25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)