Slit Valve XGT Series

For 200 mm wafer For 300 mm wafer 529

to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VACSingle phase 170 to 253 VAC1.5Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.210 inputs6 outputs1 M (when differential receiver), 200 k (when open collector)0 to ?

Air Cylinder/With Auto Switch Series CDS1

Piston seal NBR Valve seal Non-lube Tube gasket CS1N125A-PS 125 140 160 180 200 CS1N125A-PS CS1N140A-PS CS1N160A-PS CS1N180A-PS CS1N200A-PS CS1N140A-PS Piston gasket Component part numbers: @8, #0, #1, #2, #3, #5.

Mechanically Jointed Rodless Cylinder Series MY1

300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Features 6

08-cds1-e

Piston seal NBR Valve seal Non-lube Tube gasket CS1N125A-PS 125 140 160 180 200 CS1N125A-PS CS1N140A-PS CS1N160A-PS CS1N180A-PS CS1N200A-PS CS1N140A-PS Piston gasket Component part numbers: @8, #0, #1, #2, #3, #5.

Shot Pin Cylinder

Deflection + L F F (Dimension when extended) + M Built-in coil scraper and Lube-retainer MAllowable lateral load graph MSelectable proximity switches CKZP57L TURCK P&F 400 Allowable lateral load [N] 350 300 250 200 MAdjustable connector angle 150 100 CKZP57L: 45, 90 CKZP71: 0, 45, 90 50 0 0 50 100 150 200 250 Offset distance L [mm] CKZP71 0 50 100 150 200 250 300 350 400 450 500

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Spring Return/Double ClevisType (D) r.rclzol e*" "iaF] srotd s Clevis pin included 2A I @sil/tr SERIES NCJ2 Standard Type: Single Acting/ Spring Extend Spring Extend/Basic TYPe (B) r.rcrze [E-" "izel-lst t"l r NCJ2B10, 16 '06 (1i4') e 16 (Y8") Spring Extend/Foot TyPe (L) nc.

Vacuum Pad: Ball Joint Type

Q 8 3 5 Y Applicable tubing O.D.Q R R F F Hexagon width across flats 12 Hexagon width across flats 10 Hexagon width across flats 2 E Hexagon width across flats 3 E D C D C 2 2 A A B B Dimensions A Dimensions A (mm) B (mm) B C D E F Y C D E F N Model Model ZPR10F-0-B5 ZPR20F-0-B5 10 12 10 12.5 23.4 39.5 1.5 M5 x 0.8 20 22 ZPR13F-0-B5 ZPR20F-0-B8 13 15 M8 x 1.25 23.9 12.5 15.5 29.3 46.5 10.5

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, COMPACT GUIDE, SLIDE BRG, ACTUATOR, MGP COMPACT GUIDE CYLINDER, NM, 50MM MGP SLIDE BEARING, .00000 lb, Bore size (mm)ModelStandard stroke (mm) 1020253040507510012515017520025030035040050MGPM50??3.36??4.004.735.376.016.657.297.939.5410.812.113.4

CP96, profile design ISO cylinder with enclosed tie rods, is available in 6 bore sizes from ø32 to ø125mm.  High accuracy covers and tie rod nuts improve mounting accuracy and extend the cylinder life.  Increasing the precision of the bushing and piston rod, as well as reducing tolerances, has decreased the deflection of the piston rod.  Standard strokes range from 25 to 800mm.Double Acting

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

Spring Return/Double ClevisType (D) r.rclzol e*" "iaF] srotd s Clevis pin included 2A @sil/tr I SERIES NCJ2 Standard Type: Single Acting/ Spring Extend Spring Extend/Basic TYPe (B) r.rcrze [E-" "izel-lst t"l r NCJ2B10, 16 '06 (1i4') e 16 (Y8") Spring Extend/Foot TyPe (L) nc.

Electro-Pneumatic Positioner

R 22.5 1 E 125 At accessory E: 110 At accessory F: 110 { } 5 150 Approx.194 125 G1/2 Electric conduit 35 At accessory E: 195 At accessory F: 275 { } 4 x M8 x 1.25 depth12 (Female thread for rear mounting) With optional resin cable clamp Applicable cable O.

ZP

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

Air Cylinder CP Series Cylinder Positioner Assembly

Parenlneses CPA1 BN do Boot with Boot' BORE D E G'GB J K M MM N P H z.

Electro-Pneumatic Positioner Series IP8000/8100

R 22.5 1 E 125 At accessory E: 110 At accessory F: 110 { } 5 150 194 125 G1/2 Electric conduit 35 At accessory E: 195 At accessory F: 275 { } 4 x M8 x 1.25 depth12 (Female thread for rear mounting) With optional resin cable clamp Applicable cable O.

Series LQ3 High Purity Fluororesin Fitting

W M L H E W M 10 14 18 22 30 36 14 20 25 29 37 49 46.5 57 79 88 103 122 11 16 21 24 32 41 10 17 22.5 24.5 27 30 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3U1A LQ3U2A LQ3U3A LQ3U4A LQ3U5A LQ3U6A 1/4 (E) (E) L

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

W L E Panel mount adapter With waterproof cover ZS-35-B ZS-46-5F * For the lead wire with M12 connector, refer to p. 38.

SJ3A6

y U side e SUP block disk assembly (Release pressure side) EXH block disk assembly (Vacuum pressure side) w e q r D side Component Parts / Plug-in Note Part no.

rep-filter-e

Since the PTFE seal is used for element e, a certain amount of force is needed to set the element. Set the element in the following procedure. Handle element e carefully to keep it clean, for example, open the element package only when the element is mounted. a. Fit the grooved part of gasket w into the flange part of case q. b. Place element e in case q.

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Parenlneses CPA1 BN do Boot with Boot' BORE D E G'GB J K M MM N P H z.