Clean Series: Relief Type, Magnet: Built-in Magnet, Mounting: Basic Style, Bore Size: 32mm, Port Thread: Rc, Stroke: 25mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: Auto Switch Mounting Bracket

LJ1H

Positioning distance (mm) 1 10 100 300 600 10 0.5 2.0 11.0 31.0 61.0 100 1.1 1.2 2.1 4.1 7.1 Speed (mm/s) 250 1.1 1.2 1.5 2.3 3.5 500 1.1 1.2 1.4 1.8 2.4 Values will vary slightly depending on the operating conditions. A B C D 37 Series LJ1 Options T-nuts for Mounting Electric Actuators Use T-nuts for T-slot mounting of an actuator.

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

MHZ

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

MHZ

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

H B Basic L Axial Foot F Rod Side Flange D Double Clevis (Except for 6) 6 (1/4) 10 (3/8) 16 (5/8) P O R T L O C AT I O N O N H E A D C O V E R Symbol Bore Size: 6 10, 16 R In-Line In-Line Perpendicular S T D S T R O K E/H U N D R E D T H S O F A N I N C H 6 (1/4) 050, 100, 150, 200 10 (3/8) 050. 100. 150, 200 16 (5/8) 050, 100, 150, 200, 300, 400, 500 A C T I O N S Spring Return T Spring

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

Programless Controller Series LECP1

Connector C (Terminal no.) Cable length(L)[m] A1 1 2 5 6 (17.7) (10.2) (14) (18) 1 3 5 8 A B C 1.5 3 5 8 A6 B1 B3 A1 A3 B6 (13.5) 1 2 15 16 (5.7) Connector B Connector D (30.7) L (11) (14.7) (10) 8 A B C 10 LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (Produced upon receipt of order) 15 Actuator side Controller side 20 (5.5) (6.3) (5.7) (14.2) Connector C (Terminal no.)

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

pressure differential [MPa] Cv JSXD31-Am02 410 3/8 9.2 2.4 JSXD31-Am03 410 1/2 9.2 2.4 JSXD31-Am04 410 Aluminum 1/4 8.5 0.35 2.0 30 10 1/4 8.5 0.35 2.0 1.6 1.9 JSXD31-C Sm02 500 3/8 9.2 2.4 2.0 2.4 JSXD31-C Sm03 500 1/2 9.2 2.4 2.0 2.4 JSXD31-C Sm04 500 Brass Stainless steel 0.02 1.0 Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts 40 Brass Stainless

7

Valve Leakage Rate Fluid and Ambient Temperature Internal Leakage 20 to 60 Ambient temperature (C) Fluid temperature (C) 10 Note) to 60 Seal material Leakage rate (Air) Note 1) VXD23 to 26 (8A to 25A) VXD27 to 29 (32A to 50A) 15 cm3/min or less (AIuminum body type) 15 cm3/min or less (Resin body type) 2 cm3/min or less (Metal body type) 10 cm3/min or less Note) Dew point temperature: 10C

Rotary Actuator/Vane Type

[mm] Size A B C D E (g7) F (h9) G1 G2 J K L M N P Q R S T V1 V2 W X Y Q1 Q2 Q3 10 29 15 8 14 40.004 0.016 9 0 0.036 3 1 5 9 0.5 9.5 9.5 24 M3 x 0.5 depth 6 6 M3 x 0.5 14 3.6 30 37 19.8 8.5 14.5 15 34 20 9 18 50.004 0.016 12 0 0.043 4 1.5 6 10 0.5 14 10 29 M3 x 0.5 depth 10 6 M3 x 0.5 depth 5 M3 x 0.5 19 7.6 39.5 47 21 11 17 20 42 29 10 20 60.004 0.016 14 0 0.043 4.5 1.5 7 10 0.5 20 13

EXxx-OMZ0016

Red ON Remote malfunction OFF The US1 (for control / input) power supply is OFF Supply 24 VDC +/-10% for US1 (for control / input) power source. -67No.EX-OMZ0016-C LED status Problem No.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Page Series Guide type Motor type Model Mounting orientation Ground ball screw Rolled ball screw 6 10 20 10 20 6 10 20 10 20 LTF6 LTF8 LTF6 LTF8 Page 60 to Horizontal 10 10 Page 68 to Standard Frame-type LTF motor linear guide 6 6 Page 76 to Vertical 10 10 Page 84 to Construction Page 92 Mounting Page 93

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

L1 (mm) 400 a = 1000 Pitching Yawing Vertical Vertical m a a = 2000 200 a = 3000 L1 Mep 0 5 10 20 15 Transfer load m (kg) 600 a = 2000 a = 1000 L3 (mm) 400 a = 3000 a 200 L3 Mey 0 5 10 20 15 Transfer load m (kg) Refer to page 145 for deflection data. 82 Non-standard Motor/Vertical Mount Specification Series LJ1H30 Dimensions/LJ1H303PA(X10) Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth

CQS

size (mm) E C OA D OB Q RA RB T H I K M N With/Without auto switch A 45.5 45.5 55.5 59 F 7.5 7.5 9 11 B 32 32 41 44 L 13.5 13.5 14.5 15 A 25.5 25.5 34 37.5 B 22 22 29.5 32.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 19.5 22.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 6 8 10 12 M4 x 0.7 25 29 36 40 6 8 7 12 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 M3 x 0.5 5 6 8 10 32 38 47 52 15.5 20 25.5

Air Cylinder

JM-045 JM-10 JM-10 JM-045 JM-045 *Components include in a seal kit.

Hygienic Design Cylinder Series HY

Installation bolt C D HYQ/Without built-in magnet Material: Stainless steel D C HYQB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 HYQB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 D C D C Mounting bolt part no. Cylinder model Mounting bolt part no. Cylinder model Mounting bolt part no.

Electric Grippers

Connector C Actuator side (Terminal no.) 1 2 5 6 (8) (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length (L) [m] 1 3 5 8 A B C 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 15 (5.5) (6.3) Actuator side (14) (18) (Terminal

Air Cylinder

G G 4 x J Width across flats KA MM RY D E d e C B H1 10.2 L f B1 AL h + L C B A K ZZ + L + Stroke F N RT N M S + Stroke H ZZ + Stroke (mm) M Bore size Stroke range AL B B1 C D E F G H1 J K KA (mm) A (mm) Without reinforcement ring With reinforcement ring 40 50 63 80 30 35 35 40 40 27 32 32 37 37 60 70 85 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21

MGP

2-Rc 3/8 (plug) DL GA GC 2-Rc 3/8 PB GB J JA 10 WB Q PA + Stroke C + Stroke B + Stroke A + Stroke WA Z JB 6H7 depth 10 FA FB S K E G 6H7 depth 10 With front lock 7 6 HN 10 5 6H7 DM 23 b a Section XX detail e c d End lock mechanism (Locking type manual release) T-slot dimensions (mm) 30 Bore size (mm) a b c d e With rear lock 13.3 20.3 12 8 22.5 80 15.3 23.3 13.5 10 30 100 (mm) Standard stroke