Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, AS***F 1/8INCSTANDARD (NPT), AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CD, AS***F 1/8INCSTANDARD (NPT), ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, AS***F 1/8INCSTANDARD (NPT), AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CD, AS***F 1/8INCSTANDARD (NPT), ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, AS***F 1/8INCSTANDARD (NPT), AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CD, AS***F 1/8INCSTANDARD (NPT), ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, AS 1 1/2INCH STANDARD (NPT), AIRLINE EQUIPMENT, AS FLOW CONTROL, JD, AS 1 1/2INCH STANDARD (NPT), 7.33749 lb, ModelPort sizeFree flowControlled flowApplicable cylinderbore size (mm

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL, 1 1/2 PT, AIRLINE EQUIPMENT, AS FLOW CONTROL, JB, AS 1 1/2INCH STANDARD (PT), 6.79753 lb, ModelPort sizeFree flowControlled flowApplicable cylinderbore size (mm)

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CTRL, 1/8 NPT, AIRLINE EQUIPMENT, AS FLOW CONTROL, CD, AS 1/8INCH STANDARD (NPT), .07274 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, AS***F 1/8INCSTANDARD (NPT), AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CD, AS***F 1/8INCSTANDARD (NPT), 0.03853 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout

Slit Valve

0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CD, AS***F 1/8INCSTANDARD (NPT), .04629 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, FLOW CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CD, AS***F 1/8INCSTANDARD (NPT), .04180 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor

EX9-OEx_PE.eng

Element Description Power supply connector 1 Unused. 1 Power input connector Supplies power for output devices.1 2 To obtain the operation manual about this product and control unit, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly. Power LED Indicates the power supply status. 3 2 1: Refer to for the Wiring.

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, VALVE AIR SAVER, AIRLINE EQUIPMENT, ASR 1/8INCH STANDARD (NPT), .18172 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R 1/8M5 x 0.8Case: C3604 + nickel

VCHN

2 3/4 1 11/4 11/2 1/4 VCH41(N.C.)

Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 Series Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Series Regulator Symbol Regulator with backflow function

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 1 1 2 12 2 1 2 1 3 1 2 1 14 2 4 12 L 10 5 1 3 How to Order ARP 30 03 BE K Option / Semi-standard: Select one each for a to f.

Compact Vacuum Ejector Series ZA How to Order Ejector Unit ZA1 1 07 K1 P1 5 L 0 1 Nozzle nominal size Vacuum (V) port 05 ø0.5 Part no. Symbol Applicable tubing O.D. 07 ø0.7 KJS23-M5 ø3.2 (Straight) 1 Solenoid valve combination (Refer to Table (1).) KJS04-

Pilot valve symbol 1 2 3 4 5 6 100 AC 200 AC 110 AC 220 AC 24 DC 12 DC q w e r t y u i Nil Y Nil Y Nil Nil Nil Nil K1 K1 J1 J1 Q1 Q2 N1 N2 Combinations (1) to (8) in the above table are the only possible options. 850

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, FLOW CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CD, AS***F 1/8INCSTANDARD (NPT), .04409 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, FLOW CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CD, AS***F 1/8INCSTANDARD (NPT), .03747 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, FLOW CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CD, AS***F 1/8INCSTANDARD (NPT), .05511 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CD, AS***F 1/8INCSTANDARD (NPT), .03650 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CD, AS***F 1/8INCSTANDARD (NPT), .04188 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor