7

104.5 73.5 52.5 9 G VXD2 50A 28 77.5 40 180 24.5 59 155 14 120 52 104.5 73.5 52.5 ( ): Denotes the Normally Open (N.O.) dimensions. 147 VXD Series For Heated water/High temperature oil 3 A Dimensions/VXD2 Body Material: C37, Stainless Steel (1/4, 3/8, 1/2) Grommet U E 300 C (42) 40 2 For Heated water/ High temperature oil Full-wave rectifier T A b a IN OUT 3 A VXD2 Port size 04 (1/2) (

CV/MVGQ

48 42 85.5 91 93.5 CE2 80 107 49.5 48.5 51 48.5 59 93.5 101.5 55.5 50 54 50 94 107 102 100 ML2B 104 121 58.5 56 59 56 69.5 112 63 57.5 62 57.5 104 121 112 Operating Range C J G5-S CV Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) 3 5 1 38 (53) 23 (30) 32 (42) 1 23 (30) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 3/8, 1/2, 3/4 1 port 3/8, 1/2, 3/4 1 port Dimension inside is for rubber seal.

Compact Cylinder with Lock Series CLQ

Auto Switch Mounting Height (mm) D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL Auto switch model D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A7 D-A80 D-A73C D-A80C D-P4DWL Bore size (mm) Hs Hs Hs Hs Hs Hs Hs 20 25 32 40 50 63 80 100 D31.5 32.5 38.5 35 38 34 -X 35 36 42 38.5 41.5 37.5 44 41 42 48 44.5 47.5 43.5 50 Individual -X 47.5 48.5 54.5 51 54 50 56.5 57.5 58.5 64.5 61 64 60

Electric Actuator

Description Description Note 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 No.

Gun Type Ionizer

Gun Type Ionizer IZG10 Series IZS40/41/42 IZT40/41(-L)/ 42(-L)/43(-L) IZN10E IZF IZG10 ZVB IZD10/IZE11 IZH10 Antistatic Equipment *1 Lightweight 200 g Only *1 Body weight Lighting LED Reduced operating force Easy to hold grip Blow setting function p. 179 Select from continuous blow or pulse blow.

Intrinsically Safe Valve

Type 42/External Pilot Capable Add the valve and option part number under the manifold base part number.

MQQ

Dimensions Foot style: MQMLL 6 25 14 33 42 18.5 2.3 6 9 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke RE A B REC 10, 16, 20, 25 CX CY LY LH MQQ M X X Y Y LX LZ Z 4-LC S + Stroke LS + Stroke ZZ + Stroke LT RHC MK(2) RS Q G RS H A Bore size (mm) LC LH LS LT LX LY Z ZZ X S LZ Y RZQ 10 5.5 14 83 2.3 33 25 19 108 6 65 42 9 16 5.5 18 92 2.3 42 30 21 119 6 74 54 9 MI W S 20 6.8 25 137.5 3.2 40 40

CY1

Large variations may occur depending on the surrounding environment (variation on the order of 30%). 6 to 20 Auto switch model Bore size (mm) D-A9 A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 30 6 26 46 42 46 42 26 30 10 28 32 48 44 48 44 28 32 15 17.5 21.5 76.5 72.5 56.5 60.5 20 19.5 23.5 87.5 83.5 39.5 35.5 67.5 71.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25

MQQ

Dimensions Foot type/MQMLL 6 25 14 33 42 18.5 6 9 2.3 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke 10, 16, 20, 25 LY LH X X Y Y 4-LC S + Stroke LS + Stroke ZZ + Stroke LX LZ Z LT (mm) Bore size (mm) LS LC LT LH LX LY S Z LZ ZZ Y X 5.5 83 2.3 14 33 25 65 19 42 108 9 6 10 5.5 92 2.3 18 42 30 74 21 54 119 9 6 16 6.8 137.5 3.2 25 40 40 97.5 20.5 55 166 20 8 20 6.8 142.5 3.2 28 40 47 102.5 24.5

Free Mount Cylinder Series CU

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Recommended Pneumatic Circuit Warning Horizontal Operation Dual speed controller Meter-in speed controller Speed is controlled by meter-out circuit. Using concurrently the meter-in circuit can alleviate the stick-slip.

Magnetically Coupled Rodless Cylinder

(variation on the order of 30%) Large variations may occur depending on the surrounding environment. 6, 10, 15, 20 (mm) Auto switch model A B D-M9 D-F9W C D-M9 D-F9W D D-M9 D-F9W D-M9 D-F9W Bore size (mm) D-A9 D-A9 D-A9 D-A9 6 10 15 20 30 32 21.5 23.5 42 44 72.5 83.5 42 44 35.5 30 32 60.5 71.5 26 28 17.5 19.5 46 48 76.5 87.5 46 48 39.5 26 56.5 67.5 Note 1) Auto switches cannot be installed

KR

(mm) (1) L D Applicable tubing Nylon Urethane KGR04-08 KGR04-06 1.8 2.0 3.3 3 2.5 3 4.7 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 37 37 39.5 42 41 42 44.5 50.5 50.5 10.4 16 5.6 4 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 12.8 17 6 18.5 Applicable fitting size d 13.1 10.4 15.2 20 4.0 4.6 33 8 15.2 20 18.5 26.1

Cylinder with Lock Series CLS

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Lock Monitor Manual Unlocking Warning Caution 1.

24

FC FD H MGJ FH JMGP 4 x FG through B + Stroke C + Stroke FB FA G FF FE MGP MGP (mm) MGPW Bore size B C FA FB FC FD FE FF FG FH G H 12 42 29 7 6 80 89 18 25 4.5 5 26 58 16 46 33 7 6 88 98 22 32 5.5 5 30 64 20 53 37 8 8 102 112 24 38 5.5 6 36 83 25 53.5 37.5 9 7 114 126 30 40 6.6 6 42 93 32 59.5 37.5 10 12 138 154 34 50 9 9 48 112 40 66 44 10 12 146 162 40 60 9 9 54 120 50 72 44 12 16 178 198

CLA

~~ , A 00) 0(0) 0 (2.5) 2(6) 4(7. 5) ~ , 40 D-AG 43.5 49 55.5 3 D-AS 1(0 1(0) 5(1.5 I O{S.5) 8(4 3t 35 42 so 57 .5 ~ Ht A 00) 00) 0(2.5 26 417 .5) D-A3 B !

Battery-less

Dimensions [mm] Dimensions [mm] Model G LEFS40E-150 130 LEFS40E-200 280 LEFS40E-250 280 LEFS40E-300 280 LEFS40E-350 430 LEFS40E-400 430 LEFS40E-450 430 LEFS40E-500 580 LEFS40E-550 580 LEFS40E-600 580 Model G LEFS40E-650 730 LEFS40E-700 730 LEFS40E-750 730 LEFS40E-800 880 LEFS40E-850 880 LEFS40E-900 880 LEFS40E-950 1030 LEFS40E-1000 1030 LEFS40E-1100 1180 LEFS40E-1200 1180 42 Battery-less

MQQ

Q G RS H A Bore size (mm) LC LH LS LT LX LY Z ZZ X S LZ Y RZQ 10 5.5 14 83 2.3 33 25 19 108 6 65 42 9 16 5.5 18 92 2.3 42 30 21 119 6 74 54 9 MI W S 20 6.8 25 137.5 3.2 40 40 20.5 166 8 97.5 55 20 25 6.8 28 142.5 3.2 40 47 24.5 175 8 102.5 55 20 CEP1 CE1 Rod side flange style: MQMLF 6 CE2 20 ML2B 2.3 C J G5-S 33 42 27.5 2-5.5 66 + Stroke 93.5 + Stroke CV MVGQ 10, 16, 20, 25 CC RB FY J FT

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Port size N M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective

HRX-OM-Q026

PV SV HRSH Series 5.23 Communication Function 5-83 HRX-OM-Q026 Chapter 5 Display and Setting of Various Functions 42. Set time delay for the contact input signal 2 delay timer for reading with [] key or [] key, and press [SEL] key to enter.