Fluoropolymer Tubing Variations Fittings KF series Stainless Steel 316 Insert Fittings KFG series Miniature fittings M, MS series (Hose nipple type) Fluoropolymer fitting LQ series H/DL L/LL Applicable fittings Note 2) Flexibility: Improved by approx. 20% * SMC comparison (Fluoropolymer tubing, TL/TIL series) KC 20C 100C 200C 260C 1.6 0.9 0.45 0.23 15 8 0.9 0.5 0.25 0.15 45 31 0.9 0.5 0.25 0.15 55 35 0.9 0.5 0.25 0.15 75 41
2.6 (65) 1.06 (27) 3.9 (100) 5.1 (130) Circulating fluid outlet (1.2 )30)) 12.6 (320) 0.8 (20) 0.8 (21) Terminal block Display panel 6.7 (170) 5.6 (143) 4.7 (120) AL SI 8.5 (215) OUT FG B B A FG + EXT.SENSOR REMOTE ON/OFF 3.8 (97) 3.1 (79) ALARM PURGE OUT PURGE IN SIGNAL Purge inlet (M5) Fluid leak sensor CHEMICAL 3.0 (75) 2.1 (53) POWER COMMUNICATION IN WATER I N O N WATER OUT DC 1.6 (41
CH2: Stainless steel, Alumina ceramic, Carbon, Fluororesin, PP, PBT, POM, PU, PVC, PPS, AS, PS, EPDM, NBR, Ion replacement resin Power supply 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) Allowable voltage range 10% (No continuous voltage fluctuation) Earth leakage breaker Rated current [A] 30 40 50 Electrical system Sensitivity current [mA] 30 Rated operating current4 [A] 17 32 41
Environmental friendly as refrigerant R410A Convenient functions Self diagnosis function and check display Page 70 Page 71 Timer operation function/Unit conversion function/Power failure auto-restart function/Anti-freezing operation function 41 types of alarm codes Communication function Page 71 Easy maintenance Page 69 Equipped with serial communication (RS232C/RS485) and contact I/Os (2
HED Polypropylene skid HEA Model Weight [kg] Dimensions [mm] HRSE012-A-10 35 Height 745 x Width 465 x Depth 575 HRSE018-A-10 HRSE012-A-10-T 42 Height 745 x Width 465 x Depth 620 HRSE018-A-10-T HRSE012-A-20 38 Height 745 x Width 465 x Depth 575 HRSE018-A-20 HRSE024-A-20 HRSE012-A-20-T 45 Height 745 x Width 465 x Depth 620 HRSE018-A-20-T HRSE024-A-20-T HRSE012-A-23 41 Height 790 x Width 470
Evaporation thermometer Capillary tube 93 C IDFAE Series Dimensions IDFA3E to 15E1 A B A D E Q C F G C M N L P K 4 x 13 In case of IDFA3E IDFA4E to 15E1 Dimensions (mm) B C D E F G K L M N P Q A Model Port size IDFA3E IDFA4E IDFA6E IDFA8E IDFA11E IDFA15E1 15 Rc 3/8 226 410 473 67 125 304 33 36 154 21 330 13 Rc 1/2 453 498 283 275 455 270 31 42 80 240 80 15 15 Rc 3/4 485 568 355 300 300 314 41
1 Model 0.5 A B D Dimensions (mm) Recommended flow (m3/min (ANR)) 2.2 or less 3.0 or less 4.0 or less 8.0 or less 10.0 or less 1.5 or less 1.5 or less Model Port size R Effective area (mm2) Weight (g) 0.2 Inlet pressure (MPa) Noise level (dB (A)) 1 4 2504-002 33.9 111 62 30 24 106 64 30 24 113 68 30 24 0.1 2505-003 45.9 3 8 2506-004 50.0 1 2 310 88.5 48 35 2507-006 105.6 3 4 514 97.5 60 41
AP100-02 500 Relief flow {l/min (ANR)} Dimensions 400 28 300 Panel cut dimensions 200 100 + 0 K P C U O 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 S L H 32.5 Set pressure (MPa) Note) The graph above shows the relief flow when the set pressure rises and falls from 0.1 MPa. 30 1.6 41 8.5 6.5 10 (69) 45.5 OUT IN 20 40 2 x 1/8, 1/4 40 758
Vespel is a registered trademark of DuPont. ) If connection size differs, flow characteristics also differ. 41 Single Stage Regulator for Ultra High Purity High flow (Tied-diaphragm) Series AZ9200 For UHP gas delivery Inlet pressure : Max. 300 psig (2.1 MPa) Flow capacity to 2000 slpm Body material: 316L SS How to Order Port Number q w e AZ92 S FV12 FV12 02 2PW Delivery pressure Bonnet option
HF Handle position: Left Handle position: Right [mm] Bore size Arm opening angle HF Bore size H HA HD 50 250 61.5 40 63 250 64.5 40 15 36 30 49 45 61 60 73 75 87 90 101 105 114 120 124 50 15 41 30 55 45 68 60 81 75 94 90 107 105 117 120 124 63 5 NAAMS Standards Compliant Power Clamp Cylinder CKZ3N -X2742A -X2568 Dimensions: Clamp Arm Bore Size 50 Clamp Arm Code List Straight: Plain Bore size
Fittings & Tubing Air Cylinders Rotary Actuators Note 2) 2 x 3.5 through M5 x 0.8 32 0.5 15.5 25 6 Rod end nut 9 Flat washer 5 9.2 10.5 4 4 10 15.5 27 + Stroke 14 25 8 4 41 + Stroke 16 17.5 5 Note 2) 2 x 2 x 6.5 counterbore 2 x 2 x M4 x 0.7 effective depth 7 2 x M5 x 0.8 (Piping port) M5 x 0.8 (Relief port) 5.5 2 x 3.5 through 38 M6 x 1.0 0.5 20 29 8 Rod end nut 10 Flat washer 11.5 6 12 4
Fittings & Tubing Air Cylinders Rotary Actuators Size: 50 Single shaft Double shaft 8 x M8 x 1.25 depth 8 (Opposite side 4 locations) 118 44 62 4 x 9 (Mounting hole) 48 20 15 11 0 0.2 15 (g6) 14 0 0.2 25 (h9) 17 M5 x 0.8 (Vacuum suction port) 15 (g6) 25 5 Auto switch 2 x Cushion valve (Width across flats 3) 9.5 9.5 0 0.030 5 36 2.5 98 7.5 6 7.5 6 108 5 33 14.5 41 A port 2 x Rc1/8 B port 8.5
SU) S A (mm) A AU AV AW AX AY BA BB Size 1 YA 1 28 2.8 11 8.2 5.5 1.5 35 39.6 2 30 3.6 12.6 9.2 7 2 37 45.1 3 34.5 4.4 15.5 10.5 8 2.5 43 46.7 7 41 4.8 18.4 12.2 10 3 50 59.2 YB effective depth YC (mm) BC BD BE BG BH BI BJ BK D DD DE FA FB FD H J JA JB JC JD JE JF JG Size M4 x 0.7 M4 x 0.7 1 4.5 32 17 11 8.2 30 4.5 5.3 27h9 27.5h9 14H9 4.8 2 3.7 9 3.3 6 3.5 2.2 5.3 4 M4 x 0.7 M4 x 0.7 2 5.5
switch operating range 10 34.5 35.5 14.5 15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP6 5 11-/22-MXP6 3 11-/22-MXP10, 12, 16 Electrical entry from outside Electrical entry from inside Parallel electrical entry B A B B A A Solid state auto switch D-M9B, D-M9N Reed auto switch D-A93 (mm) (mm) Stroke (mm) 20 41
x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16 8 22 8 15 80 18 M6 x 1 20 40 36 M26 x 1.5 124 13 10 70 41
CRQ2X MSQX 15 16 M4 20 22.5 M6 MRQ 30 24.5 M8 L 40 28.5 M8 Auto Switch Proper Mounting Position (at Rotation End Detection) Solid state switch Reed switch Size Rotation angle A Operating angle ( m) Hysteresis angle B A Operating angle Hysteresis angle B ( m) 90 19 15 25.5 21.5 5 12 61 63 10 180 22 18 35 31 90 22.5 18.5 31 27 4 9 47 52 15 180 26.5 22.5 43.5 39.5 90 40 36 52.5 48.5 4 9 40 41
bolt Chrome molybdenum steel Hexagon socket head bolt Chrome molybdenum steel Hexagon socket head bolt Chrome molybdenum steel Chromate Nickel plated Hexagon socket head bolt Chrome molybdenum steel Rolled steel Carbon steel Hexagon socket head bolt Flat washer Square nut Hard anodized Chrome molybdenum steel Hexagon socket head plug Nickel plated (Hexagon socket head taper plug for 25) 41
VM122-M5-06SA VM132-M5-06SA VM-06BS 45 g Cross roller plunger Polyacetal roller VM120-01-07A VM130-01-07A VM120U-01-07A VM130U-01-07A VM122-M5-07A VM132-M5-07A VM-07B 43 g Hard steel roller VM120-01-07SA VM130-01-07SA VM120U-01-07SA VM130U-01-07SA VM122-M5-07SA VM132-M5-07SA VM-07BS 45 g Toggle lever VM120-01-08A VM130-01-08A VM120U-01-08A VM130U-01-08A VM122-M5-08A VM132-M5-08A VM-08B 41
Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 217 (219) 246.5 (248.5) 282 (284) 301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41
Note 3) The handle of the selector (2 position) cannot be removed or replaced alone. 5-6-41 Series VZM500 How to Order S 01 01 0 VZM55 Option Suffix for actuator F Foot bracket Actuator type R S G B Red Hard steel roller Port size Basic 00 Color of push button selector Rc 01 1 8 Roller lever 01 Black 1 8 NPT N01 One way roller lever 02 Green G F01 1 8 Straight plunger 05 Y Yellow Roller plunger