5

(mm) Bore size A AL B B1 B2 D F FL G H H1 H2 I K KA LC LD LH LS LT LX LZ MM NA NN P S X Y Z ZZ 20 18 15.5 40 13 26 8 13 10.5 8 41 5 8 28 5 6 4 6.8 25 102 3.2 40 55 M8 x 1.25 24 M20 x 1.5 1/8 62 20 8 21 131 25 22 19.5 47 17 32 10 13 10.5 8 45 6 8 33.5 5.5 8 4 6.8 28 102 3.2 40 55 M10 x 1.25 30 M26 x 1.5 1/8 62 20 8 25 135 32 22 19.5 47 17 32 12 13 10.5 8 45 6 8 37.5 5.5 10 4 6.8 28 104 3.2

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

LVD20 LVD30 LVD40 LVD50 LVC20 LVC30 LVC40 LVC50 A 54.5 79.5 82 105.5 54.5 79 96 129 B 114 67 83 93 79 106 131 154 Integral tubing (construction) 493 Guide ring Eliminates lateral motion of the poppet which reduces internal leakage. Piston damper Absorbs piston momentum to minimize impact-induced particle generation.

02-mgq-e

.: GR-S-010 (10 g) 131

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Operating humidity range Operating/Stored: 35 to 85%RH (No condensation) Standards CE, RoHS Environment IO-Link type Device IO-Link version V1.1 Communication speed COM2 (38.4 kbps) Configuration file IODD file*5 Minimum cycle time 2.3 ms Process data length Input data: 2 bytes, Output data: 0 bytes On request data communication Yes Data storage function Yes Event function Yes Vendor ID 131

Compact Cylinder

load at rod end [N] 80 Mass of Cylinder Moving Parts: Without Magnet for Auto Switch [g] 63 50 10.0 Bore size [mm] Cylinder stroke [mm] 40 32 5 10 15 20 25 30 35 40 45 50 12 5 6 7 8 9 10 25 16 5 6 7 9 10 11 20 9 11 13 15 17 19 21 23 25 27 20 16 1.0 25 15 18 21 24 27 30 33 37 40 43 32 27 32 36 41 45 50 54 59 63 67 12 0.4 40 42 48 54 60 66 73 79 85 91 97 0 10 20 30 40 50 50 91 101 111 121 131

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

2.6 (D) L K d e DS: DIN terminal DZ: DIN terminal with light GS: Grommet with PCB CS: Conduit U V E Applicable cable 6 to 12 G1/2 U E 300 U E 500 NPT1/2 T T T DN: DIN terminal without connector WN: M12 connector E U E U T T Glossary of Terms [mm] Size Port size A B C D E F I J K L M Grommet Grommet with PCB T U T U 50 3/4 110.6 29 36 71 18 4.5 17 51 32.5 38.5 35 51.9 28.5 57.6 38 60 1 131

Industrial Filters

100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 500 24 260 103 560 400 270 710 1045 1445 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 750 24 295 137 560 400 270 710 1305 1705 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 1000 24 340 171 560 400 270 710 1570 1970 100 150 FGAC FGAS 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 760 22 500 24 330 131

Thermo-con/Rack Mount Type

176 151 7 139.7 139.7 134 125 107 38 38 21 0 0 Label Handle (for installing/removing the product to/from the rack) 484 474.5 447 403 250 49 38 9.5 0 Ventilation hole (air inlet) Circulating fluid level gauge Communication connector Label Power supply connector Ventilation hole (air outlet) External temperature sensor connector Alarm output connector 104 242 269 69 0 Model no. label 144 131

53

Flow switch Refer to the Best Pneumatics No. 8 for details. 131 A Thermo-chiller Inverter Type HRSH090 Series Circulating Fluid Temperature Controller Convenient functions (Refer to the Operation Manual for details.) Unit conversion function Temperature and pressure units can be changed.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(A port) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (WO) 49 49 49 49 57.2[59.4] 36.2 52.2 67[69.2] 58.7 76.1 MAX.10 66.1 77 Pg7 65.2[72.2] Approx. 300 (Lead wire length) 41.1 M8 x 1 58.6 68.1 Approx. 300 (Lead wire length) 38.7 79.4 54.1[61.1] 86.9 Applicable cable O.D. 3.5 to 7 Refer to page 704 for dimensions with connector cable. 3 68 59 80 71 6 116 107 131

Slider Type Ball Screw Drive/11-LEFS Series

encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev) 25APower consumption [W] Note 7) Horizontal 45 65 210 Vertical 145 175 230 LEC Standby power consumption when operating [W] Note 8) Horizontal 2 2 2 Vertical 8 8 18 LEC S Max. instantaneous power consumption [W] Note 9) 445 725 1275 Type Note 10) Non-magnetizing lock Holding force [N] 131

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

L 16 44 8 L (7.5) 8 2514 131 (35) (25) 5.5 47.04 SMC 55 Approx. 10 Multi-core vinyl cable 0.3 mm 2 x 25C 2 x M2.6 x 0.45 Socket side Terminal no. Rail mounting hole pitch 12.5 0 1 2 3 4 5 6 7 8 9 No.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

L n Formula L1 = 11.5n + 67 L2 = 11.5n + 96.5 n: Stations (Max. 16 stations) Dimensions 16 251 280.5 300 310.5 15 239.5 269 300 310.5 14 228 257.5 287.5 298 13 216.5 246 275 285.5 12 205 234.5 262.5 273 11 193.5 223 250 260.5 10 182 211.5 237.5 248 9 170.5 200 225 235.5 8 159 188.5 212.5 223 7 147.5 177 200 210.5 6 136 165.5 187.5 198 5 124.5 154 175 185.5 4 113 142.5 162.5 173 3 101.5 131

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Station L1 L2 L1 L2 Port size M5 1/

Intrinsically Safe Valve

type (TT) 53-SS5Y7-20Stations Stations 204.2 191.2 170.6 157.6 95.6 71.7 Max. 10 L (Lead wire length) L (Lead wire length) 39 41.7 67 67 Stations n 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations 11 stations 12 stations 13 stations 14 stations 15 stations 16 stations 17 stations 18 stations 19 stations 20 stations 388 L1 L2 55 74 93 112 131

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

AMR3000 to 6000

with Mist Separator AMR3000 to 6000 Dimensions AMR3000 AMR4000, 5000, 6000 N Bracket mounting dimension With auto drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) P 50 35 45 46.5 R 78 97 98 115 S 8 7 10 15 T 9 9 11 11 B 260 298 366 432 L 178 211 277 321 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 436 10 10 70 70 103 121 131

Manifold Regulator ARM1000/2000 Series

VEX SRH (Pitch) IN (Individual IN) IN (Common IN) SRP SRF Symbol Model Dimensions ITV C 34 43 D 21 28 E 18 27 F 56 70 G 16 20 H 9 11.5 J 18 24 K 19 28 M 52 66 P 9 11.5 Q 11.5 16.5 R 4.8 4.8 A 4.5 4.5 B 25 34.5 ARM1000 ARM2000 IC ITVH Dimensions by the Number of Stations Manifold stations (n) ITVX Model Symbol 1 36 27 48 39 2 55 46 76 67 3 74 65 104 95 4 93 84 132 123 5 112 103 160 151 6 131

With Factory Installed

AW2001 AW3001 AW4001 6) Valve ass'y Brass NBR 1349160 131521 6A 13 16212A e Filter element Bronze 11 294-5B 11 1511-5B 11 104-5B Baffle ABS resin 11295 111522 111622 0 Diaphragm ass'y NBR 131445A 131 52 15A 1316211A Deflector ABS resin 112961 11158 11167 Ci) Bowl ass'y 1'<0'., Polycarbonate C200F C300F C400F 0 Valve spring Stainless steel 13491 58 131525 131625 C!!)