EX180-SDN3_4_5_6_eng

Read and understand this operation manual carefully before assembling, operating or providing maintenance to the product. 4 Display LED diagnostic display. 0 0 0 0 0 0 #0 Switch setting part Configures the MAC ID/communication speed. 5 #1 0 0 0 0 0 1 0 #2 0 0 0 1 0 : : : : : : : Solenoid valve power supply 24 VDC 1 1 1 1 #62 1 0 24 VDC 1 1 1 1 #63 1 1 The default setting is all switches ON

CEx-OMB0075

Noise countermeasures 8 Chapter 5: Structure and Measuring Principle 5-1. Structure 9 5-2. Measuring Principle 10 5-3. Relationship Between Pulse and Count10 Chapter 6: Troubleshooting 6-1. Troubleshooting for Measuring Function11 6-2.

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

EX120/121/122

min. between external terminals and case 2 M or more (500 VDC) between external terminals and case Insulation resistance Vibration resistance 10 to 55 Hz with a 0.5 mm amplitude in each X, Y, Z direction for 2 hrs (De-energized) Impact resistance 98 m/s2, in each X, Y, Z direction, 3 times (De-energized) Standard CE marking Communication connector 1 pc., Power connector 1 pc.

Diaphragm Valve for Ultra High Purity

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) S 316L SS Electropolish + Passivation Ni-Co Alloy PCTFE (Option: Polyimide) AZ4542 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?