SS5Y3 13 STA MANIFOLD BASE. 1.081 lb. VVM.

SS5Y3 13 STA MANIFOLD BASE. 941 lb.

SS5Y5 13 STA MANIFOLD BASE. VVM.

SS5V 13 Station Manifold, Tie-Rod Base. VVM.

SS5V 13 Station Manifold, Tie-Rod Base. 0.65000 lb.

SS5V 13 Station Manifold, Tie-Rod Base.

SS5V 13 Station Manifold, Tie-Rod Base. 0.64 lb. VVM.

SS5V 13 Station Manifold, Tie-Rod Base. 0.6 lb.

Exhaust Cleaner for Clean Rooms AMP Series

cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13

I

NVF323O-OD,NVF3330-OD,NVF343O-OD NVF3530-OD ( ) :3 position ( ):3 pcition X:with indicator light and surge voltage supfressor f]:with indicator light and surge voltage suppressor @ Series NVF3OO inch (mm) ( vF3r22-OG-02-F) Series Manifold B Mount Type/Dimensions inch(mm) Cornmoi ExhausVNWsF3-30-O01 (c) (D) < ):3 pqsilion f]:with indicator light and surge voltage suppressor 4 7 a 10 l l 12 13

Air Cylinder MGQ Series Compact Guide Cylinder

(betwen lead wire and case) 10-60'c IEC Slandad, wabniqht(JlS C@m)and oil rsistins slrucure x "L js added to lhe end when tne lead wire is 3m lonsAuto Switch Internal Circuit Auto Switch W Table D-273 49 52 49 7.5 8-5 9.5 xReter to back cols for details ol the speciication of t l 13 contact protction bo)C Compact Guide Cylinder:Series MGQ Auto Switch 2 wire system 24VDC relay, Sequence contoller

Modular Type Filter Regulator Series AW

090AS AW30P-090AS Filter element Diaphragm assembly Bowl O-ring Bowl assembly Note 2) 4 5 6 7 AF10P-060S AR10P-150AS Note 1) AF40P-060S AR40P-150AS C4SFP-260S C4SF Note 3) AF40P-060S AR40P-150AS C4SFP-260S C4SF Note 3) AF20P-060S AR20P-150AS C2SFP-260S C2SF AF30P-060S AR30P-150AS C3SFP-260S C3SF Note 3) Weatherability NBR NBR PC C1SFP-260S C1SF Note 1) AW10 is a piston and a gasket (KSYP-13

Single Axis Electric Actuator Series LJ1H

B A C D 13 High Rigidity Direct Acting Guide Series LJ1H20 Standard Motor Motor Output Rolled Ball Screw 100W 15mm/20mm lead Horizontal Mount How to Order Stroke LJ1H202 NC 1 F 2 Cable entry direction Top entry Cable entry direction Cable length Power supply voltage Left entry F R L T B 1 2 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 2 3 4 5 2m 3m 4m 5m Axial Right Left Top Bottom Axial entry

Single Axis Electric Actuator Serriies LJ1S Slider Guide

LJ1-7-G/Matsushita Electric Industrial Co., Ltd. 100 Driver Non-standard motor electric actuators LJ1 and LG1 75 90 5 30 (195) AC servomotor short stroke electric actuator LX How to order 13 G LJ1 05 Compatible model 1 B 1 LJ1-7-R/Mitsubishi Electric Corporation Brake G R Y Nil B Matsushita Electric Industrial Co., Ltd.

Uniaxial Electric Actuator Series LJ1

LJ1H202PAP.8~13 LJ1H20 Series. LJ1H202NAP.14~19 LJ1H30 Series. LC1-1B2H LJ1H202PCLJ1H202NC.P.21 Slider Guide LJ1S Series LJ1S10 Series. P.22~27 LJ1H202SCLC1-1B2M LJ1S20 Series. P.28~33 LJ1H202PFK LJ1S30 Series. P.34~39 LJ1H202NFK Option Specifications. P.40, 41 LC1-1B2V LJ1H202PAK Motor Reference Data, Nonstandard Motors . P.42~46 Order Made Specifications.

Long Stroke Slide Table Series MXY

one side. 50 100 400 350 250 150 Shock absorber Metal stopper Rubber stopper 300 200 6 8 12 Scale:100% % Scale:100% S S l 100% S l 100% Scale:100% Scale:100% Scale:100% Scale:100% Scale:100% Scale:100% Scale:100% Scale:100% Scale:100% Higher allowable moments compared to MXY8/MXW8 Allowable moment (Nm) Weight Width Height (mm) Model (g) (mm) Pitch, Yaw Roll 30 25 MXY8-50 49 47 610 420 5.7 13

Vacuum Regulator Series IRV

U C S O H L 1 Series IRV Dimensions IRV1000 IRV2000 53 55 41 30 50 SMC 35 P K U C SMC S O H L P K U C S O H L 40 34 8 x 6.5 15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60

Compact Vacuum Ejector Series ZQ

used. 5 6 P EXH PE V V Circuit ZQ11U-Q2D F 8 Compact Vacuum Ejector Series ZQ Dimensions Manifold type ZZQ1-BSB ZQ13M-( Body mounting) hole Note 1) Pilot exhaust port (PE port) 5.5 (One-touch fitting for applicable tubing diameter of 4, piping not required) Supply port Common air supply port (P port) (One-touch fitting for applicable tubing diameter of 8) 3.5 2-R1.75 Release valve P PE 13

LEFS16, 25, 32, 40 Series LEFS Electric Actuator/Slider Type Ball Screw Drive Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

LECP1 LECPA Series Value (Step data) input Standard controller Capable of setting up operation (step data) without using a PC or teaching box Features Operation by pulse signals Step motor (Servo/24 VDC) Servo motor (24 VDC) Step motor (Servo/24 VDC) Compatible motor 14 points 64 points Maximum number of step data 24 VDC Power supply voltage Reference page Page 58 Page 36 Page 36 Page 51 13

Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: L (Symmetric Type), Stroke: 30mm, Adjuster: C (Metal Stopper, Both Ends), Functional Option: Standard Type, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal