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When released the CSV-102, pilots the Double Air Pilot 4-Way Valve back to the original position. The Impulse Relay takes the constant input from the CSV-102 and changes it to an impulse allowing for the auto-return from the Limit Switch.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

3.2 131 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 102 3.2 135 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 MGC 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 104 3.2 137 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 500 300 300 500 300 10 15 30 54 4 55 75 23 27 7 5

Dual Rod Cylinder Series CXSJ/CXS

107 112 117 122 132 142 147 152 162 70 50 40 212 122 127 132 137 142 147 152 157 162 172 182 187 192 202 97 182 92 112 117 122 127 132 142 152 157 162 172 102 107 568 Series CXS Dual Rod Cylinder Basic Type Auto Switch Proper Mounting Position (Detection at Stroke End) Electrical entry direction: Inward Electrical entry direction: Outward D B A C Operating Range D B D-Z7/Z8, D-Y7W D-Y5,

15

Dimensions: Ball Screw Drive LEFS25 (102) +0.025 0 3H9 ( ) depth 3 Body mounting reference plane Note) 64 4 x M5 x 0.8 thread depth 8.5 45 38 3.5 50 +0.025 0 3H9 ( ) depth 3 Motor type: NZ, NY, NX L A (Table traveling distance) 52 31.5 FF Motor mount 4 x FA thread thread depth FB 10 (52) 57.8 Mounting pitch: FC 38 Motor 38.5 45 47 48 6.5 (48) Motor mating part: FD, depth FE 24 6 M4 x 0.7

C76

115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177 32 12.5 25 37.5 50 75 100 125 40 12.5 25 37.5 50 75 100 125 6

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

102 3.2 3.2 3.2 55 40 40 40 75 55 55 55 4 4 4 7 6.8 6.8 1/4 1/8 1/8 16 13 13 11 8 8 M10 x 1.25 M32 x 2 23 10 8 M14 x 1.5 3.2 134 The bracket is shipped together.

C76

115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177 32 12.5 25 37.5 50 75 100 125 40 12.5 25 37.5 50 75 100 125 6

Table of Contents

B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 A 3 4 5 6 B 5.7 7 9 12 A 3 4 5 6 Model MHZL2-101 MHZL2-161 MHZL2-201 MHZL2-251 Model MHZL2-102 MHZL2-162 MHZL2-202 MHZL2-252 MHY MHW MRHQ Flat Type Fingers [3] Misc.

MXS

(Unit: N) Operating pressure (MPa) Bore size (mm) Rod diameter (mm) Piston area (mm2) Operating direction MXP 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 MG 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 MGP Standard Stroke 15 23 30 38 45 53 75 OUT IN 45 68 90 226 113 136 158 Model Standard stroke (mm) 12 6 MGQ 34 51 68 85 IN 170 102 119 MXS 6 10, 20, 30, 40, 50 80 121 161

Step Motor Controller

record display Log entry display Display setting (Easy/Normal mode) Language setting (Japanese/English) Backlight setting LCD contrast setting Beep sound setting Max. connection axis Distance unit (mm/inch) TB setting Easy/Normal Language Backlight LCD contrast Beep Max. connection axis Password Distance unit TB setting Reconnection of axis Reconnect Reconnect Dimensions 34.5 w 102

Air Slide Table Series MXS

mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) For clean room specifications, refer to Pneumatic Clean Series catalog. 0.7 0.6 0.5 0.4 0.3 0.2 40 34 29 23 17 11 57 OUT IN 6 3 29 25 21 17 13 8 42 Standard Stroke 71 61 51 40 30 20 101 OUT IN 8 4 53 45 38 30 23 15 75 Model Standard stroke (mm) 158 136 113 90 68 45 226 OUT IN 12 6 10, 20, 30, 40, 50 MXS6 119 102

Step Motor Controller

record display Log entry display Display setting (Easy/Normal mode) Language setting (Japanese/English) Backlight setting LCD contrast setting Beep sound setting Max. connection axis Distance unit (mm/inch) TB setting Easy/Normal Language Backlight LCD contrast Beep Max. connection axis Password Distance unit TB setting Reconnection of axis Reconnect Reconnect Dimensions 34.5 w 102

SMC Pneumatic Clean Series

102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit: Class 1 to 100.000

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

97 92 87 82 196 186 176 171 166 156 146 141 136 131 126 121 116 111 106 60 40 30 182 172 162 157 152 142 132 127 122 117 112 107 102 97 92 212 202 192 187 182 172 162 157 152 147 142 137 132 127 122 70 50 40 8-29-9 10 Series CXS Proper Auto Switch Mounting Position (Detection at stroke end) Electrical entry direction: Inward Electrical entry direction: Outward D B A C Operating Range D B

MY1

Table (1) 50 63 Bore size (mm) 6 to 26 14 to 54 87 60 A to A MAX B to B MAX C 6 to 31 14 to 74 102 85 Max. adjustment range Disassembly and Assembly Procedure Disassembly step 1. Remove the hexagon socket head cap screws 1, and remove the upper plates. 2. Remove the top cover. 3. Remove the hexagon socket head cap screws 2, and remove the end covers and couplers. 4.

Hygienic Design Cylinder Series HY

End Male Thread (mm) Bore size A1 94 101.5 122.5 123 B1 17 19 24 24 C1 20 22 29.5 29.5 MM M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 H1 6 7 10 10 K 6 6.5 8 8 KA 10 13 16 16 L1 33 36 46 46 X 22 24 32 32 HY 32 40 50 63 C M (mm) Bore size A 72 77.5 90.5 91 B 61 65.5 76.5 77 C 12 13 15 18 D 12 16 20 20 E 49.5 57.5 69 84 F 8.5 8.5 10.5 10.5 H M6 x 1.0 M8 x 1.25 M10 x 1.5 M12 x 1.75 I 62 71 88 102

MXS Series Air Slide Table

Model F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 KA NA 2 2 2 2 2 2 4 4 4 M 92 92 92 102 115 156 197 255 295 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35

Refrigerated Air Dryer

Note 3) Refer to pages 101 and 102 for further details on optional specifications.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

(mm) Female rod end (mm) With air cushion ZZ Bore size H Bore size S A1 GA RA ZZ WH WB WA MM Rubber Air 8 8 12 13 18 18 21 25 87 (96) 102 (114) 102 (114) 13 14 14 15 16 16 19 22 22 26 26 8 9 9 15 (17) 16 (18) 17 (18) 26 30 30 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.5 M10 x 1.5 M14 x 1.5 M16 x 1.5 139 (148) 162 (174) 162 (174) 1.5 3 3 40 50 63 92 (100) 93 (101) 95 (103) 95 (104) 108 (

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

x M5 x 0.8 thread depth 8 N 35 1 x F 2 4 x M4 x 0.7 thread depth 6 4H9 ( ) depth 3.5 +0.030 0 27 M 0.5 30 32 Z ZZ (NN 1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 ( ) depth 3.5 +0.030 0 5 B A NN x M5 x 0.8 thread depth 10 4H9 ( ) depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102