Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector), Light

Suction Flow Rate: 600 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N06 [Vacuum: NPT3/4; Supply: 5/16" (Inch)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: Non-locking Push

Suction Flow Rate: 600 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N04 [Vacuum: 2 x NPT1/2 (Branch Spec.); Supply: 5/16" (Inch)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C)

Air/Manually Operated High Purity Chemical Valve Series LV

Consult P/A regarding fluids other than the above. Consult P/A regarding operating conditions. 1.12-6

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 12 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C6 (ø6 One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 9 Stations, P,E Port Location: U Side, SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: B (DIN Rail Mounting, Name Plate w/o Station Number), DIN Rail Option: 11 (Longer than

Model: 10 (Side Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 4 Stations, P, E Port Location: U (U Side), SUP/EXH Block: S (Internal Pilot/Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 2 (Lateral), Valve Stations: 7 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: N3 (ø5/32" One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 12 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: N7 (ø1/4" One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 12 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: B (DIN Rail Mounting, Name Plate w/o Station Number)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: U Side, SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C4 (ø4 One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 4 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: N1 (ø1/8" One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 5 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 5 Stations, P,E Port Location: U Side, SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C4 (ø4 One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 8 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 5 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: N7 (ø1/4" One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 6 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: N1 (ø1/8" One-touch Fitting)