HRX-OM-I051

of Model Label . 1-7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures. 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Disposal of refrigerant and compressor oil. 1-15 1.7.2 Circulating fluid disposal. 1-16 1.7.3 System disposal . 1

ISO Standard Hydraulic Cylinder

6 @9 @8 !4 !3 @1 @3 @2 e o !8 @7 #0 !7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !

Guide Cylinder Series MGG

Bore size (mm) Stroke range (mm) S A AA AB AG AH AI AJ AL AP B I J K L M N O P T U V AK 20 25 32 40 50 6.6 75, 100, 125, 150, 200 90 11 11 112 125 82 95 9 25 108 30 55 60 80 25 45 1/8 26 12 82 48 M6 x 1 depth 9 9 100 14 13 134 150 92 108 9 30 130 35 65 70 100 35 54 1/8 31 13 100 57 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 9 120 14 16 134 150 102 118 9 35 135 40 73 80 106 35 60 1/8 38

AC Servo Motor Driver (SSCNET /H Type)

Pr.1 Setting value Set value set by PLC program (Unit) 0:mm 1 to 20(x10-2mm/min) 1:inch 1 to 20(x10-3inch/min) 2:degree 1 to 20(x10-3degree/min) (Note 1) 3:PLS 1 to 50(PLS/s) (Note 1) The command speed range by setting Pr.83 Speed control 10 x multiplier setting for degree axis" to valid: 1 to 20(x10-2degree/min). -64- Pr.9 Acceleration time 0, Pr.10 Deceleration time 0 Pr.9 Acceleration

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

MHZ

9@0@1 Seal kit CR FKM Si Material Dust cover @2 Finger assembly rty!1!3 Mounting thread wo!0!

CNS

For detailed specifications, refer to page 9-15-1.

High Vacuum Angle Valve, XL Series

pressure to 1 x 10-6 {760 to 7.5 x 10-9} Operating pressure Pa {Torr} Conductance l/s Note 1) 5 14 45 80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas permeation {Torr l/s} External Operating time s Note 2) 0.08 0.15 0.35 0.4 0.54 0.7 Flange type KF (NW), K (DN) KF

MB1

9!2!8 !4w !7 i o A A' Cylinder tube sectional view A-A' !0 !1 Parts list No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

JXCx-OMT0002

5 5 DHCP mode Note 2) 2 5 6 Unused : : : 9 9 9 Note 1) The mode to set IP address by DHCP server.

Fieldbus system EtherNet/IP compatible SI Unit

idling 0: hold 1: depend on Idle value 0 (Ch0 output) Idle value 0: clear, 1: ON 9 : : : 7 (Ch7 output) Idle value 0: clear, 1: ON -102No.EX-OMZ0024 Configuration format (EX600-AXA) EX600-AXA (14 byte) Byte Bit Parameter Setting value 0..3 Unit No. 0..8 0 4..7 Parameter type 1 1 0..7 Unit ID 20 (Hex) Unit parameter 0 Monitor short circuit 0: disable, 1: enable 1..3 Reserved 4 (Ch0&1 in)

AC Servo Motor Driver (Pulse input type/Positioning type)

/Program No. selection 3 DI2 1 0 1 Program No. 6 DI-1 1 1 0 Program No. 7 1 1 1 Program No. 8 Note. 0: off 1: on Program input 1 PI1 Turn PI1 on to resume the step stopped by the SINK (1) command in the program.

JXCx-OMT0062

Example) 1 byte Binary Decimal Hexadecimal (BIN) (OCT) (HEX) 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 0 0 0 0 0 0 1 0 2 2 0 0 0 0 0 0 1 1 3 3 0 0 0 0 0 1 0 0 4 4 0 0 0 0 0 1 0 1 5 5 0 0 0 0 0 1 1 0 6 6 0 0 0 0 0 1 1 1 7 7 0 0 0 0 1 0 0 0 8 8 0 0 0 0 1 0 0 1 9 9 0 0 0 0 1 0 1 0 10 A 0 0 0 0 1 0 1 1 11 B 0 0 0 0 1 1 0 0 12 C 0 0 0 0 1 1 0 1 13 D 0 0 0 0 1 1 1 0 14 E 0 0 0 0 1 1 1 1 15 F 0 0

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

9 !5 @1 !3 !0 !1 80, 100 80, 100 @2 Component Parts Replacement Parts/Seal Kit (Single rod) Bore size [mm] Kit no. Contents 32 CK95-32 No.

Programless Controller Series LECP1

1 to !4.

JIS Standard Hydraulic Cylinder

Refer to Best Pneumatics No. 2-1 for details. 361 CH2E/CH2F/CH2G/CH2H Series Construction @7 q y i @8 !4 #1 @6 @1 u @0 #0 o w !5 !8 !9 !6 !7 @9 !2 @2 @4 t e !0 CH2G Series !3 @3 r @5 !

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

24 RX(n+1).9 RY(n+1).9 Valve output 25 RX(n+1).A RY(n+1).A Valve output 26 RX(n+1).B RY(n+1).B Valve output 27 RX(n+1).C RY(n+1).C Valve output 28 RX(n+1).D RY(n+1).D Valve output 29 RX(n+1).E RY(n+1).E Valve output 30 RX(n+1).F RY(n+1).F Valve output 31 n: Start address -41No.EX-OMW1003-A Bit area (2) Input register Slave -> Master Output register Master -> Slave Corresponding Unit No.

CXS

3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 13 20 28 36 36 46 D 2 5 2 4.5 6.5 6.5 C 5.5 12.5 20.5 28 28 38 D 5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 15.5 22.5 30.5 38 38 48 4.5 7.5 4.5 7 9 9 Lead wire entry is inward prior to shipment.

Process Valve Series VNA

to 9 Note1)TZ Note1)TL CE compliant D DIN terminal Valve size 1 to 9 DIN terminal with light/surge voltage suppressor DZ Note 1) Except rated voltage: 6, 7 and 9.