Body Size: 20A, Thread: N (NPT), Port Size: 02 (1/4), Option: Standard, Attachment: Standard, Semi-Standard 1: 1C (1 + C), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 20, Thread: N (NPT), Port: 02 (1/4), Option: Standard, Attachment: Standard, Semi-Standard 1: 1C (1 + C), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: GH (G + H), Semi-Standard 1: 1C (1 + C), Semi-Standard 2: Z (NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 20, Thread: N (NPT), Port: 02 (1/4), Option: E [Square embedded type pressure gauge (with limit indicator)], Attachment: Standard, Semi-Standard 1: 1C (1 + C), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

Body Size: 20, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 01 (1/8), Option: Standard, Semi-Standard 1: 1C (1 + C), Semi-Standard 2: Standard

Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: Standard, Semi-Standard 1: 1C (1 + C), Semi-Standard 2: Z (NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: CH (C + H), Semi-Standard 1: 1C (1 + C), Semi-Standard 2: Z (NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 20, Thread: F (G), Port Size: 01 (1/8), Option: Standard, Semi-Standard 1: 1C (1 + C), Semi-Standard 2: Standard

Float Type Auto Drain), Semi-Standard 1: 1C (1 + C), Semi-Standard 2: Z (NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

LX ALL OTHER/COMBO. 1.10231 lb. 1C.

.: 10), Voltage/Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 1C (240VAC; Grommet w/Surge Voltage Suppressor), Other Options: B (NPT Thread)

Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: Standard, Attachment: V1 (3-Port Valve for Residual Pressure Release; Mounting: V+AF+AR), Semi-Standard 1: 1C (1 + C), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 692   Family Description: XGT HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   Click here to report information errorImage shown may not match exact part number

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -