Digital Flow Switch

Internal voltage drop K Key-lock function A function that locks the set buttons so that no accidental setting changes can be made. -14No.PF-OMO0005-F Terminology Definition M The resolution of set and display values. If the minimum setting unit is 1 L/min, the flow can be displayed in 1 L/min units, i.e. 10, 11, 12.

PFxx-OMP0001CN

. -16No.PF-OMP0001CN-F FG 1 DC(+) 2 OUT2// 3 OUT1 4 DC(-) -17No.PF-OMP0001CN-F NPN(2 ) PFMB7--ADC(+) OUT1 OUT2 DC(-) 28 V 80 mA 1 V NPN(1 )(15 V) PFMB7--CNPN(1 )(420 mA) PFMB7--DDC(+) OUT1 DC(-) 28 V 80 mA 1 V C15 V 1 k D420 mA 600 NPN(1 ) PFMB7--GDC(+) OUT1 DC(-) 28 V 80 mA 1 V 0.4V ()30 msec. -18No.PF-OMP0001CN-F PNP(2 ) PFMB7--BDC(+) OUT1 OUT2 DC(-) 80 mA 1.5 V PNP(1 )(15 V)

PFxx-OMS0001CN

. -17No.PF-OMS0001CN-A FG 1 DC(+) 2 OUT2// 3 DC(-) 4 OUT1 -18No.PF-OMS0001CN-A NPN(2 ) PFMC7--ADC(+) OUT1 OUT2 DC(-) 28V 80 mA 1 V NPN(1 )(15 V) PFMC7--CNPN(1 )(420 mA) PFMC7--DDC(+) OUT1 DC(-) 28V 80 mA 1 V C15 V 1 k D420 mA 600 50 NPN(1 ) PFMC7--GDC(+) OUT1 DC(-) 28V 80 mA 1 V 0.4V ()30msec. -19No.PF-OMS0001CN-A PNP(2 ) PFMC7--BDC(+) OUT1 OUT2 DC(-) 80 mA 1.5 V PNP(1 )(15 V)

Voltage Monitor for PFMV5

Internal voltage drop K Key-lock function A function that locks the set buttons so that no accidental setting changes can be made. M The resolution of set and display values. If the minimum setting unit is 1 L/min, the flow can be displayed in 1 L/min units, i.e. 10, 11, 12.

Digital Flow Monitor

K Key-lock function Function that prevents changes to the settings (disables button operation). M Max. applied voltage The max. voltage that can be connected to the output of an NPN device. Max. load current The max. current that can flow to the switch output. Measurement mode Operating condition in which pressure is being detected and displayed, and the switch function is working.

Digital Flow Switch (Remote type sensor unit)

Output for PF2A3 type PF2A5-Output impedance: 1 k 1: Refer to the PF2A3 operation manual for details of the flow monitor.

Digital Flow Switch (Remote type sensor unit)

Output for PF2W3 type PF2W5-Output impedance: 1 k 1: Refer to the PF2W3 operation manual for details of the flow monitor.

High Vacuum L Type Valve

flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2 90 257 117 65 11 114 110 83 104 39 9 13 XL-OMV0007 6.

XL-OMV0002

) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55 11 134 130 102 139 58 9 XLC-160 138 339 200 65 11 190 180 153 124 62 12.5 10 XL-OMV0002 5. 200 1680 100 100,160[ ]18 12 Assy O XLC-16,XLC-25,XLC-40,XLC-50,XLC-63,XLC-8 200 XLC-100,XLC

Standby E/P Regulator (Air Management System/ELECTRO-PNEUMATIC REGULATOR)

Bit BYTE 64 (Maximum) Value The Bits 49 54 56 32 30 35 30 2D 49 4C 33 30 2D 31 2D 4B 2D 58 33 39 39 (hexadecimal number) indicate "ITV2050-IL30-1-K-X399."

DOC1023126

Parallel I/O input circuit NPN specification (EQ--B5) PNP specification (EQ--B6) External Inside the electric actuator External Inside the electric actuator Internal power supply 24 VDC To internal circuit IN0,IN1 10 k 10 k 2.7 k To internal circuit IN0,IN1 100 2.7 k Parallel I/O output circuit NPN specification (EQ--B5) PNP specification (EQ--B6) Inside the electric actuator External

LV50-OMQ0004

. -10No.LV50***-OMQ0004-F Model Indication and How to Order LFE Option Body size (Flow rate range Symbol Content Symbol Lead wire Bracket 1 0.5 20L/min Nil Yes 2 2.5100L/min 1 3 5200L/min 2 Yes Yes 3 Yes Output Specifications Symbol OUT2 J Analogue 1 to 5V K Analogue 4 to 20mA Thread type Piping port size Symbol Description Rated flow range Symbol Port size Nil Rc 1 2 3 N NPT 3 3/8 Yes F

High Vacuum L Type Valve

flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLAV-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6

Digital Flow Switch (Integrated display type)

to 20 mA) Load impedance Impedance Output impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Analogue output approx. 1 k Accuracy 5%F.S. max.

Digital Pressure Switch

Output impedance: Approx. 1 k -23 Switch output NPN open collector output 1 output Max. 30 V, 80 mA Failure predictive output NPN open collector output 1 output -24 Switch output NPN open collector output 1 output Max. 30 V, 80 mA Failure predictive output NPN open collector output 1 output Analog output: 1 to 5V (5%F.S.)

AIR COMBINATION

Note 5) Option Nil Without pressure gauge 4 Note 6) Round type pressure gauge (without limit indicator) Pressure gauge b Round type pressure gauge (with limit indicator) Round type pressure gauge (with color zone) Nil Without attachments Check valve c Mounting positionAW+K+AL Note7) Semi-standard Attachment Nil Without attachments Pressure switch d 5 Mounting positionAW+S+AL Note 8)

XLG Series

Flange) Fn Fd J K H B A G A Unit: mm Model A B C D E Fn Fd G H J K XLG-50-1 70 183 80 31 10.5 75 52 77 29 10.5 XLG-63-1 88 209 100 39 11 87 95 70 76.5 36 9 XLG-80-1 90 250 117 45.5 11 114 110 83 105 44 9 XLG-100-1 108 270.5 154 55 11 134 130 102 92 58 9 XLG-160-1 138 339 200 65 11 190 180 153 124 62 12.5 11 XL*-OMI0010-E 5.

High Vacuum L Type Valve

As this product has pressure balanced construction, the exhausting direction is free. 8 XL*-OMI0013-B 5.Dimensions 26 41 K J 72 53010 OPERATION INPUT K J V L C B 39 C B 69 XLS-**-P*G (with control power supply) XLS-**-P*G () L G1/2 D XLS-**-** (without control power supply) DIN terminal (D) DIN( D ) XLS-**-** () E D F K2 J L 27010 J M 29010 J K 33 25 G1/2 G1/2 C G C C B B B A A Terminal (

Compact Guide Cylinder

hole position) XAH9 depth 6 WB X 0.02 (Pin hole position) X 4 x YY depth YL Section XX 4 x MM depth ML Bottom view 4 x NN through XAH9 XB Section XX 4 x OA through Section XX Z WA 2 x Counterbore diameter OB, depth OL L HA: T-slot for hexagon bolt 3 (12 and 16 only) DA DB X 0.02 R T XA H VA VB 3 U X PW 6 Section XX details XAH9 depth 6 S Q GC GA GB 2 x P PB XAH9 depth 6 2 x P (Plug) G J K

1.63

.: GR-S-010 (10 g) D-X 511 MGPW Series 20 to 63/MGPWM Stroke Z 4 x YY depth YL Stroke Z L 4 x MM depth ML 4 x NN through DA DB H V U X T R PW 2 x P OL GA GB 4 x OA through FA FB 2 x OB counterbore Q J K C + Stroke B + Stroke E S G A + Stroke For intermediate strokes other than standard strokes, refer to Manufacture of Intermediate Strokes on page 499.