Stations: 4 Stations, A, B Port: 04 (Side 1/2), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: B (Both Sides), Thread: T (NPTF)
Stations: 7 Stations, A, B Port: 04 (Side 1/2), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: B (Both Sides), Thread: T (NPTF)
Stations: 5 Stations, A, B Port: 04 (Side 1/2), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: B (Both Sides), Thread: T (NPTF)
Stations: 6 Stations, A, B Port: 04 (Side 1/2), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: B (Both Sides), Thread: T (NPTF)
of Model Label . 1-7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures. 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Disposal of refrigerant and compressor oil. 1-15 1.7.2 Circulating fluid disposal. 1-16 1.7.3 System disposal . 1
3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-1 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 IDFA Series 1 6-3 . 6-3 6-4 . 6-4 6-5 . 6-5 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 8 C 8-1 . 8-1 8-2 . 8-1 8-3 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 (ADH4000-04) . 10-2 10-4 . 10-2 10-5 . 10-2 11 11-1
CONTENTS 1 Preparation for Communication . 1-1 2 Specifications of Communication Method . 2-1 3 Communication Format (same as current HEC series) . 3-1 3.1 Control code used for communication . 3-1 3.2 Command code list . 3-1 3.3 Communication procedures and format . 3-2 3.4 Calculation of Check Sum . 3-4 4 Details of Communication Format . 4-1 4.1 Temperature setting (without writing FRAM
-U02 10 13.1 13.1
Specifications 2-1 How to Order Metric size (Release button: Light gray) Metric size ZFB 0 Inch size ZFB 1 Body type Symbol Filtration area (mm2) 10 1037 20 1584 30 1980 40 3016 Inch size (Release button: Orange) Applicable tubing size Metric size Symbol Applicable tubing Applicable model ZFB10 ZFB20 ZFB30 04 4 06 6 08 8 10 10 Inch size Symbol Applicable tubing Applicable model ZFB10 ZFB20
Number of stations Port and silencer location R L B 01 1 station Right side Left side Both sides 10 10 stations (max.) Note) Right and left side are viewed from the front side of VAC port. Thread type Common EXH port size 04 1/2 Nil T F Rc NPTF G 06 3/4 S Silencer dedicated for ZZMA (ZZM-SA) Indicate the ejector model no. below the manifold base no.
2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B (JIS 10kFF) 3B (JIS 10kFF) 4B (JIS 10kFF) 4B (JIS 10kFF) 14-16-2
30 to 60C) 1 4 8 3 Note) AQ1500 and AQ1510 are not available. 3 4 Type Port size Symbol 0 5 Type Applicable model Diaphragm Lip AQ2 to AQ5 AQ1 Only Port size Applicable series M5 01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only 1 2 AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F Caution Be sure to read before handling
(Normally open) B Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 03 Electrical entry 04 CE-compliant 06 10 12 14 20 TL D T G Grommet Conduit terminal DIN terminal Conduit terminal with indicator light SYJ (32A) 1 4 1 (40A) 1 2 1 VQZ TS (50A) 2 Symbol Internal pilot
Size: -, Orifice: -, Style: -, Option: -, Port Size: -, Thread: -, Bracket: -
Size: -, Orifice: -, Style: -, Option: -, Port Size: -, Thread: -, Bracket: -
(B contact) N.O. (A contact) G GD GB GDB GU GUB 1 1 1 1 1 1 GXL-8F GXL-8FI GXL-8FB GXL-8FIB GXL-8FU GXL-8FUB 3 wire/NPN 3 wire/NPN 3 wire/NPN 3 wire/NPN 2 wire/Solid state 2 wire/Solid state N.C. (B contact) LXF LXS LXP LXS N.O. (A contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.C.
(A contact) G GD GB GDB GU GUB 3 wire/NPN 3 wire/NPN 3 wire/NPN 3 wire/NPN 2 wire/solid state 2 wire/solid state 1 1 1 1 1 1 N.O. (A contact) Proximity switch type N.C. (B contact) None Nil N.C. (B contact) Refer to the table on the right for proximity switch part numbers. N.O. (A contact) N.C.
(mm) Stroke range (mm) A Bore size (mm) CQ2 NCQ2 CQ2 NCQ2 CQ2 P NCQ2 Without auto switch With auto switch H C E C D H I O P Q U TH9 Z J S K1 K2 L M N B A B inch 18.3 3/8-24UNF 5 to 50 NPT 1/8 40 54 0 0.052 40 50 64 28 M8 x 1.25 52 13 16 69 Rc 1/8 14 14 5 66 35 14 14 7 40 5.5 9 depth 7 Note 1) 50 64 75,100 10 to 50 17.6 1/2-20UNF NPT 1/4 40.5 56.5 0 0.062 50 50.5 66.5 35 15 M10 x 1.5 86 Rc
Bore size Stroke range 12, 16 1 to 29 Stroke range 20, 25 1 to 49 32 to 63 1 to 99 Part no.: CQ2KB50-57DZ CQ2KB50-75DZ with 18 mm width spacer inside The B dimension is 115.5 mm.
thread (Rc, G, NPT/NPTF) 3/4 [3(R) port] 1/2: 1/2" Female thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 11.5 15.7 101.2 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 72 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" Female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" Female thread (Rc, G, NPT/NPTF) 1/8 (Pilot EXH port) 38.7 (6.5) 25 65.5 1/4, 3/8,