-1. 100 200 205 300 400 M5 standard 1/8 standard 1/4 standard 3/8 standard Made to Order (Refer to page 608 for details.) Applicable tubing O.D.
VCHC ASR ASQ ASD230F ASD330F ASD430F 100 200 400 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 07,08,09,10,11 300 06 200 50 100 100 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 12 10,11 10,11,12 08,09 1000 500 06,07 500 0 5 10 0 5 10
Seal kit includes a grease pack (125 to 160: 40 g, 180, 200: 50 g, 250: 60 g). Order with the following part number when only the grease pack is needed.
Rated voltage CE-compliant For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type CE-compliant For AC (50/60Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Electrical entry 24, 12, 6, 5, 3 VDC / 100, 110, 200, 220 VAC Grommet L plug connector M plug connector G: Lead wire length 300 mm L: With lead wire (Lead wire length 300 mm) M: With lead wire (Lead wire
300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) ARP Pressure Characteristics (Representative Values) IR-A IR Conditions: Inlet pressure 0.7 MPa Outlet pressure 0.2 MPa Flow rate Q = 20 L/min (ANR) 0.30 IRV Outlet pressure (MPa) 0.25 Set point VEX 0.20 SRH SRP 0.15 SRF 0.10 0.2 0.3 0.4 0.5 0.6 0.7
20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%
20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%
NCQ8B106-T-PS NCQ8B106-T-PS 106 (1 1/16") NCQ8B150-T-PS NCQ8B150-T-PS 150 (1 1/2") NCQ8B200-T-PS NCQ8B200-T-PS 200 (2") NCQ8B250-T-PS NCQ8B250-T-PS 250 (2 1/2")
AS Type adjustable by flat head screwdriver Body size 100 200 205 300 400 M5 standard Applicable tubing O.D. 1/8 standard Inch size Metric size 1/4 standard 3.2 3/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 1/2 standard 5/32" 4 3/16" 6 1/4" 8 With One-touch fittings 5/16" 10 3/8" 12 1/2" Use 1/8" tube. 15-9-81 8 Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet
How to Order 1F 06 D 200 AS Flow direction symbol on body Flat head screw driver adjustable type Body size 100 200 205 300 400 M5 standard Applicable tubing O.D. 1/8 standard Metric sizes 23 04 06 08 10 12 Inch sizes 1/4 standard 3.2 01 03 05 07 09 11 13 1/8 3/8 standard 4 5/32 1/2 standard 6 3/16 8 1/4 10 5/16 With One-touch fitting 12 3/8 1/2 Use 1/8 tubing.
Information End Lock Cylinder Series CBJ2 / 16 Cylinder stroke (mm) 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes are available in 1 mm increments without stroke adjustment with a spacer. For types with auto switch, refer to Minimum Strokes for Auto Switch Mounting on page 2.
16 16 16 L = 120mm L = 120mm L = 120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table displacement mm Table displacement mm Table displacement mm 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load N 150 100 50 200 250 Load N 150 100 100 400 500 Load N 300 200 3 Precision Air Slide Table