VT301-OMP0001

1.. 2. 3. 1. 2. 3. 4. 2 VT301-0MP0001 / / / / 1 1 1 1 1 1 1 1.5 .5 .5 .5 *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () 3 VT301-0MP0001 VTA301 VTA301 VTA301 VTA301 3 3 3 3 / / / / / / / / -10 1 Nm Rc1/8 79 Rc1/4 1214 1224 1/8 1 21 ISO VG32 MSDS 2 ISO VG32 4 VT301-OMP0001 VTA301 VTA301 VTA301 VTA301 3 3 3 3 / / / / 30 1 1 ISO VG32 2 ISO VG32 5m 5 VT301-OMP0001 VTA VTA VTA VTA301 301 301 301 R 6

08-cg1r-e

Grease pack part no.: GR-S-010 (10 g) 23

11-cukw-e

Grease pack part no.: GR-S-010 (10 g) 56

Clean Room Regulator/Fluoro Resin Type Series SRF30

2 w !2 Parts list !3 No.

AS-FG

TMH Option Type With One-touch fitting Nil S None With seal ASD 2 3 Elbow Universal Stainless steel specifications (SUS303) M5 and U10/32 are not available with seal. AS Thread type Applicable tubing O.D.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

Flow Direction Symbols on Body How to Order Meter-out type Meter-in type Indication symbol 2 1 01 06 2 AS 1 F E S K Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Symbol Applicable tubing O.D.

AS_FS Inline

Made to Order How to Order 2 1 F 06 200 AS S Lubricant: Vaseline -X12 Example) AS2002FS-04-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Applicable tubing O.D.1 Example) AS2002FS-04-X21 Not particle-free Metric size Inch size 23 3.22 04 4 06 6 08 8

MPa(G): 0.5, Leakage Pa•m3/s: Internal: 1.3 x 10-9 External: 1.3 x 10-11 , Internal: 1.3 x 10-9, External: 1.3 x 10-11, Connection Size: VVMW-2: 1/8 Female NPT / Face Seal VVMW-3: 1/4 Female NPT / Face Seal VVMW-4: 3/8 Female NPT / Face Seal , VVMW-2: 1/8 Female NPT / Face Seal, VVMW-3: 1/4 Female NPT / Face Seal, VVMW-4: 3/8 Female NPT / Face Seal

MPa(G): 0.5, Leakage Pa•m3/s: Internal: 1.3 x 10-9 External: 1.3 x 10-11 , Internal: 1.3 x 10-9, External: 1.3 x 10-11, Connection Size: VVMW-2: 1/8 Female NPT / Face Seal VVMW-3: 1/4 Female NPT / Face Seal VVMW-4: 3/8 Female NPT / Face Seal , VVMW-2: 1/8 Female NPT / Face Seal, VVMW-3: 1/4 Female NPT / Face Seal, VVMW-4: 3/8 Female NPT / Face Seal

MPa(G): 0.5, Leakage Pa•m3/s: Internal: 1.3 x 10-9 External: 1.3 x 10-11 , Internal: 1.3 x 10-9, External: 1.3 x 10-11, Connection Size: VVMW-2: 1/8 Female NPT / Face Seal VVMW-3: 1/4 Female NPT / Face Seal VVMW-4: 3/8 Female NPT / Face Seal , VVMW-2: 1/8 Female NPT / Face Seal, VVMW-3: 1/4 Female NPT / Face Seal, VVMW-4: 3/8 Female NPT / Face Seal

AD402/600

2 except !0. Note 2) Part no. for bowl assembly: AD34 Note 3) Part no. for bowl !0: 201016 14-20-49

02-mgp-z-e

Grease pack part no.: GR-S-010 (10 g) 125

06-rhc-e

Grease pack part no.: GR-S-010 (10 g) Cylinder tube gasket NBR 2 Rod seal NBR 1 O-ring NBR 4 O-ring NBR 2 Caution When disassembling cylinders with bore sizes of 20 through 40, grip the double flat part of either the rod cover or the head cover with a vise and loosen the other side with a wrench or an adjustable angle wrench, and then remove the cover.

11-cqsw-e

2 !3 Rod seal Set of left nos. !1, !2, !3. Piston seal NBR Tube gasket Seal kit includes !1, !2, !3. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) 65

Miniature Regulator Series ARJ310

6 t Zinc chromated w Electroless nickel plated Black zinc chromated Accessory Accessory IN 2 Series ARJ310 Dimensions ARJ310-01 ARJ310F-01 Approx. 31 Approx. 56 Approx. 56 Approx. 35 32 22 M12 x 1 Panel fitting dimensions 12.5/Panel thickness: 4 or less Approx. 27 19 2 2 -5.5 Approx. 57.2 8.5 Approx. 82.5 15 Applicable tube O.D. 4, 6, 5/32, 1/4 Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge

Fluid: 0 (Petroleum), Port Size Category: B (1 1/4, 1 1/2, 2), Std. T Dimension, mm: 1 (Port 1/2-1: 310, 1 1/4-2: 385, 2 1/2-3: 560), Filtration: 105μm, Port Size: 12 (1 1/2), Pressure Indicator: 1 (Differential Pressure Indicator), Connection: 4 (S-block Companion Flange)

Fluid: 1 (Water-glycol, Emulsion), Port Size Category: B (1 1/4, 1 1/2, 2), Std. T Dimension, mm: 3 (Port 1/2-1: 450, 1 1/4-2: 585, 2 1/2-3: 750), Filtration: 149μm, Port Size: 16 (2), Pressure Indicator: 1 (Differential Pressure Indicator), Connection: 4 (S-block Companion Flange)

Fluid: 0 (Petroleum), Port Size Category: C (2 1/2, 3), Std. T Dimension, mm: 2 (Port 1/2-1: 380, 1 1/4-2: 485, 2 1/2-3: 650), Filtration: 105μm, Port Size: 24 (3), Pressure Indicator: 1 (Differential Pressure Indicator), Connection: 4 (S-block Companion Flange), Air Breather: C (Cap)

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns