Electric Actuator/Rod Type LEY16, 25, 32 Series LEY Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

q Check that actuator label for model number. This matches the controller. w Check Parallel I/O configuration matches (NPN or PNP). q w Refer to the operation manual for using the products.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

q Check the actuator label for model number. This matches the controller/driver. w Check Parallel I/O conguration matches (NPN or PNP). q w *Refer to the Operation Manual for using the products.

Step Motor (Servo/24 VDC) Electric Actuator Miniature Rod Type LEPY Series LEPY6, 10

q Check the actuator label for model number. This matches the controller/driver. w Check Parallel I/O conguration matches (NPN or PNP). q w Refer to the operation manual for using the products.

® Electric Slide Table/Compact Type LES8, 16, 25 Series LES Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

q Check the actuator label for model number. This matches the controller/driver. w Check Parallel I/O configuration matches (NPN or PNP). q w Refer to the operation manual for using the products.

ZP

Description Material Surface treatment ZR t NBR, Silicone rubber, Urethane rubber, Fluoro rubber, EPR u o Pad q ZM r e w Adapter plate Aluminum w ZH w Hard chrome plated Piston rod Carbon steel e w Spring Stainless steel r ZU Buffer body Aluminum t Electroless nickel plated Buffer adaptor Brass y q q q ZL Electroless nickel plated Adaptor A Brass u Electroless nickel plated X type adaptor

e-Rodless Actuator

The tightening torque should be 0.1 to 0.2 Nm. 5 to 6 14 e-Rodless Actuator Series E-MY2 Names and Functions of Individual Part Controller detail w t q u End Motor I/O cable Controller Power supply cable Slider i y e r Switch FG terminal Motor side end Description Content/Function q w e r t y u i Stroke learning switch Description Content/Function Switch to move the actuator to intermediate

IZx-OMT0049

Angle K 5 Z 10 M 10 P 0.5 DIN rail bracket Q 1 2 3 5 Symbol Type R Angle Nil None S T W Include Z 10 1-2-2.

Clean Air Module

IDH Component Parts ID Threaded type Threaded type IDG Manual operation valve (with lever lock) IDK AMG Lead wire with L-type connector AFF With flow adjuster With differential pressure indicator AM PB AMD One-touch fitting One-touch fitting PA AMH AME u t q w e r y AMF No. Description Individual part no.

Precision Regulator

0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Construction VHS20/30 VHS40/40-06/50 y i u w w t t r q IN OUT OUT IN q e o EXH. EXH. VM Component Parts No.

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Body opton.ombi.albn s Nominal bore size Actuation ffi 1 Nol aEiab e wilhout auo switch 1 Nol a ab e wilh Doub e fod (W) r Nol a@ lable w lh spr n9 retum or spr n9 xlsd orwrrh supercompacr typ (z) .

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

DC (17 mA), 0.95 W DC (40 mA) Note 3) Power consumption (Current) 12 VDC 0.4 W DC (34 mA), 0.95 W DC (80 mA) Note 3) Note 1) Use dry air to prevent condensation when operating at low temperatures.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !

Drain Separator for Vacuum Series AMJ 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Fluid: Air (pressurized) Measured pressure: Downstream release to atmosphere 0.01 0.005 Supply pressure (MPa) AMJ5000 0.001 AMJ4000 0.0005 AMJ3000 100 10 50 0.0001 500 1000 Air flow rate (l/min (ANR)) Construction q q OUT IN IN OUT t w r w e r e Component

AS

2 w y r u e !2 t i q o !0 !1 i q o !0 !1 Component Parts No. Material Note No.

Drain Separator for Vacuum Series AMJ

Flow Characteristics Fluid: Air (pressurized) Measured pressure: Downstream release to atmosphere 0.01 0.005 Supply pressure (MPa) AMJ5000 0.001 AMJ4000 0.0005 AMJ3000 100 10 50 0.0001 500 1000 Air flow rate (l/min (ANR)) Construction q q OUT IN IN OUT t w r w e r e Component Parts No.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

When used as a switch output device Setting of NPN open collector 2 outputs Setting of PNP open collector 2 outputs Brown DC(+) q Brown DC(+) q Load Black OUT1 r Black OUT1 r Load Main circuit Main circuit + + 12 to 24 VDC 12 to 24 VDC White OUT2 w White OUT2 w Load Load Blue DC() e Blue DC() e When used as an IO-Link device Brown L+ q L+ Black C/Q r Main circuit C/Q IO-Link master White

Compact Cylinder

1 w i q !5 y 50, 63 Basic Type Description No. Material Component Parts Rod end male thread Note !