Series AP500 0.14 0 10 0.00 0.07 0 100 200 300 400 Flow rate (slpm, N2) 0.69 (17.5) Max. 5.6 (142.2) AP1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 20 0.14 2.00 (50.8) A 10 0.07 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3
Refer to How to Order Manifold. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 D-sub Connector Cable Assembly (Option) Electric Characteristics Multi-core vinyl cable 0.3 mm2 x 25C Item Characteristics Cable length (L) Assembly part no.
Registration of Remote 10 (Wireless channel 10) Remote Registration of Remote registration 11 (Wireless channel 11) information Wireless Registration of Remote 12 channels (Wireless channel 12) 8-15 Registration of Remote 13 (Wireless channel 13) Registration of Remote 14 (Wireless channel 14) Registration of Remote 15 (Wireless channel 15) *1: The LED indicator W-MS indicates the system
CN4I/O . 19 (1) . 19 (2) . 20 5.4 CN5: . 20 6.
Bit number Value meaning 31 (MSB) X do not care 0 Device does not generate SYNC message 30 1 Device generate SYNC message 0 11 bit ID (CAN 2.0A) 29 1 29 bit ID (CAN 2.0B) 0 if bit 29 = 0 28 to 11 X If bit 29 = 1: bits 28 to 11 of 29-bit-SYNC-COB-ID 10 to 0 (LSB) X bits 10 to 0 of SYNC-COB-ID : The default values when the SI unit is supplied. Bits 29 to 11 are fixed (not changeable).
11 12 12 13 13 14 14 15 15 16 16 16 17 18 19 19 20 21 22 23 24-25 26 27 28 KV2H _ _-_ _S KV2H _ _-S_ _ KV2F _ _-_ _ KV2H _ _-_ _ KV2R _ _-_ _ KV2L _ _-99 KV2U _ _-99 KV2L _ _-_ _S KV2LF _ _-_ _ KV2L _ _-00 KV2K _ _-_ _S KV2KF _ _-_ _ KV2Y _ _-_ _S KV2T _ _-_ _S KV2TF _ _-_ _ KV2T _ _-_ _ KV2U _ _-_ _S KV2U _ _-_ _ KV2UD _ _-_ _S KV2UD _ _-_ _ KV2VF _ _-_ _S KV2VD _ _-_ _S KV2Z _ _-_ _S KV2E
15 15 R2 R2 Individual EXH spacer SJ7000-17-1 Individual EXH spacer SJ7000-17-2 Applicable manifold base Type SS5YJ7-20 Type SS5YJ7-21 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 R R1 R R1 Manifold Gasket DXT199-21-10 Manifold Gasket DXT199-21-11 L Blanking Plate Assembly SYJ7000-21-1A Applicable manifold base Type SS5YJ7-20 Type SS5YJ7-21 Applicable manifold base
M B For 2 to 10 stations: Both sides Special combination 20 20 stations 20 For 20 stations Note) 25 type is able to use with individual SUP spacer and individual EXH spacer assembly. Refer to page 3-3-14.
Refer to How to Order Manifold. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 D-sub Connector Cable Assembly (Option) Electric Characteristics Multi-core vinyl cable 0.3 mm2 x 25C Item Characteristics Cable length (L) Assembly part no.
Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge
38 43 C D Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 M3 x 27L M3 x 29L M3 x 31L M3 x 33L M3 x 38L M3 x 27L M3 x 29L M3 x 31L M3 x 33L M3 x 38L M3 x 43L M3 x 27L M3 x 29L M3 x 31L M3 x 33L M3 x 38L M3 x 43L 5 5 18 M3 x 18L 5 5 18 M3 x 18L
Lead wire color VQZ 4 1 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink Blue Purple Gray Orange Red VZ 5 10 16 11 20 17 VS VFN Multi-connector pin arrangement DIN rail mounting bracket Pin no. 1 SOL.
Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection T thread 10 20 30 40 50 04 8 4 10 13 16 A10 27.7 2.5 N S U F GN GS Vacuum inlet: Built-in One-touch fitting Pad diameter: 20 to 50 (Buffer stroke: 20 to 50 st) 06 10 6 J K ZP T F 10 06 31.8 10 6 4.5 08 35.9 14 8 6 20 30 50 20 25 32 40 50 A14 Applicable tubing O.D.
11 89 57.5 26 111 11 17.5 depth 13.5 Rc 3/8 112.5 20 25 98 28 77 100 M20 x 2.5 156 6.5 26 12 95 67.5 26 119 11 17.5 depth 13.5 Rc 3/8 132.5 24 30 117 29 94 Rod end male threads (mm) C D L K H X Bore size (mm) 20 15.5 10 23 8 M8 x 1.25 18 32 27 16 38.5 14 M14 x 1.5 30 40 27 16 38.5 14 M14 x 1.5 30 50 32 20 46 18 M18 x 1.5 35 63 32 20 46 18 M18 x 1.5 35 80 37 25 51 22 M22 x 1.5 40 100 37 30
02 11 stations 2 stations (2) Specified layout (Up to 23 solenoids possible.) 20 20 stations Note 1) Double wiring specifications: Single, double, 3 position and 4 position solenoid valves can be used at all of the manifold stations.
Solenoid Valve for Water and Air Dimensions (mm) 1in = 25.4mm VDW11 VDW21 22 20 Lead wire l approx. 300 Lead wire l approx. 300 21 27 20 27 Rectifying device AC type 20 27 Rectifying device 14 2 3.2 23.5 20 AC type 20.5 17 54 48 5 11 1 1 6 8 5 M5, 1/8 M5 1 (IN) port 1 (IN) port M5, 1/8 M5 2 (OUT) port 2 (OUT) port 15 2-M2.5 x 0.45 Thread depth 3.5 2-M3 x 0.5 Thread depth 5 VDW31 36 (27.6
AS-FG AS301FS, AS311FS AS401FS, AS411FS AS-FP Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-FM 10, 11, 12 10, 11, 12 12, 13, 16 12, 13, 16 1500 1000 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 08, 09 AS-D 06, 07 1000 AS-T 500 ASP 500 ASN 0 0 5 0 10 5 0 10 AQ Number of needle rotations Number of needle rotations ASV Note) The numbers above the flow rate characteristic curves
PF3W5--2 (Analogue 4 to 20 mA type: Without temperature sensor) Flashes three times.
0 11 o !0 11 o !0 11 o !0 11 Rod seal Rod seal Rod seal Rod seal NBR NBR NBR NBR (FKM can be selected.) (FKM can be selected.) (FKM can be selected.) (FKM can be selected.) o !0 11 o !0 11 Rod seal Rod seal NBR (FKM can be selected.)
0 11 o !0 11 o !0 11 o !0 11 Rod seal Rod seal Rod seal Rod seal NBR NBR NBR NBR (FKM can be selected.) (FKM can be selected.) (FKM can be selected.) (FKM can be selected.) o !0 11 o !0 11 Rod seal Rod seal NBR (FKM can be selected.)