AIR SLIDE TABLE

16.5 16.5 16.5 16.5 16.5 16.5 24.1 18.1 18.1 25.1 25.1 31.1 50.1 50.1 MXQ16B 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 33 23 23 23 29 38 63 63 63 MXQ20B 32.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 30.9 31.9 31.9 31.9 44.9 44.9 46.9 69.9 69.9 Solid state auto switch: D-M9M9 A Stroke Stroke Model 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 2

60

VXK2l3l 4.5 10 15 20 30 40 50 60 3 2 VXK 4l 6 30 60 3 2 VXK 50 8 25 30 Flow rate Q kg/h ( ): Saturated steam holding heat (kcal/kg) ( ): Saturation temperature (C) How to read the graph The sonic range pressure to generate a flow rate of 15 kg/h is P1 0.15 MPa for 4.5 orifice (VXK2l3lS), P1 0.37 MPa for 3 orifice (VXK2l2lS), and P1 0.82 MPa for 2 orifice (VXK211lS).

2/3 Port Valve

93 109 5 6 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 61.5 74 4.2-40 VND 32A, 40A, 50A Port size Model Main port Rc(PT) Pilot port Rc(PT) A B C D E F G H J 1 8 1 4 1 4 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 1 4 1 2 1 1 2 VND50D-32A VND60D-40A VND70D-50A Flange/32F, 40F, 50F Port size VX VN VQ Model Pilot port Rc(PT) Applicable

AC Servo Motor Driver (SSCNET /H Type)

Recommended Parameter Values [LEF] LEFS25T6 LEFS32T7 LEFS40T8 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Digital Pressure Switch

Page 30 [F 0] Units selection function -48No.PS-OMU0003-D [F80] Power saving mode Power saving mode can be selected. When selected and no buttons are pressed for 30 seconds, the pressure switch will shift to power saving mode. Press the or button in function selection mode to display [F80]. Press the button. Move on to power saving mode.

PFxx-OMP0001CN

43.7 37.2 15 14 26 18 13.6 PFMB7202 90 35 49.2 42.7 17.5 24 31 28 16.8 S T U V W PFMB7501/7102 24 22 32 40 50 PFMB7202 30 30 42 48 58 -67No.PF-OMP0001CN-F (ZS-33-D) (ZS-33-F) -68No.PF-OMP0001CN-F Revision history A B C D E F [September 2016] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications

Voltage Monitor for PFMV5

Do not use a cable longer than 30 m. Wire the DC (-) line (blue) as close as possible to the power supply.

XMD/XYD Series

Bonnet assembly/construction part number:1 Valve size Temperature specifications 25 40 50 63 80 Caution General use XLD25-30-1 XLD40-30-1 XLD50-30-1 XLD63-30-1 XLD80-30-1 High temperature XLD25-30-1H XLD40-30-1H XLD50-30-1H XLD63-30-1H XLD80-30-1H Note1) The magnet for auto switch is not provided. When the magnet for auto switch is necessary, add -M9// at the suffix of the part number.

AC Servo Motor Driver (Pulse input type/Positioning type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Initial value Recommended Value Parameter *1,*2 Para No Number of command input pulses per revolution *3. PA05 100 100 Electronic gear numerator *3. PA06 1 100 (Positioning mode: 10) Electronic gear denominator *3.

LEKF-OMZ0035

Slider type LEKFS series 2.1 Specification AC servo motorMotor typeS*/T*) Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 100 to 500 100 to 500 200 to 600 Horizontal 10 20 20 30 40 45 30 50 60 Work load [kg] Note1) Vertical 4 8 15 5 10 20 7 15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000

High performance type Step Motor Controller (Servo/24 VDC)

Make sure to allow intervals of 15 ms or longer (30 ms is recommended) between input signals, and maintain the input state for the same period of time. 30 No.JXC-OMY0002-A -Output terminalNo. Function Description B1 OUT0 When the operation is started and DRIVE is turned OFF, a Bit no. corresponding to the number of the active step data will be output from these terminals.

IZ-OMK0015

Ion balance OK LED Within +/-30 V Lighting (or Flash) Outside of +/-30 V Goes off * OK LED Flashes when the offset voltage is near the adjusting target to notify the emitter maintenance timing is coming soon. ALARM LED: Indicates the abnormal states of the ionizer. Model Nu File 00 LED name Function HV Indicate that abnormal current flows to the emitter.

Magnetically Coupled

5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 1/4" 6 12 3/8" 10 20 5/8" 15 40 3/4" 20 60 1" 25 80 32 1-1/4" 80 1-1/2" 40 80 2" 50 80 2-1/2" 63 80 Note) The longer the stroke, the larger the amount of deflection in a cylinder tube.

Antibacterial Filter (5μm) Antibacterial Filter (0.1μm) Odor Removal Filter Bacteria Removal Filter

Dimensions HF2-BFA, HF2-BFB, HF2-BFD HF2-BFC Model P A B C D E G J HF2-BFA30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFB30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFC30 1/4, 3/8 53 126.4 21.5 26.5 30 35 26.5 HF2-BFD30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFA40 1/4, 3/8, 1/2 70 180.9 25.5 35.5 38.4 40 35.5 HF2-BFB40 1/4, 3/8, 1/2 70 180.9 25.5 35.5 38.4 40 35.5 HF2-BFC40 1/4, 3

PSxx-OMU0002CN

[F 0] -48No.PS-OMU0002CN-D [F80] 30 <> [F80] [F80] 30 () [ECo] (ON) ON OFF -49No.PS-OMU0002CN-D [F81] <> [F81] [on]() [oFF]() () (000 ) /(64 ) [FAL] 3[nG] -50No.PS-OMU0002CN-D /(64 ) 1 () 1 [F81] , 30 -51No.PS-OMU0002CN-D [F82] [F10][dUAL][LinE] <> [F82] () ( ,) AbY(Z)019 (1 3 ) /() 1 () [F82] (3) QXZ((/)(*) () (1) AZ3 <3 > () -52No.PS-OMU0002CN-D [F90]

PSxx-OMU0008CN

No.PS-OMU0008CN-D // ZSE20C(F) ISE20C(H) 2 9 11 12 16 16 19 21 [] 24 25 3 26 28 30 30 30 F0 32 F1 OUT1 33 F2 OUT2 36 F3 38 F4 39 F5 FUNC 41 F6 43 F10 44 F11 50 F80 51 F81 52 F82 54 F90 55 F96 57 F97 58 F98 60 F99 62 63 67 67 68 77 77 79 -1No.PS-OMU0008CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

PSxx-OMV0008CN

30 () [ECo] (ON) ON OFF -49No.PS-OMV0008CN-E [F81] <> UPDOWN[F81] SET UP DOWN SET UP DOWN () [oFF]() SET (000) /(62) [FAL] 3[nG] SET1 -50No.PS-OMV0008CN-E UP DOWN / (62) SET 1 () UP DOWN SET [F81] 30 -51No.PS-OMV0008CN-E [F90] <> UPDOWN[F90] SET UP DOWN [on] [oFF]() SET [oFF]() SET [F90] SET 53 UP DOWN SET2 -52No.PS-OMV0008CN-E 1 2 PNP/NPN 3 4 OUT1 5 OUT1

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

30 30 30 30 30 45 55 68 58 67 73 21 26 32 23.5 28 34.5 46 55 66 59 71 82 34.5 40 46.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) N NB P S XA XL Y WL WM ZZ M MA MB MC MM 40 50 63 44 50 56 74 83 89 1/4 1/4 1/4 168 183 204 12 16 16 6 6 6 9.5 12.5 15 42 42 52 16 16 16 4 5 5 12 15 15 M6 x 1.0 M8 x 1.25 M8 x 1.25 10 14 14 to 1000 to 1000 to 1000 208 228 254 39 42 52 9 Non-rotating Double

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Air consumption 200l/min ANR) 30 Air consumption 100l/min (ANR) Air consumption 50l/min (ANR) 20 20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Digital Pressure Switch

Function selection mode 30 Default setting 30 F 0 Units selection function 32 F 1 Setting of OUT1 33 F 2 Setting of OUT2 36 F 3 Digital filter setting 38 F 4 Auto-preset function 39 F 5 FUNC terminal setting 41 F 6 Fine adjustment of display value 43 F10 Sub display setting 44 F11 Display resolution setting 50 F80 Power saving mode 51 F81 Security code 52 F82 Input of line name 54 F90 Setting