Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

27.8 39.3 6 12.8 5/16" 15.2 18.5 36 AS321FG-02-08 AS221FG-N02-11 18.8 35.3 44.5 63 18.5 29.5 41 8 15.2 3/8" 17.9 21 23 37.8 43.3 48.3 19 42.8 21.3 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 10 18.5 1/4" 13.2 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1112 B Diaphragm Valve for Ultra High Purity Manually operated type Series AZ3652 & 4652 inch (mm) Dimensions AZ3652 & 4652 Ports: 2PW (Welded) Ports: 2P (Machined) 1.5 (38) 1.5 (38) BAR STOCK BODY Note) FORGED BODY 0.44 (11.2) 2.17 (55) 2.17 (55) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A A Connections: TW Connections: TW 1.0 (25.4)

Compact Manifold Regulator

OUT Fitting Type Metric size Inch size Symbol Position 1 2 Bottom Top Straight Elbow 4 6 4 6 Straight Elbow 5/32 1/4 5/32 1/4 Fitting type Symbol Fitting type Symbol 04 05 16 17 54 55 66 67 4. Accessory (Pressure Display) 5.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

from to respectively. 2020 PVQ Specifications VEF VEP Rated pressure range Display/Set pressure range Withstand pressure Display/Minimum setting unit Applicable fluid Power supply voltage Current consumption Switch output 0 to 1 MPa 0.1 to 1 MPa 1.5 MPa 0.01 MPa (Air, Non-corrosive gas, Non-flammable gas) 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With power supply polarity protection) 55

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y l28 l27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55

AR Series Modular Type Regulator

2.3 27.3 36.5 17.5 6 AR25-A 1/4, 3/8 1/8 53 70.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 44.3 5.4 15.4 55 2.3 30.3 36.5 17.5 6 AR30-A 1/4, 3/8 1/8 53 83.5 27 28.5 M45 x 1.5 28.5 37.5 65 37.5 66 41 36 46 6.5 24 65 2.3 32.5 45.5 22.5 7 AR40-A 1/4, 3/8, 1/2 1/8 70 100 33.5 34.5 M52 x 1.5 34.5 42.5 72 42.5 72 50 38 54 8.5 26.5 70 2.3 38.4 52.5 26 7 AR40-06-A 3/4 1/8 75 101.5 33.5 34.5

AR20-B to AR60-B

2.3 24.7 28.5 14 6 AR25(K)-B 30 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 AR30(K)-B 41 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 AR40(K)-B 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40(K)-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50(K)-B 70 66 65.8 11 13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 *1 The dimension of B is the length when the filter regulator knob is unlocked. *2 For the AR20(K)-

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

27.8 39.3 6 12.8 5/16" 15.2 18.5 36 AS321FG-02-08 AS221FG-N02-11 18.8 35.3 44.5 63 18.5 29.5 41 8 15.2 3/8" 17.9 21 23 37.8 43.3 48.3 19 42.8 21.3 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 10 18.5 1/4" 13.2 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

60 17 27.8 39.3 12.8 15.2 6 5/16" 20 21 36 AS321FG-02-08 AS221FG-N02-11 33.9 43.2 63 18.5 29.5 41 15.2 17.9 8 3/8" 23 43.8 48.8 21.8 19 42.8 37.8 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 18.5 13.2 10 1/4" 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 19 21.8 29.5 41 69 22 32.8 44.3 20.9 15.2 12 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

53.5 55 52 291. 54 291. 3 6.5 291. 13 M8 x 1.25 x 10 12-CY3R32 101. 111. 41.6 131. 7 65 63.5 67 62 361. 66 361. 5 6.5 361. 15 M8 x 1.25 x 10 12-CY3R40 L Model LD M MM N PW Q QW T TC W WP X Y Z 12-CY3R15 53 4.3 5 161. 18 191. 171. 25 161. 18 54.5 194 184 32 M4 x 0.7 12-CY3R20 62 5.6 5 171. 17 20.5 201. 40 191. 22 641. 107 195 38 M4 x 0.7 12-CY3R25 70 5.6 6 16.5 20 21.5 22.5 40 21.5 28 721

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

33.8 21.4 43.9 14.2 26 AS231FSG1-02-08 (S) 8 13.2 34.9 23.5 46 15.6 27 AS231FSG1-02-10 (S) 10 15.9 20.9 38.1 24.7 47.3 17 28 AS331FSG1-02-06 (S) 6 8.2 16.5 29.9 17.5 40.1 13.3 1/4 17 (17.5) 12.9 13 49.7 48.3 44.2 42.8 24.5 19.2 ASV 49 AS331FSG1-02-08 (S) 8 13.2 37.1 23.5 59.9 14.2 50 AS331FSG1-02-10 (S) 10 15.9 17.4 23 41.2 26.1 62.5 15.6 53 AS331FSG1-02-12 (S) 12 18.5 42.5 28.3 64.7 17 55

Solid State Auto Switches

Weight (g) D-Z73 D-Z76 D-Z80 Auto switch model 0.5 m (Nil) 3 m (L) 5 m (Z) 7 31 50 10 55 7 31 Lead wire length D-Z73, Z80 D-Z76 Dimensions (mm) M2.5 x 4L Slotted set screw M2.5 x 4L 27.6 1.5 Slotted set screw 30.5 2.3 2.5 6.2 6.2 Indicator light D-Z80 without indicator light Indicator light DD5.7 5.5 2.7 Most sensitive position Most sensitive position 3.4 12.5 12.5 1641 Reed Auto Switch

Air Cylinder Series CJ1

Refer to front matters 54 and 55 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Material Tubing type Tube no. Bore size O.D. Polyurethane 2.5 mm 4 mm TU0425 Metric size Soft nylon 2.5 mm 4 mm TS0425 Piping Caution (N) Theoretical Output Bore size (mm) Action Piston area (mm2) Operating pressure (MPa) Rod size (mm) 0.2 0.3 0.4 0.5 0.6 0.7 1.

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

Action Double acting Fluid Air Proof pressure 174 psi [1.2 MPa] Max. operating pressure 116 psi [0.8 MPa] 73 psi [0.5 MPa] Min. operating pressure 44 psi [0.3 MPa] Ambient and fluid temperatures 14 to 140F [10 to 60C] (No freezing) Cushion Clamping side: None Unclamping side: Rubber bumper Operating time Clamping: 1 sec. or more, Unclamping: 1 sec. or more Max. allowable clamping moment 1 55

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

11-/22-MXP10, 12, 16 Electrical entry from outside Electrical entry from inside Parallel electrical entry B A B B A A Solid state auto switch D-M9B, D-M9N Reed auto switch D-A93 (mm) (mm) Stroke (mm) 20 41 29 47 35 Stroke (mm) 20 45 25 51 31 Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5 30 55

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

B C D R Model CDRBU2WU10-D 31 45.5 14 M5 x 0.8 CDRBU2WU15-D 25 47 18 M5 x 0.8 CDRBU2WU20-D 34.5 51 20 M5 x 0.8 CDRBU2WU30-D 47.5 55.5 22 M5 x 0.8 11-3-20 55 Series CRBU2WU Rotary Actuator with Angle Adjuster Free Mount Type, Vane Style Dimensions: 40 (With angle adjuster and auto switch unit) CDRBU2WU40-S/D Single vane type/Double vane type (mm) h Keyway dimensions l b CRB2 h (h9) l b (h9

Compact Cylinder with Solenoid Valve/

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

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Auto Switch Proper Mounting Position (mm) A B C D Auto switch model D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 36.5 41.5 56.5 67 67 83.5 92.5 D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 17.5 17.5 17.5 18 18 19.5 18.5 D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 24.5 29.5 44.5 55 55 71.5 80.5 D-A9 D-A9V K dimension (Switch rail height) Bore