Function: Normally Closed, Piping: Body Ported, Body Option: Large Flow Style, Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: Body Ported for P,R,A-Port M3X0.5, Option: -

Function: Normally Closed, Piping: Body Ported, Body Option: Large Flow Style, Voltage: 24VDC, Lead Wire: M Plug w/o Connector, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, Port Size: Body Ported for P,R,A-Port M3X0.5, Option: Bracket

Function: Normally Closed, Piping: Body Ported, Body Option: Large Flow Style, Voltage: 12VDC, Lead Wire: M Plug Connector w/Lead Wire 0.3m, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, Port Size: Body Ported for P,R,A-Port M3X0.5, Option: -

Function: Normally Closed, Piping: Body Ported, Body Option: Large Flow Style, Voltage: 24VDC, Lead Wire: M Plug Connector w/Lead Wire 0.3m, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, Port Size: Body Ported for P,R,A-Port M3X0.5, Option: Bracket

Vacuum Manifold for fieldbus system

Port Size Operating pressure range [MPa] Metric Inch P(End plate U) 8 5/16 0.3 to 0.5 P(Ejector) Note 1) 2) 6 1/4 V 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 : Not applicable Note 1) P port (Ejector) is available when selecting for ejector model number. Note 2) P port (End plate U) and P port (Ejector) are connected inside.

F/ISE

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

Dedicated Controller Series LC1 Uniaxial Type

input No., State (P-No.) label C-AND OR input time out subroutine call command General-purpose input No., State (P-No.) label C-OR AND input condition jump command General-purpose input No., State (P-No.) label J-AND Condition jump OR input condition jump command General-purpose input No., State (P-No.) label J-OR Program Control Commands Parameter value Mnemonic Classification Function

1

KBS, KBL (P. 15-3-114, 115) 6 KBH2-R3S KBH3-R2S KBH3-R3S KBH3-R4S KBH4-R3S KBH4-R4S R 1 2 R 3 8 R 1 2 R 3 8 R 1 4 R 3 8 R 1 4 KBE2-08 KBE2-10 KBE3-08 8 10 10 8 2 Applicable tubing KBE3-10 KBE3-12 KBE4-12 12 R1 KB 1 H S Model With sealant (Male thread only) Standard specifications Female Connector Elbow Union: KBL Tube size/Connection thread size Body size T Connection thread Model KBL1-R1S

11-cq2-e

Contents Bore size (mm) R: NBR V: FKM R: NBR V: FKM R: NBR V: FKM R: NBR V: FKM R: NBR R: NBR !0 Piston seal CQ2B20V-PS CQ2B20R-PS 20 25 32 40 50 63 80 100 CQ2B20R-PS CQ2B25R-PS CQ2B32R-PS CQ2B40R-PS CQ2B50R-PS CQ2B63R-PS CQ2B80R-PS CQ2B100R-PS CQ2B20V-PS CQ2B25V-PS CQ2B32V-PS CQ2B40V-PS CQ2B50V-PS CQ2B63V-PS CQ2B80V-PS CQ2B100V-PS CQ2B25V-PS CQ2B25R-PS !

Compact Cylinder/Standard Type: Double Acting, Single Rod Series CQ2

Contents Bore size (mm) R: NBR V: FKM R: NBR V: FKM R: NBR V: FKM R: NBR V: FKM R: NBR R: NBR !0 Piston seal CQ2B20V-PS CQ2B20R-PS 20 25 32 40 50 63 80 100 CQ2B20R-PS CQ2B25R-PS CQ2B32R-PS CQ2B40R-PS CQ2B50R-PS CQ2B63R-PS CQ2B80R-PS CQ2B100R-PS CQ2B20V-PS CQ2B25V-PS CQ2B32V-PS CQ2B40V-PS CQ2B50V-PS CQ2B63V-PS CQ2B80V-PS CQ2B100V-PS CQ2B25V-PS CQ2B25R-PS !

2-Color Display

P Reduced setting efforts P Reduced chance of set-value input error Cop Copy Copy Master Unit 1 Slave Unit 2 Unit 10 3-step setting -step setting 3-step setting 1 2 3 Push Push Push Push Push Push Adjust to set-value with buttons. Finish setting Added vacuum range. P Rated pressure range: 0.0 to 101.0 kPa 0 101 kPa Expanded pressure range for positive-pressure type to the vacuum range.

SFOD-OMT0009CN

/ CIR-L Step No. mm/s 1 2 2 2 mm mm/s mm/s / mm mm mm 1 CIR-R 100 100.00 1000 1000 0.0 0.0 0.5 2 CIR-R 100.00 0.0 0.0 0.5 0 1) 50.00 3 1) 50.00 4 1)CIR-R CIR-L 2 3 4 (5) SYN-I Step No. mm/s 1 2 2 2 mm mm/s mm/s / mm mm mm 1 SYNI 100 100.00 1000 1000 0.0 0.0 0.5 2 SYNI 0.0 0.0 0.5 0 3 SYNI 0.0 0.0 0.5 4 SYNI 0.0 0.0 0.5 55 No.SFOD-OMT0009CN-B 8. 8.1 () ... 1 ...(2) () M

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

VQZ Series

Compatible cable Cord O.D.:3.5 to 7 (Reference) 0.5mm2, 2-core or 3-core, equivalent to JIS C 3306 Part no. for One-fitting for 1(P) port and Silencer for 3(R2,R), 5(R1) port. (2) Silencer for 3(R2,R), 5(R1) port Series (1) One-touch fitting for 1(P) port Silencer One-touch fitting VQZ100/1000 KQ2H06-M5 AN120-M5 KJS04-M5 VQZ200/2000 KQ2S06-01S INA-25-46 IN-457-32for 6 VQZ300/3000 KQ2H08-02S

GA342

Weight 1.2 kg Port size 04 06 10 1/2 3/4 1 JIS Symbol Dimensions PA R(3) P(1) (2)A 14 54 73.5 X 68 87.4 Rc 1 8 Rc 1 8 Max. 2 132.6 SYA (Pilot port) (Pilot EXH port) 62.3 Rc 1 8 (External pilot port) SYJA PA 2 x 8.4 VZA NO X (Mounting hole) X PE 30.5 30.5 NC VFA 116.1 98.6 91.6 91.6 3(R) 66.8 VFRA 57.6 2(A) 1(P) 43.8 43.8 VA 34 71 34 (P port) (R port) (A port) Rc 1 1 2, 3 4, Rc 1 1 2, 3 4,

ZSE40/ISE40

ON YES Unit selection Hysteresis mode OFF P-1 P-2 High pressure (for positive pressure/compound pressure) High vacuum (for vacuum pressure) [P] ZSE ISE H H H (Fixed hysteresis) = 3 digits ON PSE Window comparator mode OFF NO P-1 P-2 High pressure (for positive pressure/compound pressure) High vacuum (for vacuum pressure) Z I SE3 Set the unit by either button or button. : kPa or MPa

Compact Guide Cylinder End Lock Type SeriesMGP

P P P Lock position Z80 P P H R Rear lock Front lock Y59A Y69A P p P Manual release Y7PV Y7P P P p N L Non-locking type Locking type Y59B Y69B P p P Solid state switch Y7NW Y7NWV P P p Y7PW Y7PWV P P p Y7BW Y7BWV P P p Y7BA P p Lead wire symbols 0.5m . Nil (Example) Y69B 3m . L Y69BL 5m . Z Y69BZ Solid state switches marked with a "p" are produced upon receipt of order.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Displays exact the same pressure values for all channels. kPa MPa Auto identification function (page 14) Can automatically identify the pressure range of a connected P/A sensor. CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 51 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, PRESSURE SWITCH, ISE1-6, N59, 90 lb