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6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

Turn off the power supply and turn on again to make the written parameter effective. 30 No.SFOD-OMT0012-A (2) Change of controller and actuator settings a) Parameter window From the View (V) menu in the main window, select the Parameter window.

SFOD-OMT0011 2015 7 2016 3 A 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015-2016 SMC Corporation All Rights Reserved No.SFOD-OMT0011CN-A

&WEB -14- 3. 5mm B B B A A () A B 0 A B A mm B Nm A B MHM-16D1 2 10 6 1.5 5 MHM-25D1 3 14 8 5.2 5 MHM-32D1 3 14 8 5.2 5 MHM-50D1 5 24 17 42 5 -15- D(mm) L(mm) MHM-16D1 14 25 MHM-25D1 19 37 MHM-32D1 19 43 MHM-50D1 30 63 4. 2 1 n /WEB Best Pneumatics m () 0.5 ( ) 3 (NPN) 3 (PNP) IC 2 3 (NPN) IC 3 (PNP) 2 PLC 2 3 (PNP) 3 (NPN) IC (2 ) 2 1 0.5mM9NW 1m M M9NWM 3m L M9NWL 5m

D: Added example of wiring to robot controller 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved 43 -

. *2) JIS B 8370 URLhttps://www.smcworld.com/ Machinery Directive 2006/42/EC EMC Directive 2004/30/EU RoHS Directive 2011/65/EU i i.1 . i-1 i.1.1 . i-1 i.2 . i-2 i.2.1 . i-3 i.2.2 . i-3 i.2.3 . i-3 i.2.4 . i-3 i.2.5 . i-4 i.2.6 . i-4 i.2.7 . i-4 i.2.8 . i-5 i.2.9 . i-6 i.3 . i-7 i.4 / . i-7 1 1.1 . 1-1 1.2 . 1-2 1.2.1 C . 1-2 1.2.2 G . 1-2 1.2.3 K . 1-2 1.2.4 R . 1-2 1.2.5

June 2019 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved -23-

PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 010. 2 M Pa M AD E I N J APAN So G No. o S o1 T P2 U Q3 V R4 W Z12 6- (1) Nm 1/4 3/8 1/2 12~14 22~24 28~30 (2) (3) (4) 7- (1) (2) (3) (4) (1) (2) (3) (1) (2) O 3 (3) 3 (4) P.5 0 (5) 0 8- (1) (2) (3) 21Nm (4) ON-OFF 5 79Nm (6) (7) (8) 0.5MPa 0.1MPa (9) AN Rc1/2 (1) (2) 9- (1) (2) 1.5~2 (1) 1 1.5 (2) (3) a b

O-ring Stand (4) Register the product and related documents with the Special Equipment Safety Supervision Department before using the device or within 30 days after starting to use the device. Spare port (2) Operating pressure Use this air tank at maximum operating pressure of 1.5 MPa or less.

VBA-0M-P018-A VBAT10A1-U-X104 VBAT-M35C 2 / VBAT05A1-U-X104 VBA1 4 / VBA1 4 /VBAT10A-Y-3 VBA2 4 VBAT05A1-U-X104 VBAT10A1-U-X104 VBA1 1 O /VBAT5A-Y-3 O VBA1 1 VBA2 1 1 1 / VBAT-U 1 1 1 / VBAT-U 1 1 1 / VBAT-M35 / VBAT-M35C () () 1 1 / VBAT-M35 / VBAT-M35C () () 1 1 1 1 SMC ( 3 ) VBA2 VBA1 () 30 IN 1.5MPa VBA1A 2MPa, O 1.5MPa OUT VBATA1--X104 VBAT-V1 OUT

2 VBA-OM-P019-A VBAT20A1-T-X104VBAT38A1-T-X104 VBAT-M36C / VBA2 4 VBA4 4 /VBAT20A-Y-3 VBA2 4 VBAT20A1-T-X104 VBAT38A1-T-X104 VBA4 4 VBA2 1 O VBA4 1 1 / VBAT-T 1 1 1 / VBAT-M36 / VBAT-M36C () () 1 1 1 SMC ( 3 ) () 30 IN 1.0MPa OUT VBATA1--X104 O VBAT-V1 OUT 4 13 () 1 VBAT20A1-T-X104 VBAT38A1-T-X104 1.0MPa Q235B 22L 38L 075 15kg 26kg VBAT-V1 IN 1/2 OUT 1/2 3/

VBA-0M-S006 1.5MPa VBA1A 2MPa, 1.5MPa 1 1 1 VBA1 1 O VBA2 4 VBA2 1 VBA1 4 1 1 1 1 () () / OUT / VBAT-M46C / VBAT-M46 4 11 () VBAT10S1-U-X104 / /VBAT10S-Y-4 () VBAT-U 30 1 1 VBA1 4 O VBA1 1 /VBAT5S-Y-4 1 1 / 1 VBAT-U 1 1 ( 3 ) VBAT-V1 () () / / VBAT-M46C / VBAT-M46 VBAT05S1-U-X104 2 OUT VBAT-M46C VBAT05S1-U-X104 VBAT10S1-U-X104 IN VBAT05S1-U-X104

VBA-OM-S007 4 13 ()() OUT () 30 1 1 VBA2 4 VBA4 4 VBA2 1 O VBA4 1 1 1 VBA4 4 VBA2 4 1 1 1 1.0MPa ( 3 ) VBAT-V1 () () VBAT20S1-T-X104VBAT38S1-T-X104 / / VBAT-M47C / VBAT-M47 / 2 /VBAT20S-Y-4 VBAT-T OUT VBAT-M47C VBAT20S1-T-X104 VBAT38S1-T-X104 VBAT20S1-T-X104 VBAT38S1-T-X104 13kg 19kg 20L 38L OUT 1/2 3/4 O IN TSG R0003-2007 VBA2/VBA4 1.0MPa SUS304 0~75

If the sub display is switched during the arbitrary display setting, the display will be returned to the arbitrary display 30 seconds later. (The default setting does not include arbitrary display.) Other parameter settings Item Default setting Item Default setting [F 3] Digital filter setting 0.00 ms [F80] Power saving mode OFF Press the button between 1 and 3 sec.

If the sub display is switched during the arbitrary display setting, the display will be returned to the arbitrary display 30 seconds later. (The default setting does not include arbitrary display.) Other parameter settings Item Default setting Item Default setting [F 3] Digital filter setting 0.00 ms [F80] Power saving mode OFF Press the button between 1 and 3 sec.

If the sub display is switched during the arbitrary display setting, the display will be returned to the arbitrary display 30 seconds later. (The default setting does not include arbitrary display.) Other parameter settings Item Default setting Item Default setting Panel [F81] Security code OFF [F 2] No configurable items Press the button between 3 and 5 sec.

When using a tube manufactured by a company other than SMC, check that its outside diameter tolerance satisfies the following values: 1) Nylon tube: 0.1 mm maximum 2) Soft nylon tube: 0.1 mm maximum 3) Polyurethane tube: +0.15 mm/-0.2 mm maximum NOTE The direct current power supply to be used should be UL approved as follows: Circuit (of Class2) which is of maximum 30 Vrms (42.4 V peak),

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 ISE80(H) ISE80(H) MPa Nil or M P psi ZSE80(F) kPa ZSE80(F) : Insert the tube into the air-relieving port until it bottoms out. : SMC TU0425 (polyurethane, O.D 4, I.D 2.5) is a suitable tubing.

URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved