Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min;
Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: 1T (Out 1: Analog 1 to 5 V; Out 2: Flow Rate: None; Temp.: Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector)
Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: CT (Out 1: NPN; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: G (Remote Sensor: L/min/gal/min; °C; Integrated Display: gal/min; Accumulated Flow: gal; Temp.: Â
Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit Port status (PQI) details Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 Byte n PQ DevDevCom DSStatus CQPwrPDmappingIDErr Short Short Mismatch Mismatch Bit Description Details Value 0 IDMismatch Connection device matching error 0: Match 1: Mismatch 1 PDmappingMismatch Process data mapping size error 1 0: Set size or less 1: Exceeding size 2 PwrShort L+ short circuit or P24 short circuit
Grommet terminal, Conduit terminal, DIN terminal 1 (P) 3 (R) Note 1) Use dry-air at low temperature.
10)W = 51n + 81, .41446 lb, ModelApplicable valveManifold typeP (SUP)/R (EXH)Valve stations Note)A, B port locationPort sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X7-20SX7 20Single base/B mountCommon SUP/Common EXH2 to 20 stationsValveRc 1 4Rc 1 4C8 (One-touch fitting for ?8)C10 (One-touch fitting for ?10)W = 51n + 81
10)W = 51n + 81, .89948 lb, ModelApplicable valveManifold typeP (SUP)/R (EXH)Valve stations Note)A, B port locationPort sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X7-20SX7 20Single base/B mountCommon SUP/Common EXH2 to 20 stationsValveRc 1 4Rc 1 4C8 (One-touch fitting for ?8)C10 (One-touch fitting for ?10)W = 51n + 81
sizeManifold base weight W (g) n: StationsApplicable flat ribbon cable connectorInternal wiring (2)Rated voltageP, EA, EB portA, B portSS5X3-41PSX3 40Single base/B mountCommon SUP/Common EXH4 to 12 stationsLocationDirectionRc 1 8M5 x 0.8C4 (One-touch fitting for ?
Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 10 (1), Output Specification/Temperature Sensor: 1T (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: Analog 1 to 5 V; Temperature Sensor: w/Temperature Sensor), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: Instantaneous Flow: L/min, Temperature:
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: 1T (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: Analog 1 to 5 V; Temperature Sensor: w/Temperature Sensor), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: Instantaneous Flow: L/min, Temperature
sizeManifold base weight W (g) n: StationsApplicable flat ribbon cable connectorInternal wiring (2)Rated voltageP, EA, EB portA, B portSS5X3-41PSX3 40Single base/B mountCommon SUP/Common EXH4 to 12 stationsLocationDirectionRc 1 8M5 x 0.8C4 (One-touch fitting for ?
6)W = 37n + 63, .41887 lb, ModelApplicable valveManifold typeP(SUP)/R(EXH)Valve stations Note)A, B Porting specificationsPort sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X3-42SX3 40(R)Single base/B mountCommon SUP/Common EXH2 to 20 stationsBaseSideRc 1 8Rc 1 8C4 (One-touch fitting ?4)C6 (One-touch fitting for ?6)W = 37n + 63
10)W = 51n + 81, .41446 lb, ModelApplicable valveManifold typeP (SUP)/R (EXH)Valve stations Note)A, B port locationPort sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X7-20SX7 20Single base/B mountCommon SUP/Common EXH2 to 20 stationsValveRc 1 4Rc 1 4C8 (One-touch fitting for ?8)C10 (One-touch fitting for ?10)W = 51n + 81
10)W = 51n + 81, .70547 lb, ModelApplicable valveManifold typeP (SUP)/R (EXH)Valve stations Note)A, B port locationPort sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X7-20SX7 20Single base/B mountCommon SUP/Common EXH2 to 20 stationsValveRc 1 4Rc 1 4C8 (One-touch fitting for ?8)C10 (One-touch fitting for ?10)W = 51n + 81
10)W = 51n + 81, .66138 lb, ModelApplicable valveManifold typeP (SUP)/R (EXH)Valve stations Note)A, B port locationPort sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X7-20SX7 20Single base/B mountCommon SUP/Common EXH2 to 20 stationsValveRc 1 4Rc 1 4C8 (One-touch fitting for ?8)C10 (One-touch fitting for ?10)W = 51n + 81
10)W = 51n + 81, 1.19717 lb, ModelApplicable valveManifold typeP (SUP)/R (EXH)Valve stations Note)A, B port locationPort sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X7-20SX7 20Single base/B mountCommon SUP/Common EXH2 to 20 stationsValveRc 1 4Rc 1 4C8 (One-touch fitting for ?8)C10 (One-touch fitting for ?10)W = 51n + 81
Mounting Position Circuit Diagram T r u n n i o n . , . . . . . . . . 9 Accessories. . 10 How To Order N CTJP ffi-ffi 1 L_10 ft. tead wire I $.rihh Suffix With two switches S-With one switch + x1,4" Stroke: S type only sribh Type 90D-90( 1.5 ft. tead wire) Wr|h Auto $Yitch Ca (built in rnagnet) goaD-90A 97D-97 93AD!
INDEX Precautions for Safety Front matter 1. Product Description 1 1-1 Model 1 1-2 Specifications 1 1-3 Effective Torque 2 1-4 Key (Keyway) Position and Rotation Range 2 2. Internal Construction and Description of Individual Parts 3 2-1 Single Vane Type 3 2-2 Double Vane Type 4 3. Basic Circuit 5 3-1 Circuit Configuration 5 3-2 Preferred Components 5 4.
Tube I.D.: 5 mm 5 5 4 4 Discharge time [s] Discharge time [s] 3 3 0.05 MPa 0.05 MPa 2 2 0.1 MPa 0.3 MPa 1 1 0.1 MPa 0 0 0 100 200 300 400 500 0 100 200 300 400 500 Tube length [mm] Tube length [mm] Maximum operating pressure is 0.1 MPa. Note 1) Maximum operating pressure is 0.3 MPa. Note 1) Note 1) Refer to Cautions when using the IZN10-11(female threads for piping) on page 448.