Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Panel Mount Adapter for w/Flow Adjustment Valve

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: Panel Mount Adapter for w/o Flow Adjustment Valve

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

MS-5ALHU-3 MS-5P H/DL L/LL For polyurethane tube 3.18/2 x M5 P.339 KC Extention fitting Solid piece moves fitting up from work piece M5 male x M5 female 4/2.5 x M5 MS-5J MS-5ALHU-4 KK For soft nylon and polyurethane tube P.339 KK130 Nipple Fitting to workpiece and fitting to fitting connection M5 male x M5 male 6/4 x M5 MS-5N MS-5ALHU-6 DM P.338 P.339 KDM Universal nipple Hose nipple Body

Valve; w/Stop Valve), Return Port Size: 04 (1/2), Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: w/Lead Wire and M8 Connector, 3 m, Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated Flow:

Valve; w/Stop Valve), Return Port Size: 03 (3/8), Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: w/Lead Wire and M8 Connector, 3 m, Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated Flow:

Valve; w/Stop Valve), Return Port Size: 03 (3/8), Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: w/Lead Wire and M8 Connector, 3 m, Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated Flow:

Valve; w/Stop Valve), Return Port Size: 04 (1/2), Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: w/Lead Wire and M8 Connector, 3 m, Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated Flow:

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 06 (3/4), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes]

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: L2 (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: gal/min; Accumulated Flow: gal; Temperature:

Rated Flow Range: 501 (5 to 500 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Output Specifications: L2 [Out: IO-Link, Switch Output (N/P); Func: Switch Output (N/P); Monitor Unit Model: None]

Coolant Valve

VNA VNB SGC SGH VNC VNC VNH VND VCC TQ 621 A VNC Series Threaded Type/Port size: 10A, 15A, 20A, 25A K L Pg9 N P Applicable cable O.D. 6 to 8 F (Air operated) J (External pilot solenoid) Pilot port 12(P1) 2 x (Back side 10(P2)) 4 x M 8 1 Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) P1 D S Q E Bracket 15 H A R B C Main port 1(A) [Back side 2(B)] Port size:

Steam Valve

R Pilot port 12(P1) Indicator (Option) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 TQ 80 90

High Pressure Coolant Valve

-15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 217 (219) 246.5 (248.5) 282 (284) 301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111 119 VNH VNH 1 4 VND Note) ( ): CE-compliant product (-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth