5 Port Solenoid Valve Series SQ1000/2000

4 A 4 A 4 A 4 A R 62 41.5 (58) 39.5 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 25.5 1 21 44.5 63.5 P = 17.5 2n-C4,C6,C8 A, B port Dimensions Formulae L1 = 17.5n + 52 L2 = 17.5n + 74.5 n: Stations (max. 16 stations) L n 1 69.5 92 112.5 123 2 87 109.5 137.5 148 3 104.5 127 150 160.5 4 122 144.5 175 185.5 5 139.5 162 187.5 198 6 157 179.5 200 210.5 7 174.5 197 225 235.5 8 192 214.5 237.5 248 9 209.5

AS-FPQ/AS-FPG

2 Speed Controller for Clean Room Series AS-FPQ/FPG Construction Meter-out type M5 type Meter-in type M5 type Parts list No.

Electric Actuator / Slider Type 《 AC Servo Motor 》

B A Auto switch mounting bracket A-A B-B Dust seal band type Seal band holder roller specification C No.

ZMA

min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) ZMA10H ZMA13H Exhaust Characteristics Exhaust Characteristics Flow Characteristics Flow Characteristics Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure (kPa) Vacuum pressure

MB

Bore size (mm) Part no. l m L d Dd9 H B C D Applicable cotter pin CJ1 3 x 18 l 4 x 25 l 4 x 35 l 4 x 40 l 0.040 0.076 0.050 0.093 0.065 0.117 0.065 0.117 Note 1) When using cotter pin, flat washer is used together.

2/3 Port Valve

2 2-Rc 3 4 2-Rc1 Model J L K M N O P Q R S T U V M5 X 0.8 Depth 5.5 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 X 8 7 X 0 9 X 2 9 X 2 202.5 232 267 286.5 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B M6 X 1 Depth 6 70 92 109 M8 X 1.25 Depth 6 M8 X 1.25 Depth 6 4.2-34 2 Port Valve for Steam

10

Bore size [mm] Dd9 L l m d Part no.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .

-fl Seies

Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .

energy saving effect

detected. v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v Reference item dt HED < For 400 V type and option B [With earth leakage breaker]> 3.

Booster Regulator/Air Tank

VEX SRH Product Not Applicable to the ASME Standard ASME Standards Compliant Product SRP VBAT 05 N A 1 E V X105 Product not applicable to the ASME standard VBAT 05 N 1 A X11 SV SRF ITV Tank internal capacity Tank capacity Option Symbol Internal capacity 05 5 L 10 10 L 20 22 L 38 38 L Material Option IC Symbol Option Nil None V Drain valve Symbol Internal capacity 05 5 L 10 10 L Symbol Option

JAS

JAS Series How to Order Port size M3 M3 x 0.5 M5 M5 x 0.8 U10 10-32UNF JAS L E A 04 M5 JAS L E A S 04 01 Seal method Type L Elbow Nil Without sealant S With sealant Control type1 Port size E Meter-out S Meter-in 01 1/8 1 Meter-out and meter-in types can be visually identified by the color of the knob.

EX500-GEN2_eng

Verify the specifications before use. 5 Branch port B (COM B) 4 (Input: Max. 32 points/Output: Max. 32 points per branch) Number of branches Connect the SI unit (with manifold valves) or input unit using a branch cable.

ZQ-OM01401

L 1. (b ) 2. R 3. L 4.

Compressed Air Preparation Filter

x P (Port size) R V C Q OUT IN B Maintenance space A G 15 Compressed Air Preparation Filter AFF/AM/AMD Series Dimensions Optional specifications Semi-standard With auto drain PC/PA bowl1 Stainless steel bowl2 Metal bowl1 Applicable model AFF/AM/AMD AMK Modular Connection Example Drain cock with barb fitting With drain guide With drain cock With drain guide B B B B AFF/AM/AMD20 1/8 M5 x 0.8

1

) 2 x 5.5 Without spacer With spacer 2 x M5 thread depth M 15 15 Spacer Grommet: GS Flat terminal: F Conduit: C 280 G F F G 11 300 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D F G Applicable cable O.D.: 6 to 12 F G Width across flats 22 G1/2 32 (44) H 31.5 25 C H C G1/2 J J Dimensions [mm] Model A B Bs C D E F L M P [inch] Grommet:

PF2A/PF2W

pulse) enables remote monitoring of accumulated flow. 100 l/pulse M/C A COM COM COM B DC12V GND F.G.

Digital Flow Switch

3000 L/min 6000 L/min 12000 L/min 30 L/min 3000 L/min PF3A703H 3150 L/min 30 L/min 0 L/min 3150 L/min 60 L/min 6000 L/min PF3A706H 6300 L/min 60 L/min 6300 L/min 0 L/min 120 L/min 12000 L/min 12600 L/min 12600 L/min PF3A712H 120 L/min 0 L/min Rated flow range Set point range Display range Analog Output Output Output Flow/Analog Output 0 L/min A*2 B Voltage output (1 to 5 V)*1 1 V 1.04 V

HEC_W-E

(mgFe/L) 1.0 or less Copper (mgCu/L) 0.3 or less Sulphide ion (mgS2-/L) None detected +/L) 1.0 or less Ammonium ion (mgNH4 Residual chlorine (mgCl/L) 0.3 or less Free carbon (mgCO2/L) 4.0 or less Filtration (m) 5 or less 3-4 Unit Overview 4 Unit overview 4.1 Method of displaying model HEC 012 W 2 B N Piping Port Nil: Rc (Standard) -N: NPT Communication A: RS-485 B: RS-232C Power supply

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

trunnion: CBM2U N L MGP MGQ MGG MGC MGF (mm) Clevis Flange Axial foot Trunnion Bore (mm) Stroke range Stroke range Stroke range Stroke range CY1 Z ZZ Z LH LS B C2 RR B LC LD LT LX LZ X Y Z ZZ FD FT FX FY FZ L U Z ZZ TD TT TX TY TZ CD CX CZ Front Rear Front Rear Front Rear Front Rear MY1 20 25 32 40 400 300 300 6.8 25 102 3.2 131 400 300 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116