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Document No.DOC1018377 PRODUCT NAME Clean Air Filter MODEL / Series / Product Number SFD110- Document No.DOC1018377 Contents Safety Instructions P.2 1. Application P.7 2. Standard specification P.7 3. How to order P.7 4. Construction and Replacement parts P.8 5. Maintenance P.8 6. How to mount P.8 7.

TMH M5 Port size ASD M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Applicable tubing O.D. Note) Type 01 02 03 04 Inch size Metric size Elbow Universal 2 3 1/8" AS 23 01 3.2 03 05 07 09 11 13 04 06 08 10 12 4 5/32" 6 3/16" Control AS-FE U10/32 N01 N02 N03 N04 8 1/4" Meter-out Meter-in 0 1 10 5/16" Made to Order Refer to the below for details.

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1

Note 3) The handle of the selector (2 position) cannot be removed or replaced alone. 5-6-35 Series VZM400 How to Order S 01 01 0 VZM45 Option Suffix for actuator F Foot bracket (Only internal pilot) Actuator type R S G B Red Hard steel roller Port size Basic 00 Color of push botton selector Rc 01 1 8 NPT N01 1 8 G F01 1 8 Roller lever 01 Black One Way Roller Lever 02 Green Straight plunger

Note 3) The handle of the selector (2 position) cannot be removed or replaced alone. 5-6-41 Series VZM500 How to Order S 01 01 0 VZM55 Option Suffix for actuator F Foot bracket Actuator type R S G B Red Hard steel roller Port size Basic 00 Color of push button selector Rc 01 1 8 Roller lever 01 Black 1 8 NPT N01 One way roller lever 02 Green G F01 1 8 Straight plunger 05 Y Yellow Roller plunger

Can designate 8 types of programs with a total of 3 bits. (a combination of 1.2.4) Pro-No.bit1 BIT 2 Program designation < 1 > 5 Pro-No.bit2 (5) BIT 3 18 Pro-No.bit3 (18) STP-NO BIT 1 6 Stp-No.bit1 (6) BIT 2 19 Stp-No.bit2 (19) BIT 3 7 The terminal which designates the step to be executed. Used when executing steps (position movement). (a combination of 1. 2. 4. 8. 16. 32. 64.)

R1/8M50.8 R1/4M50.8 C3604+ Al2O3(96) OFKM+ M12 88 g 95 g M12 175 g 182 g AWG23 0.72 mm 1.14 mm 4 3 m -15No.PS-OMS0004CN-D [mA] [V] A B 01MPa 0 1MPa -100100 kPa -100 kPa 100 kPa 0500 kPa 0 500 kPa -16No.PS-OMS0004CN-D A B PSE57-01 8 R1/8 PSE57-02 12 R1/4 M12 ZS-37-A 1 2 4 3 M12 ZS-37-B 3 4 2 1 M12 -17No.PS-OMS0004CN-D ZS-31-X D E F G H I ZS-31-X188 20 9 R1/8 Rc1/8 14 1.5 ZS

Nm 1.52 FG *() 6 33 2 () ( etc.) 10 m10 m DC(-)() -6No.PS-OMH0002CN-D * () CE (FKM) * 2030 1 LCD * ()(), (ISE70 ) O -7No.PS-OMH0002CN-D ISE ISE ISE ISE ISE ISE ISE ISE 70 01 MPa 02 43 70 75H 02 43 2 75 010 MPa A 75H 015 MPa 1 02 Rc1/4 N02 NPT1/4 S M12 (5m) F02 G1/4(ISO1179) L M12 (5m) 1 27 2 NPN 2 M SI 2 43 NPN 1 1 PNP 1 P psi() 1 65 PNP 1 1 2MPa 67 2 PNP 2 ZS-31-A A

Retainer prevents an accidental loss of needle AS3500-02 AS3500-03 Model Resin handle AS3500-02-2 AS3500-03-2 Metal handle Specifications 1/4 3/8 Port size 40, 50, 63 Applicable cylinder bore size (mm) 1.5 MPa Proof pressure 1 MPa Max. operating pressure 0.05 MPa Min. operating pressure 5 to 60C (No freezing) Ambient and fluid temperature 8 turns Number of needle rotation 130 g (Metallic

5 to 60C (No freezing) Ambient and fluid temperature Fluid Air Construction Relieving type Symbol Common IN Port Size/Weight Individual IN Port size Weight (kg) IN Pressure gauge port size 1 Model Piping IN side OUT side Body Regulator End plate End plate OUT IN 2 1 2 OUT 1 4 3 8 1 8 Common IN ARM2500 0.26 0.06 1 4 1 4 1 8 Individual IN 3 8 1 2 1 8 Common IN IN 1 OUT 2 2 OUT ARM3000 0.47

Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 01 02 03 04 05 06 07 11 12 13 21 22 23 24 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 Connection size Piping connection method Symbol Size and model no.

Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 Nozzle size Nil 01 02 03 04 05 06 07 11 12 13 21 22 23 24 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 Connection size Piping connection method Symbol Size and model no.

2. Main Parts Silencer AN20-02 Tank Parts List Liquid collector AEP100 Description Material Note Description Material No. No. Note Collected fluid Spring Body 1 4 Chromate treated Stainless steel 304 ADC12 180111 O-ring Bonnet 2 5 NBR JISB2401 P-40 Chromate treated ADC12 Diaphragm assembly Gauze 3 6 Stainless steel 304 180110A Handling Precautions Dimensions Mounting 1.

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8

entry Port 1(P), 2(A) 3(R) 1 8 1 8 01 1 02 G Grommet (Lead wire length 300 mm) 1 4 1 4 H Grommet (Lead wire length 600 mm) 1 4 1 4 02 3 03 D DIN terminal 3 8 3 8 DO DIN terminal (Without connector) 04 1 2 1 2 1 2 3 4 1 2 3 4 1 04 5 06 Body ported G Grommet (Lead wire length 300 mm) 10 1 1 1 H Grommet (Lead wire length 600 mm) 10 7 12 14 9 20 2 E Grommet terminal 1 4 1 T Conduit terminal

L3 Max. 1 4 1 2 L1 L2 D Min. L3 Max. Model Port size Model Port size 120 150 AS800 AS900 1 1 , 2 74 93 204 262 192 250 80 94 AS420 AS500 AS600 67.5 74 90 1/4, 3/8, 1/2 3/4 1 38 42 55 122 115 158 112 105 148 50 50 62 15-9-33

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AS-FG AS-FG AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 KE N AS-FG AS-FG AS-FP Note) For applicable tubing O.D. selection, refer to the Model on page 680. Use 1/8" tube.

Body Assembly B Manifold mounting parts IZN10 ES 2 10 A002 01 06 Number of manifold Mounting pitch ES 17mm 2 2 stations 3 3 stations 4 4 stations Nozzle shape NIL 01 02 11 Piping female Note 1) Rc1/8 Large flow nozzle Type Energy saving charge elimination nozzle Electrode needle cleaning kit/IZS30-M2 Piping diameter 06 f6: metric 07 f6.351/4"): inch 16 f6: metric (elbow) 17 f6.351/4"): inch

O-rings cannot be shipped as a single unit. 4 1 PVQ 8 3 3 A B 2 1 Body ported Base mounted 2 1 VY1 4 3 5 VBA VBAT 1 1 2 1 1 4 1 7 1 4 1 AP100 1 2 9 2 Without sub-plate 8 1 2 4 1 Option (2) Part no.