PFxx-OMS0001CN

8 9 / [] 1 6 1 [F82] -53No.PF-OMS0001CN-A [F90] <> [F90] [ALL] [ALL] [] [oFF] [oN] "" 2 [F90] -54No.PF-OMS0001CN-A 1 [ rEF] 2 [ Uni] 3 [ oU1] OUT1 4 [ 1ot] OUT1 5 [ ] OUT1 6 [ ] OUT1 7 [ CoL] OUT1 8 [ oU2] OUT2 9 [ 2ot] OUT2 NPN2PNP2 10 [ ] OUT2 11 [ ] OUT2 12 [ rES] 13 [ SUb] 14 [ inP] 15 [ FrE] 16 [SAvE] 17 [ PoS] 18 [ PrS] 19 [ dSP] OFF 20 [ Pin] 21

Digital Flow Switch (Remote type sensor unit)

Check the characteristics data for operating pressure and proof pressure (page 21). Connect the piping using suitable fittings. Mount the product so that the fluid direction is the same as the arrow indicated on the product. The piping on the IN side must have a straight section of piping whose length is 8 times the piping diameter or more.

Digital Flow Switch (Manifold type)

No.PF-OMW0004-B PRODUCT NAME Digital Flow Switch (Manifold type) MODEL / Series / Product Number PF3WB PF3WC PF3WS PF3WR Table of Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product parts 19 Definition and terminology 21 Mounting and Installation 23 Installation 24 Piping 25 Wiring 29 Other Settings 33 Maintenance 33 Disclaimer for Usage of the Replacement

PF-OMM0004_C

No.PF-OMM0004-D / / PF3W7## SMC 2 11 13 14 16 17 19 21 24 26 26 F1 OUT1 60 F2 OUT2 36 F3 42 F10 43 F20 47 F22 48 F30 50 F80 51 F81 52 F82 53 F90 54 F98 55 F99 56 57 61 61 65 65 71 79 81 88 -1No.PF-OMM0004-D (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

PF-OMN0011_C

No.PF-OMN0011CN-C / / PF3W3## SMC 2 9 12 13 15 15 16 21 23 23 F0 25 F1 OUT1 26 F2 OUT2 34 F3 40 F10 41 F20 45 F22 46 F30 48 F80 49 F81 50 F82 51 F90 52 F96 53 F97 54 F98 57 F99 58 59 62 63 66 66 69 71 -1No.PF-OMN0011CN-C (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

LFE-OMZ0011

[Measurement condition] [Port size] Fluid: Tap water LFE13/8 inch Pressure: 0.2 MPa LFE23/4 inch LFE31 inch Straight pipe length (mm) Model D 5 D LFE1 11 55 LFE2 21 105 LFE3 27 135 -69No.LFE*-OMZ0011 Stability Fluctuation of the display and the analogue output can be reduced by lengthening the response time setting. 4.0 3.5 3.0 Stability [%F.S.]

LFE-OMZ0012

[Measurement condition] [Port size] Fluid: Tap water LFE13/8 inch Pressure: 0.2 MPa LFE23/4 inch LFE31 inch Straight pipe length (mm) Model D 5 D LFE1 11 55 LFE2 21 105 LFE3 27 135 -27No.LFE*-OMZ0012 Stability Fluctuation of the display and the analogue output can be reduced by lengthening the response time setting. 4.0 3.5 3.0 Stability [%F.S.]

IZ-OMU0031-CN

420 mA) -14No.IZ*-OMU0031 (H_1) () (H1) (H1) (H_1) (H1) (H1) OUT1OUT2OUT1,P_1P_2P1HP2Hn_1n_2n1H n2HH_1H_2H1H2 -15No.IZ*-OMU0031 ONOFF ON OFF () OUT1+0.2 kVOUT2-0.2 kVON [F 1]OUT1[F 2]OUT2 P_1 H_1 [kv] ON OFF [] <> 1 [P_1] -16No.IZ*-OMU0031 1 1 [P_2] -17No.IZ*-OMU0031 2[F 0] [F] 2 2 [F 0] 0.4 kV 19 [F 1] OUT1 [F 2] OUT2 20 OUT1+0.2 kV OUT2-0.2 kV 0.04 kV [F 1] OUT1 ON OFF 21

Valve Controller

Fig. 21. Wiring for temporary stop 7-3 Sequence when temporary stop is operating 1 Operation sequence The sequence of a temporary stop is shown below. When the Switch is turned ON the temporary stop operation begins. When the switch is turned OFF the operation stops. Operation starts from the next output when the switch is ON again.

Valve Controller

Fig. 21. Wiring for temporary stop 7.3 Sequence when temporary stop is operating 1 Operation sequence The sequence of a temporary stop is shown below. When the Switch is turned ON the temporary stop operation begins. When the switch is turned OFF the operation stops. Operation starts from the next output when the switch is ON again.

AXTS-OMY0007

type AXTS040*-2B-X2 Internal pilot valve Ratio of operating frequency and ON time AXTS040*-2(B)-X2 ON OFF adjustment OFF[] 10 needle [rotation] Frequency [Hz] 1 3 5 7 7 5 3 1 8 2.1 Hz 2.6 Hz 3.1 Hz 3.8 Hz 1 [Hz] 31% 64% 74% 73% 6 2.6 Hz 3.0 Hz 3.4 Hz 4.2 Hz ON adjustme nt [Rotation] 3 4 Number of rotation of ON adjustment needle 19% 60% 72% 71% OFF ON [] 2.6 Hz 3.0 Hz 3.5 Hz 4.4 Hz 2 5 21%

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

High Vacuum L Type Valve

6 3 Valve seal 2 (Maintenance part) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMV0007 5-2.Dimensions Size 16, 25, 40 E C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21

FGD-C

FGDA(1 ) FGDB(2 ) 50mm Rc Rc 9/11 FGX-OM-L007-C 5. 1 1) 50mm 2) 0.02MPa 0.02MPa 3) 2 1) 2) 6. ,0.1MPa, 11 1) 2) oC 40 3) IN OUT 4) 5) 6) 7) *2 250mm 8) 21 1) 6 1 2) 3) 2 250mm * * 4) 5) *:FGDT/F 25NmFGDC/E 15Nm 10/11 FGX-OM-L007-C 3 1) 2) 7. 1 2 1 11/11 FGX-OM-L007-C Revision history A P6. 10 1 B P5. P6.1-2. P7.

Industrial Filter

a product with pressure gauge) Number of element 4 4 Note2) or 8 4 Note2) or 12 Element size (mm) note3) 65 to 70 250 65 to 70 500 (For 8 elements: 65 to 70 250) 65 to 70 750 (For 12 elements : 65 to 70 250) Element replacement differential pressure (MPa) 0.1 Cover SUS304 Case SUS304 Material O-ring FGES: NBR FGEL: FKM Leg SS400 Mass (kg) Body only 10 13 18 Internal capacity (L) 14 21

FGE-C

FGE-KT001 NBR O FGE-KT002 FKM O V CY-24S SUS304/SWCH 001(FGESLA) 002(FGESLB) 003(FGESLC) FGE-CV SUS304 SUS304 M8X1.25XL30 SS400 M8X1.25 SS400 SS400 () 8/12 FGX-OM-L009-B 2 2 FGES L A FGES L B FGES L C 1) () (R) 12 (MPa) 0.7 () 80(60) 4 4 2)8 4 2)12 (mm) 6570250 6570500 (8 6570250) 6570750 (12 6570250) (MPa) 0.1 SUS304 SUS304 O FGESNBR FGELFKM SS400 (kg) 10 13 18 (L) 14 21

PFxx-OMA1007

[low byte] Flow reference condition 20 System error Error Forced output Pressure diagnostic Temperature diagnostic Flow rate diagnostic Accumulated flow unit -79No.PF-OMA1007-B Bit Byte Note 7 6 5 4 3 2 1 0 00HEX: Initialising 01HEX: Operation mode 11HEX: Forced Operation mode from button 02HEX: Waiting for standby signal 03HEX: Standby mode 13HEX: Forced Standby mode from button/OPC UA 21

CM2x-OM0230Q

GR-S-010(10g)GR-S-02020g 2. 3. 4. 1. 2. 3. 4. 5. 6. 7. 1. 2. 1. 2. 21 - 1. 2. 1. 2. 3. 1. 2. . 1. 2. 1. 2. 3. 1. 22 - 7. 6. 1 2A A 2B B 2C C 3 4 5 6 7 8 9 A 10 B 25 A 11 12 13 14 15 16 17 CDM2 23 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications

CG1-OM0227

CG1/CG1*A 3-3-1. 20 25 32 40 CG1N20Z-PS CG1N25Z-PS CG1N32Z-PS CG1N40Z-PS GR-S-010(10g) (10g) 1 GR-S-010 (10g) GR-S-020 (20g) 1 21 3-3-2. 22 3-4. 1. GR-S-010(10g),GR-S-020(20g) 2. 3. 4. 1. P18, 3-2. 2. P18, 3-2. 3. 4. 5. 6. 7. 1. 2. 1. 2. 1. 2. 1. P18, 3-2. 2. 3. 23 1. 2. 1. 2. 1. 2. 3. 1. 1. 2. P9, 2-6-2. ON ( ON) 1. 2. ON 3. 60 ON 4.

STAINLESS STEEL CYLINDER

Do not place an item on the product, bind a rubber product with a string, or hang on a nail or wire to prevent any deformation or scratch on the product. 4.White particles can emerge from the surface of the seal during storage, but they do not affect its performance. 21 3-4. Troubleshooting Problem Major causes Countermeasures Operation has lost smoothness. 1.